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Journal Articles

General method for predicting ZnO–metal interface termination: Extension of the method for Al₂O₃–metal systems

Michiko Yoshitake

J. Vac. Sci. Technol. A 39, 063217 (2021)

https://doi.org/10.1116/6.0001312

Published: October 2021

View article titled, General method for predicting ZnO–metal interface termination: Extension of the method for Al2O3–metal systems

Journal Articles

Correlating surface stoichiometry and termination in SrTiO₃ films grown by hybrid molecular beam epitaxy

Suresh Thapa, Sydney R. Provence, Devin Jessup, Jason Lapano, Matthew Brahlek, Jerzy T. Sadowski, Petra Reinke, Wencan Jin, Ryan B. Comes

J. Vac. Sci. Technol. A 39, 053203 (2021)

https://doi.org/10.1116/6.0001159

Published: July 2021

View article titled, Correlating surface stoichiometry and termination in SrTiO3 films grown by hybrid molecular beam epitaxy

Includes: Supplementary data

Journal Articles

Localized phase transition of TiO₂ thin films induced by sub-bandgap laser irradiation

Syeed E. Ahmed, Violet M. Poole, John Igo, Yi Gu, Matthew D. McCluskey

J. Vac. Sci. Technol. A 39, 053402 (2021)

https://doi.org/10.1116/6.0001088

Published: July 2021

View article titled, Localized phase transition of TiO2 thin films induced by sub-bandgap laser irradiation

Journal Articles

Two-step model for reduction reaction of ultrathin nickel oxide by hydrogen

Shuichi Ogawa, Ryo Taga, Akitaka Yoshigoe, Yuji Takakuwa

J. Vac. Sci. Technol. A 39, 043207 (2021)

https://doi.org/10.1116/6.0001056

Published: June 2021

View article titled, Two-step model for reduction reaction of ultrathin nickel oxide by hydrogen

Includes: Supplementary data

Journal Articles

Thermodynamic stability of hexagonal and rhombohedral boron nitride under chemical vapor deposition conditions from van der Waals corrected first principles calculations

Henrik Pedersen, Björn Alling, Hans Högberg, Annop Ektarawong

J. Vac. Sci. Technol. A 37, 040603 (2019)

https://doi.org/10.1116/1.5107455

Published: June 2019

View article titled, Thermodynamic stability of hexagonal and rhombohedral boron nitride under chemical vapor deposition conditions from van der Waals corrected first principles calculations

Includes: Supplementary data

Journal Articles

Double-sided reel-to-reel metal-organic chemical vapor deposition system of YBa₂Cu₃O_7-_δ thin films

Fei Zhang, Jie Xiong, Xin Liu, Ruipeng Zhao, Xiaohui Zhao, Bowan Tao, Yanrong Li

J. Vac. Sci. Technol. A 32, 041512 (2014)

https://doi.org/10.1116/1.4884367

Published: June 2014

View article titled, Double-sided reel-to-reel metal-organic chemical vapor deposition system of YBa2Cu3O7-δ thin films

Journal Articles

Novel method for the prediction of an interface bonding species at alumina/metal interfaces

Michiko Yoshitake, Shinjiro Yagyu, Toyohiro Chikyow

J. Vac. Sci. Technol. A 32, 021102 (2014)

https://doi.org/10.1116/1.4849375

Published: December 2013

View article titled, Novel method for the prediction of an interface bonding species at alumina/metal interfaces

Journal Articles

Relative lability of gold-oxide thin films in contact with air, solvents, or electrolyte solutions

Kevin M. Cook, Gregory S. Ferguson

J. Vac. Sci. Technol. A 31, 021508 (2013)

https://doi.org/10.1116/1.4791687

Published: February 2013

View article titled, Relative lability of gold-oxide thin films in contact with air, solvents, or electrolyte solutions

Includes: Supplementary data

Journal Articles

X-ray photoelectron spectroscopic study on interface bonding between Pt and Zn- and O-terminated ZnO

Michiko Yoshitake, Petr Blumentrit, Slavomir Nemsak

J. Vac. Sci. Technol. A 31, 020601 (2013)

https://doi.org/10.1116/1.4772464

Published: December 2012

View article titled, X-ray photoelectron spectroscopic study on interface bonding between Pt and Zn- and O-terminated ZnO

Journal Articles

Highly conformal film growth by chemical vapor deposition. II. Conformality enhancement through growth inhibition

A. Yanguas-Gil, N. Kumar, Y. Yang, J. R. Abelson

J. Vac. Sci. Technol. A 27, 1244–1248 (2009)

https://doi.org/10.1116/1.3207746

Published: September 2009

View article titled, Highly conformal film growth by chemical vapor deposition. II. Conformality enhancement through growth inhibition

Journal Articles

Characterization of microwave plasmas for deposition of polyparylene

Gerhard Franz, Florian Rauter, Stanislav F. Dribinskiy

J. Vac. Sci. Technol. A 27, 1035–1041 (2009)

https://doi.org/10.1116/1.3148825

Published: June 2009

View article titled, Characterization of microwave plasmas for deposition of polyparylene

Journal Articles

Computational analysis of solid-vapor equilibria for ZnS and SrS phosphor synthesis conditions

Heribert Wiedemeier

J. Vac. Sci. Technol. A 24, 450–458 (2006)

https://doi.org/10.1116/1.2190648

Published: April 2006

View article titled, Computational analysis of solid-vapor equilibria for ZnS and SrS phosphor synthesis conditions

