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Journal Articles

Fundamentals of thin film depth profiling by glow discharge optical emission spectroscopy

Alenka Vesel, Rok Zaplotnik, Gregor Primc, Miran Mozetic
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 040801 (2023)
https://doi.org/10.1116/6.0002695
Published: June 2023
View article titled, Fundamentals of thin film depth profiling by glow discharge optical emission spectroscopy
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Journal Articles

Operating modes and target erosion in high power impulse magnetron sputtering

M. Rudolph, N. Brenning, H. Hajihoseini, M. A. Raadu, J. Fischer, J. T. Gudmundsson, D. Lundin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043005 (2022)
https://doi.org/10.1116/6.0001919
Published: June 2022
View article titled, Operating modes and target erosion in high power impulse magnetron sputtering
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Journal Articles

Low-temperature synthesis of diamond films by photoemission-assisted plasma-enhanced chemical vapor deposition

Mayuri Kawata, Yoshihiro Ojiro, Shuichi Ogawa, Tomoaki Masuzawa, Ken Okano, Yuji Takakuwa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 02B110 (2014)
https://doi.org/10.1116/1.4849355
Published: December 2013
View article titled, Low-temperature synthesis of diamond films by photoemission-assisted plasma-enhanced chemical vapor deposition
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Journal Articles

Radiofrequency pulsed glow discharge-ToFMS depth profiling of a CdTe solar cell: A comparative study versus time of flight secondary ion mass spectrometry

Cristina Gonzalez-Gago, Jorge Pisonero, Nerea Bordel, Alfredo Sanz-Medel, Nicole J. Tibbetts, Vincent S. Smentkowski
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 06F106 (2013)
https://doi.org/10.1116/1.4824164
Published: October 2013
View article titled, Radiofrequency pulsed glow discharge-ToFMS depth profiling of a CdTe solar cell: A comparative study versus time of flight secondary ion mass spectrometry
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Journal Articles

High rate roll to roll atomic layer deposition, and its application to moisture barriers on polymer films

Eric Dickey, William A. Barrow
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 021502 (2012)
https://doi.org/10.1116/1.3678486
Published: January 2012
View article titled, High rate roll to roll atomic layer deposition, and its application to moisture barriers on polymer films
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Journal Articles

High-efficiency and highly stable a-Si:H solar cells deposited at high rate (8 Å/s) with disilane grading process

Guofu Hou, Qihua Fan, Xianbo Liao, Changyong Chen, Xianbi Xiang, Xunming Deng
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 29, 061201 (2011)
https://doi.org/10.1116/1.3630052
Published: September 2011
View article titled, High-efficiency and highly stable a-Si:H solar cells deposited at high rate (8 Å/s) with disilane grading process
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Journal Articles

Vacuum breakdown limit and quantum efficiency obtained for various technical metals using dc and pulsed voltage sources

F. Le Pimpec, C. Gough, M. Paraliev, R. Ganter, C. Hauri, S. Ivkovic
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 1191–1202 (2010)
https://doi.org/10.1116/1.3478300
Published: September 2010
View article titled, Vacuum breakdown limit and quantum efficiency obtained for various technical metals using dc and pulsed voltage sources
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Journal Articles

Modifying the composition of hydrogen-terminated silicon nanoparticles synthesized in a nonthermal rf plasma

Jason Holm, Jeffrey T. Roberts
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 161–169 (2010)
https://doi.org/10.1116/1.3276451
Published: January 2010
View article titled, Modifying the composition of hydrogen-terminated silicon nanoparticles synthesized in a nonthermal rf plasma
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Includes: Supplementary data
Journal Articles

Dry-etching properties of TiN for metal/high- k gate stack using B Cl 3 -based inductively coupled plasma

Dong-Pyo Kim, Xue Yang, Jong-Chang Woo, Doo-Seung Um, Chang-Il Kim
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 1320–1325 (2009)
https://doi.org/10.1116/1.3244567
Published: October 2009
View article titled, Dry-etching properties of TiN for metal/high- k gate stack using B Cl 3 -based inductively coupled plasma
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Journal Articles

