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Journal Articles

Sequential infiltration of two-photon polymerized 3D photonic crystals for mid-IR spectroscopic applications

Anuj Singhal, Ralu Divan, Anandvinod Dalmiya, Liliana Stan, Arian Ghiacy, Patrick T. Lynch, Igor Paprotny
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 012404 (2024)
https://doi.org/10.1116/6.0003271
Published: January 2024
View article titled, Sequential infiltration of two-photon polymerized 3D photonic crystals for mid-IR spectroscopic applications
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Journal Articles

Low temperature preparation of YSZ-based thin-film limiting current type oxygen sensor

Yuping Jiang, Jingsong Zhang, Dawei Yan, Wei Tang, Jin Wang, Linhong Cao, Yajun Fu, Lin Shu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053413 (2023)
https://doi.org/10.1116/6.0002907
Published: August 2023
View article titled, Low temperature preparation of YSZ-based thin-film limiting current type oxygen sensor
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Journal Articles

Hydrogen molecule adsorption and sensing on lanthanide (La) doped/decorated carbon nanotube and graphene structures

Numan Yuksel, Ahmet Kose, Derya Düzenli, M. Ferdi Fellah
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023202 (2023)
https://doi.org/10.1116/6.0002229
Published: February 2023
View article titled, Hydrogen molecule adsorption and sensing on lanthanide (La) doped/decorated carbon nanotube and graphene structures
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Includes: Supplementary data
Journal Articles

Plasma enhanced atomic layer deposition and atomic layer etching of gallium oxide using trimethylgallium

Editor’s Pick
Kevin A. Hatch, Daniel C. Messina, Robert J. Nemanich
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 042603 (2022)
https://doi.org/10.1116/6.0001871
Published: June 2022
View article titled, Plasma enhanced atomic layer deposition and atomic layer etching of gallium oxide using trimethylgallium
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Journal Articles

Selective vapor sensors with thin-film MoS2-coated optical fibers

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Michael Motala, Lucas K. Beagle, Jason Lynch, David C. Moore, Peter R. Stevenson, Anna Benton, Ly D. Tran, Luke A. Baldwin, Drake Austin, Christopher Muratore, Deep Jariwala, Nicholas R. Glavin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 032202 (2022)
https://doi.org/10.1116/6.0001759
Published: April 2022
View article titled, Selective vapor sensors with thin-film MoS<sub>2</sub>-coated optical fibers
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Includes: Supplementary data
Journal Articles

Comparison of CO and CO2 rf plasma treatment of SnO2 nanoparticles for gas sensing materials

Kimberly A. M. Hiyoto, Erin P. Stuckert, Ellen R. Fisher
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063005 (2021)
https://doi.org/10.1116/6.0001326
Published: November 2021
View article titled, Comparison of CO and CO<sub>2</sub> rf plasma treatment of SnO<sub>2</sub> nanoparticles for gas sensing materials
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Includes: Supplementary data
Journal Articles

Surface plasmon resonance is possible in an optical fiber tapered to a point

Doryne Sunda-Meya, Hans D. Hallen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 043206 (2021)
https://doi.org/10.1116/6.0000965
Published: June 2021
View article titled, Surface plasmon resonance is possible in an optical fiber tapered to a point
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Journal Articles

{100}-textured piezoelectric Pb(Zr,Ti)O3 films: Influence of Pb content in the PbxTiO3 seed layer on the electrical properties of chemical solution deposited Pb(Zr,Ti)O3

Sushma Kotru, Vaishali Batra, Jian Zhong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 043405 (2021)
https://doi.org/10.1116/6.0000955
Published: May 2021
View article titled, {100}-textured piezoelectric Pb(Zr,Ti)O<sub>3</sub> films: Influence of Pb content in the Pb<sub>x</sub>TiO<sub>3</sub> seed layer on the electrical properties of chemical solution deposited Pb(Zr,Ti)O<sub>3</sub>
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Journal Articles

Atomic layer deposition and characterization of Zn-doped Ga2O3 films

Zsófia Baji, Ildikó Cora, Zsolt Endre Horváth, Emil Agócs, Zoltán Szabó
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 032411 (2021)
https://doi.org/10.1116/6.0000838
Published: March 2021
View article titled, Atomic layer deposition and characterization of Zn-doped Ga<sub>2</sub>O<sub>3</sub> films
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Journal Articles

Large-scale synthesis of atomically thin ultrawide bandgap β-Ga2O3 using a liquid gallium squeezing technique

Hyunik Park, Yongha Choi, Sujung Yang, Jinho Bae, Jihyun Kim
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 033409 (2021)
https://doi.org/10.1116/6.0000927
Published: March 2021
View article titled, Large-scale synthesis of atomically thin ultrawide bandgap β-Ga<sub>2</sub>O<sub>3</sub> using a liquid gallium squeezing technique
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Includes: Supplementary data
Journal Articles

