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Journal Articles
Haiyang Long, Xiaoshuo Li, Haijiang Shi, Zhen Dong, Fuhai Li, Xingchen Yan, Zhanshan Ma, Bochao Wang, Tao Wang, Yanfeng Wang, Xueyong Li
J. Vac. Sci. Technol. A 43, 013106 (2025)
Published: January 2025
Journal Articles
J. Vac. Sci. Technol. A 42, 043102 (2024)
Published: May 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 023419 (2024)
Published: February 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 013103 (2024)
Published: December 2023
Journal Articles
J. Vac. Sci. Technol. A 42, 013404 (2024)
Published: December 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 063107 (2023)
Published: October 2023
Journal Articles
Xin Li, Zixiang Zhou, Chenglei Wang, Haiqing Qin, Jijie Yang, Weijie Liu, Mulin Liang, Chong Liu, Hong Tan, Zhenjun Zhang
J. Vac. Sci. Technol. A 41, 063105 (2023)
Published: September 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 053108 (2023)
Published: August 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 033105 (2023)
Published: April 2023
Journal Articles
Rebeca F. B. de O. Correia, Aline G. Sampaio, Noala V. M. Milhan, Ariel Capote, Holger Gerdes, Kristina Lachmann, Vladimir J. Trava-Airoldi, Cristiane Yumi Koga-Ito, Ralf Bandorf
J. Vac. Sci. Technol. A 41, 033103 (2023)
Published: March 2023
Journal Articles
J. Vac. Sci. Technol. A 39, 060803 (2021)
Published: November 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 063404 (2021)
Published: September 2021
Journal Articles
Md. Istiaque Chowdhury, Mark Sowa, Kylie E. Van Meter, Tomas F. Babuska, Tomas Grejtak, Alexander C. Kozen, Brandon A. Krick, Nicholas C. Strandwitz
J. Vac. Sci. Technol. A 39, 053408 (2021)
Published: August 2021
Includes: Supplementary data
Journal Articles
Alexander C. Kozen, Mark J. Sowa, Ling Ju, Nicholas C. Strandwitz, Guosong Zeng, Tomas F. Babuska, Zakaria Hsain, Brandon A. Krick
J. Vac. Sci. Technol. A 37, 061505 (2019)
Published: October 2019
Includes: Supplementary data
Journal Articles
Mark J. Sowa, Ling Ju, Alexander C. Kozen, Nicholas C. Strandwitz, Guosong Zeng, Tomas F. Babuska, Zakaria Hsain, Brandon A. Krick
J. Vac. Sci. Technol. A 36, 06A103 (2018)
Published: October 2018
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 36, 051512 (2018)
Published: August 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 051504 (2018)
Published: July 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 031511 (2018)
Published: April 2018
Journal Articles
Lauri Kilpi, Oili M. E. Ylivaara, Antti Vaajoki, Xuwen Liu, Ville Rontu, Sakari Sintonen, Eero Haimi, Jari Malm, Markus Bosund, Marko Tuominen, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula, Riikka L. Puurunen, Helena Ronkainen
J. Vac. Sci. Technol. A 36, 01A122 (2018)
Published: December 2017
Journal Articles
Roberto Mirabal-Rojas, Stephen Muhl, Sandra E. Rodil, Enrique Camps, Michael Lejeune, Andreas Zeinert
J. Vac. Sci. Technol. A 34, 041518 (2016)
Published: July 2016
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