Photon emission during fracture of carbon materials

K. Yasuda, K. Yamamoto, T. Shiota, Y. Matsuo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 187–192 (2009)
https://doi.org/10.1116/1.3065677
Published: February 2009
View article titled, Photon emission during fracture of carbon materials
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Journal Articles

Exotic shapes of gold nanoparticles synthesized using plasma in aqueous solution

Junko Hieda, Nagahiro Saito, Osamu Takai
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 854–856 (2008)
https://doi.org/10.1116/1.2919139
Published: July 2008
View article titled, Exotic shapes of gold nanoparticles synthesized using plasma in aqueous solution
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Journal Articles

Optimization of the microcrystalline silicon deposition efficiency

B. Strahm, A. A. Howling, L. Sansonnens, Ch. Hollenstein
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 1198–1202 (2007)
https://doi.org/10.1116/1.2433985
Published: July 2007
View article titled, Optimization of the microcrystalline silicon deposition efficiency
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Journal Articles

Photon stimulated desorption from copper and aluminum chambers

J. Gómez-Goñi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 1251–1255 (2007)
https://doi.org/10.1116/1.2712187
Published: July 2007
View article titled, Photon stimulated desorption from copper and aluminum chambers
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Journal Articles

Nitriding of a tool steel with an electron-beam-excited plasma

H. Shoyama, T. Hishida, T. Hara, Y. Dake, T. Mori, H. Nagai, M. Hori, T. Goto
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1999–2002 (2006)
https://doi.org/10.1116/1.2338563
Published: October 2006
View article titled, Nitriding of a tool steel with an electron-beam-excited plasma
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Journal Articles

Improvement of materials surface properties by rf glow discharge treatment

T. B. Huang, X. Chen, X. Q. Tian, L. Z. Cha
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1568–1571 (2006)
https://doi.org/10.1116/1.2197507
Published: June 2006
View article titled, Improvement of materials surface properties by rf glow discharge treatment
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Journal Articles

Incorporation of fluorine in hydrogenated silicon carbide films deposited by pulsed glow discharge

L. G. Jacobsohn, I. V. Afanasyev-Charkin, D. W. Cooke, R. K. Schulze, R. D. Averitt, M. Nastasi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 1223–1228 (2004)
https://doi.org/10.1116/1.1764820
Published: June 2004
View article titled, Incorporation of fluorine in hydrogenated silicon carbide films deposited by pulsed glow discharge
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Journal Articles

Outgassing properties of the spallation neutron source ring vacuum chambers coated with titanium nitride

P. He, H. C. Hseuh, M. Mapes, R. Todd, D. Weiss, D. Wilson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 705–710 (2004)
https://doi.org/10.1116/1.1722697
Published: May 2004
View article titled, Outgassing properties of the spallation neutron source ring vacuum chambers coated with titanium nitride
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Journal Articles

Edison’s vacuum technology patents

Robert K. Waits
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 21, 881–891 (2003)
https://doi.org/10.1116/1.1575230
Published: May 2003
View article titled, Edison’s vacuum technology patents
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Journal Articles

Effect of cooling conditions on plasma-carbonitrided iron surfaces

Leonardo C. Gontijo, Rogério Machado, Eduardo J. Miola, Luiz C. Castelleti, Pedro A. P. Nascente
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 21, 623–627 (2003)
https://doi.org/10.1116/1.1565149
Published: March 2003
View article titled, Effect of cooling conditions on plasma-carbonitrided iron surfaces
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Journal Articles

Helium permeation through a-C:H films deposited on polymeric substrates

L. Valentini, M. C. Bellachioma, L. Lozzi, S. Santucci, J. M. Kenny
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 1647–1652 (2002)
https://doi.org/10.1116/1.1497177
Published: September 2002
View article titled, Helium permeation through <em>a</em>-C:H films deposited on polymeric substrates
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