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Journal Articles
J. Vac. Sci. Technol. A 42, 052801 (2024)
Published: July 2024
Journal Articles
J. Vac. Sci. Technol. A 40, 063204 (2022)
Published: October 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 020802 (2022)
Published: January 2022
Journal Articles
Martina Müller, Patrick Lömker, Paul Rosenberger, Mai Hussein Hamed, David N. Mueller, Ronja A. Heinen, Thomas Szyjka, Lutz Baumgarten
J. Vac. Sci. Technol. A 40, 013215 (2022)
Published: December 2021
Journal Articles
Dirk Hauschild, Ralph Steininger, Dimitrios Hariskos, Wolfram Witte, Sven Tougaard, Clemens Heske, Lothar Weinhardt
J. Vac. Sci. Technol. A 39, 063216 (2021)
Published: October 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 060802 (2021)
Published: October 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 063202 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. A 37, 031303 (2019)
Published: April 2019
Journal Articles
Jesús Redondo, Mykola Telychko, Pavel Procházka, Martin Konečný, Jan Berger, Martin Vondráček, Jan Čechal, Pavel Jelínek, Martin Švec
J. Vac. Sci. Technol. A 36, 031401 (2018)
Published: April 2018
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 36, 031603 (2018)
Published: March 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 031601 (2018)
Published: March 2018
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 36, 020603 (2018)
Published: February 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 01A124 (2018)
Published: December 2017
Includes: Supplementary data
Journal Articles
Kamalan Kirubaharan Amirtharaj Moses, Kuppusami Parasuraman, Sujay Chakravarty, Arul Maximus Rabel, Anandh Jesuraj Selvaraj, Akash Singh
J. Vac. Sci. Technol. A 36, 021504 (2018)
Published: December 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 061517 (2017)
Published: November 2017
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 36, 01A107 (2018)
Published: November 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 05C313 (2017)
Published: July 2017
Includes: Supplementary data
Journal Articles
Akito Takashima, Eiji Ikenaga, Takayuki Muro, Akio Kawabata, Tomo Murakami, Mizuhisa Nihei, Naoki Yokoyama
J. Vac. Sci. Technol. A 35, 021507 (2017)
Published: January 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 020602 (2017)
Published: November 2016
Includes: Supplementary data
Journal Articles
Seung-Joon Lee, Soo-Hyun Kim, Masayuki Saito, Kazuharu Suzuki, Shunichi Nabeya, Jeongyeop Lee, Sangdeok Kim, Seungjin Yeom, Do-Joong Lee
J. Vac. Sci. Technol. A 34, 031509 (2016)
Published: April 2016
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