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Journal Articles

Influence of helium bubbles on the bulk equation of state of gold under static compression

Jason R. Jeffries, Philip C. Myint, Jesse S. Smith, Mark A. Wall, Bruce Baer, Christine J. Wu, Scott Tumey
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033205 (2025)
https://doi.org/10.1116/6.0004471
Published: March 2025
View articletitled, Influence of helium bubbles on the bulk equation of state of gold under static compression
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Journal Articles

Effect of organic solvent treatments on oCVD-deposited PEDOT thin films

Travis G. Novak, R. Blake Nuwayhid, Battogtokh Jugdersuren, Xiao Liu, Paul A. DeSario, Debra R. Rolison
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022801 (2025)
https://doi.org/10.1116/6.0004304
Published: February 2025
View articletitled, Effect of organic solvent treatments on oCVD-deposited PEDOT thin films
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Journal Articles

3D numerical modeling and simulation of β-Ga2O3 crystal growth by edge-defined film-fed growth method

Junlan Wang, Zaoyang Li, Chao Qi, Lijun Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 013202 (2025)
https://doi.org/10.1116/6.0004170
Published: January 2025
View articletitled, 3D numerical modeling and simulation of β-Ga2O3 crystal growth by edge-defined film-fed growth method
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Journal Articles

Cyclone-type vaporizer for mass delivery of atomic layer deposition precursors: Simulation and experimental studies

Seung-Ho Seo, Donggeon Shin, Cha-Hee Kim, Keun-Tae Jeong, Yeongjong Lee, Daehyun Kim, Hyun Koock Shin, Won-Jun Lee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 012403 (2025)
https://doi.org/10.1116/6.0004013
Published: December 2024
View articletitled, Cyclone-type vaporizer for mass delivery of atomic layer deposition precursors: Simulation and experimental studies
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Journal Articles

In situ calorimetric temperature measurements of Cu, Cr, Ti targets during DC magnetron sputtering

Leonid R. Shaginyan, Mikhail I. Mironov, Anatoly I. Kuzmichev
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 013201 (2025)
https://doi.org/10.1116/6.0003994
Published: December 2024
View articletitled, In situ calorimetric temperature measurements of Cu, Cr, Ti targets during DC magnetron sputtering
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Journal Articles

Dynamic global model of Cl2/Ar plasmas: Applicability to atomic layer etching processes

Editor’s Pick
T. Rasoanarivo, C. Mannequin, F. Roqueta, M. Boufnichel, A. Rhallabi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063003 (2024)
https://doi.org/10.1116/6.0003932
Published: November 2024
View articletitled, Dynamic global model of Cl2/Ar plasmas: Applicability to atomic layer etching processes
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Journal Articles

First principles reaction processes of Co(CO)3NO as an atomic layer deposition precursor on SiO2 and Co surfaces

Editor’s Pick
Nickolas M. Ashburn, Xiuyao Lang, Youhwan Jo, Yeonghun Lee, Xiaolong Yao, Kyeongjae Cho
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 052401 (2024)
https://doi.org/10.1116/6.0003769
Published: July 2024
View articletitled, First principles reaction processes of Co(CO)3NO as an atomic layer deposition precursor on SiO2 and Co surfaces
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Journal Articles

Dry and wet etching of single-crystal AlN

Editor’s Pick
Hsiao-Hsuan Wan, Chao-Ching Chiang, Jian-Sian Li, Nahid Sultan Al-Mamun, Aman Haque, Fan Ren, Stephen J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 052601 (2024)
https://doi.org/10.1116/6.0003744
Published: July 2024
View articletitled, Dry and wet etching of single-crystal AlN
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Journal Articles

Microstructural evolution and strengthening behavior induced by N addition in TiVCrAl medium entropy alloy films

Z. Y. Zhang, L. Wang, Y. J. Ma, Y. W. Zhang, X. C. Shen, X. Hua, G. J. Li, Z. H. Cao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043410 (2024)
https://doi.org/10.1116/6.0003625
Published: June 2024
View articletitled, Microstructural evolution and strengthening behavior induced by N addition in TiVCrAl medium entropy alloy films
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Journal Articles

Effects of different element coatings on the interface characteristics and thermal conductivity of vacuum-sintered diamond/Cu composites

Q. W. Zhou, L. Bolzoni, F. Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043201 (2024)
https://doi.org/10.1116/6.0003600
Published: May 2024
View articletitled, Effects of different element coatings on the interface characteristics and thermal conductivity of vacuum-sintered diamond/Cu composites
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Journal Articles

Thickness dependent thermal conductivity of strontium titanate thin films on silicon substrate

