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Journal Articles
J. Vac. Sci. Technol. A 40, 041601 (2022)
Published: May 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 010401 (2022)
Published: November 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 24, 1166–1171 (2006)
Published: June 2006
Journal Articles
J. Vac. Sci. Technol. A 9, 232–237 (1991)
Published: March 1991
Journal Articles
J. Vac. Sci. Technol. A 6, 1885–1888 (1988)
Published: May 1988
Journal Articles
J. Vac. Sci. Technol. A 5, 2954–2956 (1987)
Published: September 1987