Journal Articles

Uniformity study in large-area showerhead reactors

R. Sobbia, L. Sansonnens, J. Bondkowski

J. Vac. Sci. Technol. A 23, 927–932 (2005)

https://doi.org/10.1116/1.1868613

Published: June 2005

View article titled, Uniformity study in large-area showerhead reactors

Journal Articles

Quantitative comparison between Auger electron spectroscopy and secondary ion mass spectroscopy depth profiles of a double layer structure of AlAs in GaAs using the mixing-roughness-information depth model

S. Hofmann, A. Rar, D. W. Moon, K. Yoshihara

J. Vac. Sci. Technol. A 19, 1111–1115 (2001)

https://doi.org/10.1116/1.1345899

Published: July 2001

View article titled, Quantitative comparison between Auger electron spectroscopy and secondary ion mass spectroscopy depth profiles of a double layer structure of AlAs in GaAs using the mixing-roughness-information depth model

Journal Articles

X-ray photoelectron spectroscopy study of bombardment-induced compositional changes in ZrO 2 , SiO 2 , and ZrSiO 4

Fabio Iacona, Roger Kelly, Giovanni Marletta

J. Vac. Sci. Technol. A 17, 2771–2778 (1999)

https://doi.org/10.1116/1.581943

Published: September 1999

View article titled, X-ray photoelectron spectroscopy study of bombardment-induced compositional changes in ZrO 2 , SiO 2 , and ZrSiO 4

Journal Articles

Effect of deposition temperature on the structural properties of n + μc-Si:H films

B. Park, R. V. R. Murthy, K. Benaissa, K. Aflatooni, A. Nathan, R. I. Hornsey, S. G. Chamberlain

J. Vac. Sci. Technol. A 16, 902–905 (1998)

https://doi.org/10.1116/1.581033

Published: March 1998

View article titled, Effect of deposition temperature on the structural properties of n + μc-Si:H films

Journal Articles

Chemistry of actinide and lanthanide metal ions ( M + ) in laser ablation of dispersions of inorganic compounds in polyimide and polytetrafluoroethylene

John K. Gibson

J. Vac. Sci. Technol. A 15, 2107–2118 (1997)

https://doi.org/10.1116/1.580616

Published: July 1997

View article titled, Chemistry of actinide and lanthanide metal ions ( M + ) in laser ablation of dispersions of inorganic compounds in polyimide and polytetrafluoroethylene

Journal Articles

Orientation-dependence of elastic strain energy in hexagonal and cubic boron nitride layers in energetically deposited BN films

G. F. Cardinale, D. L. Medlin, P. B. Mirkarimi, K. F. McCarty, D. G. Howitt

J. Vac. Sci. Technol. A 15, 196–200 (1997)

https://doi.org/10.1116/1.580465

Published: January 1997

View article titled, Orientation-dependence of elastic strain energy in hexagonal and cubic boron nitride layers in energetically deposited BN films

Journal Articles

Thermodynamic analysis of AsH₃ and PH₃ decomposition including subhydrides

A. S. Jordan, A. Robertson

J. Vac. Sci. Technol. A 12, 204–215 (1994)

https://doi.org/10.1116/1.578884

Published: January 1994

View article titled, Thermodynamic analysis of AsH3 and PH3 decomposition including subhydrides

Journal Articles

Study of volume and surface processes in low pressure radio frequency plasma reactors by pulsed excitation methods. I. Hydrogen–argon plasma

André Bouchoule, Pierre Ranson

J. Vac. Sci. Technol. A 9, 317–326 (1991)

https://doi.org/10.1116/1.577508

Published: March 1991

View article titled, Study of volume and surface processes in low pressure radio frequency plasma reactors by pulsed excitation methods. I. Hydrogen–argon plasma

NARROW

Topics

General method for predicting ZnO–metal interface termination: Extension of the method for Al₂O₃–metal systems

Correlating surface stoichiometry and termination in SrTiO₃ films grown by hybrid molecular beam epitaxy

Localized phase transition of TiO₂ thin films induced by sub-bandgap laser irradiation

Two-step model for reduction reaction of ultrathin nickel oxide by hydrogen

Thermodynamic stability of hexagonal and rhombohedral boron nitride under chemical vapor deposition conditions from van der Waals corrected first principles calculations

Double-sided reel-to-reel metal-organic chemical vapor deposition system of YBa₂Cu₃O_7-_δ thin films

Novel method for the prediction of an interface bonding species at alumina/metal interfaces

Relative lability of gold-oxide thin films in contact with air, solvents, or electrolyte solutions

X-ray photoelectron spectroscopic study on interface bonding between Pt and Zn- and O-terminated ZnO

Highly conformal film growth by chemical vapor deposition. II. Conformality enhancement through growth inhibition

Characterization of microwave plasmas for deposition of polyparylene

Computational analysis of solid-vapor equilibria for ZnS and SrS phosphor synthesis conditions

Uniformity study in large-area showerhead reactors

Quantitative comparison between Auger electron spectroscopy and secondary ion mass spectroscopy depth profiles of a double layer structure of AlAs in GaAs using the mixing-roughness-information depth model

X-ray photoelectron spectroscopy study of bombardment-induced compositional changes in ZrO 2 , SiO 2 , and ZrSiO 4

Effect of deposition temperature on the structural properties of n + μc-Si:H films

Chemistry of actinide and lanthanide metal ions ( M + ) in laser ablation of dispersions of inorganic compounds in polyimide and polytetrafluoroethylene

Orientation-dependence of elastic strain energy in hexagonal and cubic boron nitride layers in energetically deposited BN films

Thermodynamic analysis of AsH₃ and PH₃ decomposition including subhydrides

Study of volume and surface processes in low pressure radio frequency plasma reactors by pulsed excitation methods. I. Hydrogen–argon plasma

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