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Journal Articles
Paramita Bhattacharyya, Brahim Ahammou, Clarissa White, Fahmida Azmi, Graham Carlow, Rafael Kleiman, Peter Mascher
J. Vac. Sci. Technol. A 43, 013101 (2025)
Published: December 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 033408 (2024)
Published: April 2024
Journal Articles
J. Vac. Sci. Technol. A 41, 063406 (2023)
Published: October 2023
Journal Articles
J. Vac. Sci. Technol. A 37, 020924 (2019)
Published: February 2019
Journal Articles
Perttu Sippola, Alexander Pyymaki Perros, Oili M. E. Ylivaara, Helena Ronkainen, Jaakko Julin, Xuwen Liu, Timo Sajavaara, Jarkko Etula, Harri Lipsanen, Riikka L. Puurunen
J. Vac. Sci. Technol. A 36, 051508 (2018)
Published: July 2018
Includes: Supplementary data
Journal Articles
Kamalan Kirubaharan Amirtharaj Moses, Kuppusami Parasuraman, Sujay Chakravarty, Arul Maximus Rabel, Anandh Jesuraj Selvaraj, Akash Singh
J. Vac. Sci. Technol. A 36, 021504 (2018)
Published: December 2017
Journal Articles
Joseph Rowley, Lei Pei, Robert C. Davis, Richard R. Vanfleet, Steven Liddiard, Mallorie Harker, Jonathan Abbott
J. Vac. Sci. Technol. A 34, 051511 (2016)
Published: August 2016
Journal Articles
J. Vac. Sci. Technol. A 33, 041506 (2015)
Published: May 2015
Journal Articles
J. Vac. Sci. Technol. A 33, 021504 (2015)
Published: December 2014
Journal Articles
J. Vac. Sci. Technol. A 32, 01A102 (2014)
Published: October 2013
Journal Articles
J. Vac. Sci. Technol. A 26, 29–35 (2008)
Published: December 2007
Journal Articles
J. Vac. Sci. Technol. A 22, 1785–1787 (2004)
Published: July 2004
Journal Articles
J. Vac. Sci. Technol. A 22, 361–365 (2004)
Published: February 2004
Journal Articles
J. Vac. Sci. Technol. A 22, 281–286 (2004)
Published: January 2004
Journal Articles
J. Vac. Sci. Technol. A 21, 695–700 (2003)
Published: April 2003
Journal Articles
J. Vac. Sci. Technol. A 20, 1149–1153 (2002)
Published: May 2002
Journal Articles
J. Vac. Sci. Technol. A 18, 2277–2287 (2000)
Published: September 2000
Journal Articles
J. Vac. Sci. Technol. A 18, 372–376 (2000)
Published: March 2000
Journal Articles
J. Vac. Sci. Technol. A 16, 736–742 (1998)
Published: March 1998
Journal Articles
J. Vac. Sci. Technol. A 15, 2478–2484 (1997)
Published: September 1997
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