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Journal Articles

Effect of a DC gradient magnetic field on electron density in a weakly magnetized inductively coupled plasma

You He, Yi-Lang Jiang, Myoung-Jae Lee, Min-Seok Kim, Beom-Jun Seo, Ju-Ho Kim, Chin-Wook Chung
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063002 (2024)
https://doi.org/10.1116/6.0003851
Published: October 2024
View article titled, Effect of a DC gradient magnetic field on electron density in a weakly magnetized inductively coupled plasma
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Journal Articles

Numerical study of the effects of discharge parameters on capacitively coupled plasma in a magnetic field

Minghan Yan, Huanhuan Wu, Hao Wu, Yanli Peng, Shali Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053007 (2024)
https://doi.org/10.1116/6.0003692
Published: September 2024
View article titled, Numerical study of the effects of discharge parameters on capacitively coupled plasma in a magnetic field
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Journal Articles

Effects of magnetic field gradient on capacitively coupled plasma driven by tailored voltage waveforms

Huanhuan Wu, Minghan Yan, Hao Wu, Shali Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033003 (2024)
https://doi.org/10.1116/6.0003324
Published: March 2024
View article titled, Effects of magnetic field gradient on capacitively coupled plasma driven by tailored voltage waveforms
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Journal Articles

Low temperature epitaxial growth of Cantor-nitride thin films by magnetic field assisted magnetron sputtering

Editor’s Pick
Smita G. Rao, Pascal Manuel Illgner, Robert Boyd, Gyula Nagy, Philippe Djemia, Daniel Primetzhofer, Ivan Petrov, Arnaud le Febvrier, Per Eklund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053415 (2023)
https://doi.org/10.1116/6.0002947
Published: August 2023
View article titled, Low temperature epitaxial growth of Cantor-nitride thin films by magnetic field assisted magnetron sputtering
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Includes: Supplementary data
Journal Articles

Characterization of a broad beam Kaufman-type ion source operated with CHF3 and O2

Gregor Dornberg, Erik Rohkamm, Peter Birtel, Frank Scholze, Frank Frost
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053104 (2023)
https://doi.org/10.1116/6.0002766
Published: July 2023
View article titled, Characterization of a broad beam Kaufman-type ion source operated with CHF<sub>3</sub> and O<sub>2</sub>
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Includes: Supplementary data
Journal Articles

Effect of tilted closed-field magnetron design on the microstructure and mechanical properties of TiZrNbTaN coatings

Editor’s Pick
Sanath Kumar Honnali, Charlotte Poterie, Arnaud le Febvrier, Daniel Lundin, Grzegorz Greczynski, Per Eklund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043402 (2023)
https://doi.org/10.1116/6.0002752
Published: May 2023
View article titled, Effect of tilted closed-field magnetron design on the microstructure and mechanical properties of TiZrNbTaN coatings
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Includes: Supplementary data
Journal Articles

Nb-doped TiO2 coatings developed by high power impulse magnetron sputtering-chemical vapor deposition hybrid deposition process

Justyna Kulczyk-Malecka, David Donaghy, Brice Delfour-Peyrethon, Matthew Werner, Paul R. Chalker, James W. Bradley, Peter J. Kelly
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 033410 (2020)
https://doi.org/10.1116/6.0000118
Published: April 2020
View article titled, Nb-doped TiO<sub>2</sub> coatings developed by high power impulse magnetron sputtering-chemical vapor deposition hybrid deposition process
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Journal Articles

Sideways deposition rate and ionized flux fraction in dc and high power impulse magnetron sputtering

Hamidreza Hajihoseini, Martin Čada, Zdenek Hubička, Selen Ünaldi, Michael A. Raadu, Nils Brenning, Jon Tomas Gudmundsson, Daniel Lundin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 033009 (2020)
https://doi.org/10.1116/1.5145292
Published: April 2020
View article titled, Sideways deposition rate and ionized flux fraction in dc and high power impulse magnetron sputtering
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Journal Articles

Plasma polymerization of cyclopropylamine in a low-pressure cylindrical magnetron reactor: A PIC-MC study of the roles of ions and radicals

Stella Mathioudaki, Cédric R. Vandenabeele, Romain Tonneau, Andreas Pflug, Jonathan Tennyson, Stéphane Lucas
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 033003 (2020)
https://doi.org/10.1116/1.5142913
Published: April 2020
View article titled, Plasma polymerization of cyclopropylamine in a low-pressure cylindrical magnetron reactor: A PIC-MC study of the roles of ions and radicals
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Journal Articles

Pervasive artifacts revealed from magnetometry measurements of rare earth-transition metal thin films

