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Journal Articles

Impact of the DC intensity and electrode distance on pulsed-DC powder-pack boride layer growth kinetics

I. Campos-Silva, L. E. Castillo-Vela, I. Mejía-Caballero, J. L. Rosales-Lopez, M. Olivares-Luna, K. D. Chaparro-Pérez, F. P. Espino-Cortes, J. M. González-Carmona
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063115 (2023)
https://doi.org/10.1116/6.0003167
Published: November 2023
View article titled, Impact of the DC intensity and electrode distance on pulsed-DC powder-pack boride layer growth kinetics
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Journal Articles

Self-joule heating assisted field emission following the Child–Langmuir law

Yoichiro Neo, Rikuto Oda, Jonghyun Moon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063104 (2023)
https://doi.org/10.1116/5.0159964
Published: September 2023
View article titled, Self-joule heating assisted field emission following the Child–Langmuir law
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Journal Articles

Comparative study of the microspot splitting characteristics of direct-current and pulsed cathodic vacuum arc

Ke Zhang, Wenchang Lang, Hao Du, Zhijie Chen, Xinlei Wei, Xianghong Wang, Bin Gao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053105 (2023)
https://doi.org/10.1116/6.0002786
Published: July 2023
View article titled, Comparative study of the microspot splitting characteristics of direct-current and pulsed cathodic vacuum arc
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Journal Articles

Theoretical analysis of thermal spikes during ion bombardment of amorphous silicon nitride surfaces

Erik S. Cheng, Peter L. G. Ventzek, Gyeong S. Hwang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043207 (2023)
https://doi.org/10.1116/6.0002656
Published: June 2023
View article titled, Theoretical analysis of thermal spikes during ion bombardment of amorphous silicon nitride surfaces
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Includes: Supplementary data
Journal Articles

Enhancement of discharge and mechanical properties of ta-C films by pulse-enhanced cathodic arc deposition

Benfu Wang, Xiubo Tian, Jian Hu, Chunzhi Gong, Xiangli Liu, Jin Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033003 (2023)
https://doi.org/10.1116/6.0002352
Published: March 2023
View article titled, Enhancement of discharge and mechanical properties of ta-C films by pulse-enhanced cathodic arc deposition
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Journal Articles

Pulsed laser induced atomic layer etching of silicon

Matthew Eliceiri, Yoonsoo Rho, Runxuan Li, Costas P. Grigoropoulos
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 022602 (2023)
https://doi.org/10.1116/6.0002399
Published: February 2023
View article titled, Pulsed laser induced atomic layer etching of silicon
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Includes: Supplementary data
Journal Articles

First principles study on the lattice thermal conductivity of α-phase Ga2O3

Gang Yang, Pedro Rojo Romeo, Aleksandra Apostoluk, Bertrand Vilquin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 052801 (2022)
https://doi.org/10.1116/6.0001870
Published: July 2022
View article titled, First principles study on the lattice thermal conductivity of α-phase Ga<sub>2</sub>O<sub>3</sub>
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Journal Articles

Relationship between local coordinates and thermal conductivity in amorphous carbon

Emi Minamitani, Takuma Shiga, Makoto Kashiwagi, Ippei Obayashi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033408 (2022)
https://doi.org/10.1116/6.0001744
Published: April 2022
View article titled, Relationship between local coordinates and thermal conductivity in amorphous carbon
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Journal Articles

Reaction mechanism studies on atomic layer deposition process of AlF3

Heta-Elisa Nieminen, Mikko Ritala
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 022401 (2022)
https://doi.org/10.1116/6.0001624
Published: January 2022
View article titled, Reaction mechanism studies on atomic layer deposition process of AlF<sub>3</sub>
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Journal Articles

Atomic layer deposition of lithium metaphosphate from H3PO4 and P4O10 facilitated via direct liquid injection: Experiment and theory

Ivan Kundrata, Antónia Mošková, Martin Moško, Matej Mičušík, Edmund Dobročka, Karol Fröhlich
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 062407 (2021)
https://doi.org/10.1116/6.0001255
Published: November 2021
View article titled, Atomic layer deposition of lithium metaphosphate from H<sub>3</sub>PO<sub>4</sub> and P<sub>4</sub>O<sub>10</sub> facilitated via direct liquid injection: Experiment and theory
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Includes: Supplementary data
Journal Articles

Two-step growth of β-Ga2O3 films on (100) diamond via low pressure chemical vapor deposition