Editor’s Pick
Roshan Sameer Annam, Swapneel Danayat, Avinash Nayal, Fatema Tarannum, Matthew Chrysler, Joseph Ngai, Jiechao Jiang, Aaron J. Schmidt, Jivtesh Garg
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 022707 (2024)
https://doi.org/10.1116/6.0003320
Published: February 2024
View articletitled, Thickness dependent thermal conductivity of strontium titanate thin films on silicon substrate
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Journal Articles

Processing and characterization of chalcopyrite semiconductors for photovoltaic applications

Angus Rockett
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 022802 (2024)
https://doi.org/10.1116/6.0003227
Published: January 2024
View articletitled, Processing and characterization of chalcopyrite semiconductors for photovoltaic applications
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Journal Articles

Hydrogen absorption in an epitaxial thin film of high-entropy perovskite oxide

Editor’s Pick
Takahiro Ozawa, Kaidong Wang, Kazunori Nishio, Ryota Shimizu, Taro Hitosugi, Katsuyuki Fukutani
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023402 (2024)
https://doi.org/10.1116/6.0003256
Published: January 2024
View articletitled, Hydrogen absorption in an epitaxial thin film of high-entropy perovskite oxide
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Journal Articles

Thermal transport of defective β-Ga2O3 and B(In)GaO3 alloys from atomistic simulations

Xiaoning Zhang, Haoyu Dong, Chao Yang, Xi Liang, Xing Li, Jia-Yue Yang, Linhua Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023101 (2024)
https://doi.org/10.1116/6.0003214
Published: January 2024
View articletitled, Thermal transport of defective β-Ga2O3 and B(In)GaO3 alloys from atomistic simulations
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Includes: Supplementary data
Journal Articles

Impact of the DC intensity and electrode distance on pulsed-DC powder-pack boride layer growth kinetics

I. Campos-Silva, L. E. Castillo-Vela, I. Mejía-Caballero, J. L. Rosales-Lopez, M. Olivares-Luna, K. D. Chaparro-Pérez, F. P. Espino-Cortes, J. M. González-Carmona
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063115 (2023)
https://doi.org/10.1116/6.0003167
Published: November 2023
View articletitled, Impact of the DC intensity and electrode distance on pulsed-DC powder-pack boride layer growth kinetics
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Journal Articles

Effect of nitrogen pressure on the fabrication of AlCrFeCoNiCu0.5 high entropy nitride thin films via cathodic arc deposition

Tenghao Jiang, Hong Zhao, Kostadinos Tsoutas, Lixian Sun, Hongwei Liu, Yanping Liu, Fanjun Xu, Zhong Zheng, Marcela M. Bilek, Zongwen Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063410 (2023)
https://doi.org/10.1116/6.0003064
Published: October 2023
View articletitled, Effect of nitrogen pressure on the fabrication of AlCrFeCoNiCu0.5 high entropy nitride thin films via cathodic arc deposition
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Includes: Supplementary data
Journal Articles

Adsorption mechanism of dimeric Ga precursors in metalorganic chemical vapor deposition of gallium nitride

Hankyu Kim, Miso Kim, Bumsang Kim, Bonggeun Shong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063409 (2023)
https://doi.org/10.1116/6.0002966
Published: October 2023
View articletitled, Adsorption mechanism of dimeric Ga precursors in metalorganic chemical vapor deposition of gallium nitride
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Includes: Supplementary data
Journal Articles

High-mass metal ion irradiation enables growth of high-entropy sublattice nitride thin films from elemental targets

Editor’s Pick
Vladyslav Rogoz, Oleksandr Pshyk, Bartosz Wicher, Justinas Palisaitis, Jun Lu, Daniel Primetzhofer, Ivan Petrov, Lars Hultman, Grzegorz Greczynski
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063108 (2023)
https://doi.org/10.1116/6.0003065
Published: October 2023
View articletitled, High-mass metal ion irradiation enables growth of high-entropy sublattice nitride thin films from elemental targets
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Journal Articles

Solid-source metal-organic MBE for elemental Ir and Ru films

Sreejith Nair, Kyle Noordhoek, Dooyong Lee, Christopher J. Bartel, Bharat Jalan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062701 (2023)
https://doi.org/10.1116/6.0002955
Published: September 2023
View articletitled, Solid-source metal-organic MBE for elemental Ir and Ru films
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Includes: Supplementary data
Journal Articles

Self-joule heating assisted field emission following the Child–Langmuir law

Yoichiro Neo, Rikuto Oda, Jonghyun Moon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063104 (2023)
https://doi.org/10.1116/5.0159964
Published: September 2023
View articletitled, Self-joule heating assisted field emission following the Child–Langmuir law
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