Andrada-Oana Mandru, Oğuz Yıldırım, Miguel A. Marioni, Hartmut Rohrmann, Michael Heigl, Oana-Tereza Ciubotariu, Marcos Penedo, Xue Zhao, Manfred Albrecht, Hans J. Hug
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 023409 (2020)
https://doi.org/10.1116/1.5135504
Published: March 2020
View article titled, Pervasive artifacts revealed from magnetometry measurements of rare earth-transition metal thin films
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Journal Articles

Effect of the plasma confinement on properties of a-C:H:SiOx films grown by plasma enhanced chemical vapor deposition

Alexander S. Grenadyorov, Аndrey А. Solovyev, Konstantin V. Oskomov, Vladimir O. Oskirko
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 061512 (2019)
https://doi.org/10.1116/1.5118852
Published: November 2019
View article titled, Effect of the plasma confinement on properties of a-C:H:SiO<sub>x</sub> films grown by plasma enhanced chemical vapor deposition
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Journal Articles

Controlling the boron-to-titanium ratio in magnetron-sputter-deposited TiBx thin films

Ivan Petrov, Allen Hall, Antonio B. Mei, Nils Nedfors, Igor Zhirkov, Johanna Rosen, Amber Reed, Brandon Howe, Grzegorz Greczynski, Jens Birch, Lars Hultman, J. E. Greene
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 050601 (2017)
https://doi.org/10.1116/1.4982649
Published: April 2017
View article titled, Controlling the boron-to-titanium ratio in magnetron-sputter-deposited TiB<sub>x</sub> thin films
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Journal Articles

Melt ejection from copper target in air in the presence of magnetic field using nanosecond pulsed laser ablation

Khwairakpam Shantakumar Singh, Ashwini Kumar Sharma
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 031305 (2017)
https://doi.org/10.1116/1.4979663
Published: April 2017
View article titled, Melt ejection from copper target in air in the presence of magnetic field using nanosecond pulsed laser ablation
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Journal Articles

Achievements and problems in the first commissioning of superKEKB vacuum system

Yusuke Suetsugu, Kyo Shibata, Takuya Ishibashi, Hitoshi Fukuma, Makoto Tobiyama, John Flanagan, Emy Mulyani, Mitsuru Shirai, Shinji Terui, Ken-ichi Kanazawa, Hiromi Hisamatsu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 03E103 (2017)
https://doi.org/10.1116/1.4977764
Published: March 2017
View article titled, Achievements and problems in the first commissioning of superKEKB vacuum system
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Journal Articles

Characterization of a cylindrical ring-cusp ion source with electrically isolated magnet rings

Neil A. Arthur, John E. Foster
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 021310 (2017)
https://doi.org/10.1116/1.4976746
Published: February 2017
View article titled, Characterization of a cylindrical ring-cusp ion source with electrically isolated magnet rings
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Journal Articles

Microstructure and mechanical properties of (AlTi)xN1-x films by magnetic-field-enhanced high power impulse magnetron sputtering

Xiubo Tian, Yinghe Ma, Jian Hu, Mingkang Bi, Chunzhi Gong, Paul K. Chu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 021402 (2017)
https://doi.org/10.1116/1.4971202
Published: December 2016
View article titled, Microstructure and mechanical properties of (AlTi)<sub>x</sub>N<sub>1-x</sub> films by magnetic-field-enhanced high power impulse magnetron sputtering
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Journal Articles

Low-carbon steel ultra-high-vacuum Schottky emitter electron gun with double O-rings for axis adjustment

In-Yong Park, Boklae Cho
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 020604 (2017)
https://doi.org/10.1116/1.4971413
Published: December 2016
View article titled, Low-carbon steel ultra-high-vacuum Schottky emitter electron gun with double O-rings for axis adjustment
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Journal Articles

Improved inflection point method of emissive probe for accurate measurement of plasma potential

Jian-quan Li, Jun Xu, Yu-jing Bai, Wen-qi Lu, You-nian Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 061304 (2016)
https://doi.org/10.1116/1.4964834
Published: October 2016
View article titled, Improved inflection point method of emissive probe for accurate measurement of plasma potential
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Journal Articles

Characterization of alkali-metal vapor cells fabricated with an alkali-metal source tablet

Kazuhiro Ban, Yoshikazu Hirai, Kazuya Tsujimoto, Akira Terao, Natsuhiko Mizutani, Tetsuo Kobayashi, Osamu Tabata
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 061601 (2016)
https://doi.org/10.1116/1.4963108
Published: September 2016
View article titled, Characterization of alkali-metal vapor cells fabricated with an alkali-metal source tablet
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Journal Articles

Low-cost, high-performance nonevaporable getter pumps using nonevaporable getter pills

Hiraku Kodama, Shinya Ohno, Masatoshi Tanaka, Masato Tanaka, Koji K. Okudaira, Kazuhiko Mase, Takashi Kikuchi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 051601 (2016)
https://doi.org/10.1116/1.4961050
Published: August 2016
View article titled, Low-cost, high-performance nonevaporable getter pumps using nonevaporable getter pills
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