Md Rezaul Karim, Zhaoying Chen, Zixuan Feng, Hsien-Lien Huang, Jared M. Johnson, Marko J. Tadjer, Jinwoo Hwang, Hongping Zhao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 023411 (2021)
https://doi.org/10.1116/6.0000854
Published: February 2021
View article titled, Two-step growth of β-Ga<sub>2</sub>O<sub>3</sub> films on (100) diamond via low pressure chemical vapor deposition
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Journal Articles

Magnetron sputtering

Stephen M. Rossnagel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 060805 (2020)
https://doi.org/10.1116/6.0000594
Published: November 2020
View article titled, Magnetron sputtering
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Journal Articles

Cyclic etching of copper thin films using HBr and Ar gases

Eun Taek Lim, Moon Hwan Cha, Sung Yong Park, Ji Su Lee, Chee Won Chung
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 040401 (2020)
https://doi.org/10.1116/6.0000218
Published: June 2020
View article titled, Cyclic etching of copper thin films using HBr and Ar gases
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Journal Articles

Low energy electron interactions with 1-decanethiol self-assembled monolayers on Au(111)

Jodi Grzeskowiak, Carl A. Ventrice, Jr.
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 051401 (2019)
https://doi.org/10.1116/1.5098946
Published: August 2019
View article titled, Low energy electron interactions with 1-decanethiol self-assembled monolayers on Au(111)
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Journal Articles

Dislocation structures, interfacing, and magnetism in the L 1 − M n G a on η ⊥− M n 3 N 2 bilayer

J. P. Corbett, J. Guerrero-Sanchez, J. C. Gallagher, A.-O. Mandru, A. L. Richard, D. C. Ingram, F. Yang, N. Takeuchi, A. R. Smith
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 031102 (2019)
https://doi.org/10.1116/1.5081960
Published: April 2019
View article titled, Dislocation structures, interfacing, and magnetism in the L 1 − M n G a on η <sub>⊥</sub>− M n 3 N 2 bilayer
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Journal Articles

Epitaxial growth and strain relaxation studies of BaTiO3 and BaTiO3/SrTiO3 superlattices grown by MBE on SrTiO3-buffered Si(001) substrate

Clement Merckling, Maxim Korytov, Umberto Celano, Min-Hsiang Mark Hsu, Sabine M. Neumayer, Stephen Jesse, Stefan de Gendt
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021510 (2019)
https://doi.org/10.1116/1.5082237
Published: January 2019
View article titled, Epitaxial growth and strain relaxation studies of BaTiO<sub>3</sub> and BaTiO<sub>3</sub>/SrTiO<sub>3</sub> superlattices grown by MBE on SrTiO<sub>3</sub>-buffered Si(001) substrate
Open the PDF for Epitaxial growth and strain relaxation studies of BaTiO<sub>3</sub> and BaTiO<sub>3</sub>/SrTiO<sub>3</sub> superlattices grown by MBE on SrTiO<sub>3</sub>-buffered Si(001) substrate in another window
Journal Articles

Estimating the thermochemical properties of trimethylaluminum for thin-film processing applications

Raymond A. Adomaitis
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 050602 (2018)
https://doi.org/10.1116/1.5045342
Published: August 2018
View article titled, Estimating the thermochemical properties of trimethylaluminum for thin-film processing applications
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Journal Articles

Role of defects in the etching of graphene by intercalated oxygen

Tianbai Li, Jory A. Yarmoff
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031404 (2018)
https://doi.org/10.1116/1.5025489
Published: May 2018
View article titled, Role of defects in the etching of graphene by intercalated oxygen
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Journal Articles

Simple device for the growth of micrometer-sized monocrystalline single-layer graphene on SiC(0001)

Jesús Redondo, Mykola Telychko, Pavel Procházka, Martin Konečný, Jan Berger, Martin Vondráček, Jan Čechal, Pavel Jelínek, Martin Švec
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031401 (2018)
https://doi.org/10.1116/1.5008977
Published: April 2018
View article titled, Simple device for the growth of micrometer-sized monocrystalline single-layer graphene on SiC(0001)
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Includes: Supplementary data
Journal Articles

Modeling physical vapor deposition of energetic materials

Koroush Shirvan, Eric C. Forrest
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 03E103 (2018)
https://doi.org/10.1116/1.5022805
Published: March 2018
View article titled, Modeling physical vapor deposition of energetic materials
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