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Journal Articles

Development of high-vacuum planar magnetron sputtering using an advanced magnetic field geometry

Takahiro Ohno, Daisuke Yagyu, Shigeru Saito, Yasunori Ohno, Hirofumi Nakano, Masatoshi Itoh, Yoshio Uhara, Tsutomu Miura
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 063001 (2015)
https://doi.org/10.1116/1.4927442
Published: July 2015
View article titled, Development of high-vacuum planar magnetron sputtering using an advanced magnetic field geometry
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Journal Articles

Mass and energy selected ion beam for deposition and ion induced surface modifications

O. M. Küttel, P. Groening, R. G. Agostino, L. Schlapbach
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 13, 2848–2855 (1995)
https://doi.org/10.1116/1.579610
Published: November 1995
View article titled, Mass and energy selected ion beam for deposition and ion induced surface modifications
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Journal Articles

Reduction of photodesorption yield by oxygen discharge cleaning

N. Ota, M. Saitoh, K. Kanazawa, T. Momose, H. Ishimaru
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 12, 826–830 (1994)
https://doi.org/10.1116/1.578830
Published: May 1994
View article titled, Reduction of photodesorption yield by oxygen discharge cleaning
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Journal Articles

Proposal of a sputter‐ion pump structure

Yusuke Suetsugu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 12, 248–250 (1994)
https://doi.org/10.1116/1.578892
Published: January 1994
View article titled, Proposal of a sputter‐ion pump structure
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Journal Articles

Hydrogen pressure measurement using the intensity of the light emitted from a Penning discharge

N. Ogiwara, M. Maeno
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 7, 2804–2807 (1989)
https://doi.org/10.1116/1.576184
Published: July 1989
View article titled, Hydrogen pressure measurement using the intensity of the light emitted from a Penning discharge
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Journal Articles

New cathode material for sputter ion pumps: Aluminum mixed rare‐earth alloy

Ming Lu, Ping Wei Fang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 5, 2591–2593 (1987)
https://doi.org/10.1116/1.574391
Published: July 1987
View article titled, New cathode material for sputter ion pumps: Aluminum mixed rare‐earth alloy
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Journal Articles

Spot deposition by focusing in Penning discharge sputtering

T. Sugita, E. Nishikawa, S. Ebisawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 5, 1867–1869 (1987)
https://doi.org/10.1116/1.574474
Published: July 1987
View article titled, Spot deposition by focusing in Penning discharge sputtering
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