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Journal Articles
A. Y. Polyakov, A. I. Kochkova, Amanda Langørgen, Lasse Vines, A. Vasilev, I. V. Shchemerov, A. A. Romanov, S. J. Pearton
J. Vac. Sci. Technol. A 41, 023401 (2023)
Published: January 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 043206 (2022)
Published: June 2022
Journal Articles
J. Vac. Sci. Technol. A 39, 060403 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 043407 (2021)
Published: May 2021
Journal Articles
J. Vac. Sci. Technol. A 36, 05G509 (2018)
Published: September 2018
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 36, 03E106 (2018)
Published: April 2018
Journal Articles
Jesús Redondo, Mykola Telychko, Pavel Procházka, Martin Konečný, Jan Berger, Martin Vondráček, Jan Čechal, Pavel Jelínek, Martin Švec
J. Vac. Sci. Technol. A 36, 031401 (2018)
Published: April 2018
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 36, 023201 (2018)
Published: January 2018
Journal Articles
J. Vac. Sci. Technol. A 35, 060604 (2017)
Published: September 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 061405 (2017)
Published: August 2017
Journal Articles
Hiraku Kodama, Shinya Ohno, Masatoshi Tanaka, Masato Tanaka, Koji K. Okudaira, Kazuhiko Mase, Takashi Kikuchi
J. Vac. Sci. Technol. A 34, 051601 (2016)
Published: August 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 031604 (2016)
Published: April 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 031505 (2016)
Published: March 2016
Journal Articles
Devender, Kelly Lofgreen, Shankar Devasenathipathy, Johanna Swan, Ravi Mahajan, Theodorian Borca-Tasciuc, Ganpati Ramanath
J. Vac. Sci. Technol. A 33, 060611 (2015)
Published: November 2015
Journal Articles
J. Vac. Sci. Technol. A 33, 021206 (2015)
Published: February 2015
Journal Articles
J. Vac. Sci. Technol. A 33, 01A142 (2015)
Published: December 2014
Includes: Supplementary data
Journal Articles
John Zvanya, William Holber, Christopher Cullen, Thomas Morris, Andrew Basnett, Robert Basnett, Jeffrey Hettinger, Robert R. Krchnavek
J. Vac. Sci. Technol. A 32, 050605 (2014)
Published: August 2014
Journal Articles
Effects of outgassing of loader chamber walls on hydriding of thin films for commercial applications
J. Vac. Sci. Technol. A 32, 041603 (2014)
Published: June 2014
Journal Articles
J. Vac. Sci. Technol. A 32, 040802 (2014)
Published: June 2014
Journal Articles
J. Vac. Sci. Technol. A 32, 020601 (2014)
Published: November 2013
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