Impact of Cr2O3 additives on the gas-sensitive properties of β-Ga2O3 thin films to oxygen, hydrogen, carbon monoxide, and toluene vapors

Aleksei V. Almaev, Evgeny V. Chernikov, Vadim V. Novikov, Bogdan O. Kushnarev, Nikita N. Yakovlev, Ekaterina V. Chuprakova, Vladimir L. Oleinik, Anastasiya D. Lozinskaya, Daniela S. Gogova
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 023405 (2021)
https://doi.org/10.1116/6.0000723
Published: January 2021
View article titled, Impact of Cr<sub>2</sub>O<sub>3</sub> additives on the gas-sensitive properties of β-Ga<sub>2</sub>O<sub>3</sub> thin films to oxygen, hydrogen, carbon monoxide, and toluene vapors
Open the PDF for Impact of Cr<sub>2</sub>O<sub>3</sub> additives on the gas-sensitive properties of β-Ga<sub>2</sub>O<sub>3</sub> thin films to oxygen, hydrogen, carbon monoxide, and toluene vapors in another window
Journal Articles

Utilizing plasma modified SnO2 paper gas sensors to better understand gas-surface interactions at low temperatures

Kimberly A. M. Hiyoto, Ellen R. Fisher
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 043202 (2020)
https://doi.org/10.1116/6.0000029
Published: May 2020
View article titled, Utilizing plasma modified SnO<sub>2</sub> paper gas sensors to better understand gas-surface interactions at low temperatures
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Includes: Supplementary data
Journal Articles

Comparison of permeation of atmospheric gases through Viton O-ring gaskets for different initial conditions

Makfir Sefa, Janez Setina
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 041603 (2017)
https://doi.org/10.1116/1.4984292
Published: May 2017
View article titled, Comparison of permeation of atmospheric gases through Viton O-ring gaskets for different initial conditions
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Journal Articles

New leak assembly based on fluidic nanochannels

Aiqing Zhu, Yongheng Zhao, Xudi Wang, Yu Wang, Wei Wei, Keqiang Qiu, Dong Dong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 050604 (2016)
https://doi.org/10.1116/1.4960646
Published: August 2016
View article titled, New leak assembly based on fluidic nanochannels
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Journal Articles

Temperature-stable quartz oscillator and its applications in pressure gauges, gas sensing, and gas concentration measurements

Atsushi Suzuki
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 031604 (2016)
https://doi.org/10.1116/1.4946757
Published: April 2016
View article titled, Temperature-stable quartz oscillator and its applications in pressure gauges, gas sensing, and gas concentration measurements
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Journal Articles

Novel method for in-situ and simultaneous nanofriction and nanowear characterization of materials

Esteban Broitman, Francisco J. Flores-Ruiz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 043201 (2015)
https://doi.org/10.1116/1.4921584
Published: May 2015
View article titled, Novel method for <em>in-situ</em> and simultaneous nanofriction and nanowear characterization of materials
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Journal Articles

Conductivity and touch-sensor application for atomic layer deposition ZnO and Al:ZnO on nylon nonwoven fiber mats

William J. Sweet, III, Christopher J. Oldham, Gregory N. Parsons
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 01A117 (2015)
https://doi.org/10.1116/1.4900718
Published: November 2014
View article titled, Conductivity and touch-sensor application for atomic layer deposition ZnO and Al:ZnO on nylon nonwoven fiber mats
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Journal Articles

Vacuum sealing using atomic layer deposition of Al2O3 at 250 °C

Seungdo An, Naveen K. Gupta, Yogesh B. Gianchandani
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 01A101 (2014)
https://doi.org/10.1116/1.4820240
Published: September 2013
View article titled, Vacuum sealing using atomic layer deposition of Al<sub>2</sub>O<sub>3</sub> at 250 °C
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Journal Articles

Quantification of the atomic hydrogen flux as a function of filament temperature and H2 flow rate

D. Ugur, A. J. Storm, R. Verberk, J. C. Brouwer, W. G. Sloof
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 031603 (2012)
https://doi.org/10.1116/1.3700231
Published: April 2012
View article titled, Quantification of the atomic hydrogen flux as a function of filament temperature and H<sub>2</sub> flow rate
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Journal Articles

Paper deacidification and UV protection using ZnO atomic layer deposition

C. A. Hanson, C. J. Oldham, G. N. Parsons
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 01A117 (2012)
https://doi.org/10.1116/1.3656251
Published: November 2011
View article titled, Paper deacidification and UV protection using ZnO atomic layer deposition
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