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Journal Articles

Wear and corrosion resistance of zinc-oxide and zirconium-oxide coated WE43 magnesium alloy

Canser Gül, Hülya Durmuş, Sevda Albayrak, Nilay Çömez
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063107 (2023)
https://doi.org/10.1116/6.0002894
Published: October 2023
View article titled, Wear and corrosion resistance of zinc-oxide and zirconium-oxide coated WE43 magnesium alloy
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Journal Articles

Tissue evolution and properties of plasma solid-state surface metallurgical TiCoCrNiWMo high-entropy alloy coatings

Xin Li, Zixiang Zhou, Chenglei Wang, Haiqing Qin, Jijie Yang, Weijie Liu, Mulin Liang, Chong Liu, Hong Tan, Zhenjun Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063105 (2023)
https://doi.org/10.1116/6.0002872
Published: September 2023
View article titled, Tissue evolution and properties of plasma solid-state surface metallurgical TiCoCrNiWMo high-entropy alloy coatings
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Journal Articles

Attempt of TiZrVCrAl coating on aerospace bearings—Lower friction coefficient in oil–liquid mixed media

Jiahe Wang, Qunfeng Zeng, Wanjun He, Zhao Wang, Zekun Ning, Chenjie Zheng, Zeming Pang, Xunkai Wei
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053108 (2023)
https://doi.org/10.1116/6.0002843
Published: August 2023
View article titled, Attempt of TiZrVCrAl coating on aerospace bearings—Lower friction coefficient in oil–liquid mixed media
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Journal Articles

Tribological behavior of WC/WCN/CNx coatings deposited by high power impulse magnetron sputtering

L. Flores-Cova, E. Broitman, O. Jimenez, M. Flores-Martínez
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033105 (2023)
https://doi.org/10.1116/6.0002421
Published: April 2023
View article titled, Tribological behavior of WC/WCN/CNx coatings deposited by high power impulse magnetron sputtering
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Journal Articles

Zn:DLC films via PECVD-HIPIMS: Evaluation of antimicrobial activity and cytotoxicity to mammalian cells

Rebeca F. B. de O. Correia, Aline G. Sampaio, Noala V. M. Milhan, Ariel Capote, Holger Gerdes, Kristina Lachmann, Vladimir J. Trava-Airoldi, Cristiane Yumi Koga-Ito, Ralf Bandorf
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033103 (2023)
https://doi.org/10.1116/6.0002354
Published: March 2023
View article titled, Zn:DLC films via PECVD-HIPIMS: Evaluation of antimicrobial activity and cytotoxicity to mammalian cells
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Journal Articles

Atomic scale friction properties of confined water layers

Tae Won Go, Dooho Lee, Woosuk Choi, Jeong Young Park
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 060803 (2021)
https://doi.org/10.1116/6.0001384
Published: November 2021
View article titled, Atomic scale friction properties of confined water layers
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Journal Articles

Improving the abrasive wear resistance of biomass briquetting machine components using cathodic arc physical vapor deposition coatings: A comparative study

Pooja Miryalkar, Sekhar Chavitlo, Nitin Tandekar, Krishna Valleti
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063404 (2021)
https://doi.org/10.1116/6.0001228
Published: September 2021
View article titled, Improving the abrasive wear resistance of biomass briquetting machine components using cathodic arc physical vapor deposition coatings: A comparative study
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Journal Articles

Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure

Md. Istiaque Chowdhury, Mark Sowa, Kylie E. Van Meter, Tomas F. Babuska, Tomas Grejtak, Alexander C. Kozen, Brandon A. Krick, Nicholas C. Strandwitz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 053408 (2021)
https://doi.org/10.1116/6.0001175
Published: August 2021
View article titled, Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
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Includes: Supplementary data
Journal Articles

Plasma-enhanced atomic layer deposition of vanadium nitride

Alexander C. Kozen, Mark J. Sowa, Ling Ju, Nicholas C. Strandwitz, Guosong Zeng, Tomas F. Babuska, Zakaria Hsain, Brandon A. Krick
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 061505 (2019)
https://doi.org/10.1116/1.5109671
Published: October 2019
View article titled, Plasma-enhanced atomic layer deposition of vanadium nitride
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Includes: Supplementary data
Journal Articles

Plasma-enhanced atomic layer deposition of titanium vanadium nitride

Mark J. Sowa, Ling Ju, Alexander C. Kozen, Nicholas C. Strandwitz, Guosong Zeng, Tomas F. Babuska, Zakaria Hsain, Brandon A. Krick
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 06A103 (2018)
https://doi.org/10.1116/1.5037463
Published: October 2018
View article titled, Plasma-enhanced atomic layer deposition of titanium vanadium nitride
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Includes: Supplementary data
Journal Articles

Growth and mechanical properties of 111-oriented V0.5Mo0.5Nx/Al2O3(0001) thin films

Hanna Kindlund, Jun Lu, Esteban Broitman, Ivan Petrov, J. E. Greene, Jens Birch, Lars Hultman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 051512 (2018)
https://doi.org/10.1116/1.5045048
Published: August 2018
View article titled, Growth and mechanical properties of 111-oriented V<sub>0.5</sub>Mo<sub>0.5</sub>N<sub>x</sub>/Al<sub>2</sub>O<sub>3</sub>(0001) thin films
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Journal Articles

Conformal MgO film grown at high rate at low temperature by forward-directed chemical vapor deposition

Tushar K. Talukdar, Sumeng Liu, Zhejun Zhang, Frank Harwath, Gregory S. Girolami, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 051504 (2018)
https://doi.org/10.1116/1.5040855
Published: July 2018
View article titled, Conformal MgO film grown at high rate at low temperature by forward-directed chemical vapor deposition
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Journal Articles

Microstructure, mechanical, and tribological properties of niobium vanadium carbon nitride films

Hongbo Ju, Dian Yu, Junhua Xu, Lihua Yu, Yaoxiang Geng, Ting Gao, Guo Yi, Shunuo Bian
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031511 (2018)
https://doi.org/10.1116/1.5020954
Published: April 2018
View article titled, Microstructure, mechanical, and tribological properties of niobium vanadium carbon nitride films
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Journal Articles

Tribological properties of thin films made by atomic layer deposition sliding against silicon

Lauri Kilpi, Oili M. E. Ylivaara, Antti Vaajoki, Xuwen Liu, Ville Rontu, Sakari Sintonen, Eero Haimi, Jari Malm, Markus Bosund, Marko Tuominen, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula, Riikka L. Puurunen, Helena Ronkainen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 01A122 (2018)
https://doi.org/10.1116/1.5003729
Published: December 2017
View article titled, Tribological properties of thin films made by atomic layer deposition sliding against silicon
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Journal Articles

Review Article: Case studies in future trends of computational and experimental nanomechanics

William Gerberich, Ellad B. Tadmor, Jeffrey Kysar, Jonathan A. Zimmerman, Andrew M. Minor, Izabela Szlufarska, Jonathan Amodeo, Benoit Devincre, Eric Hintsala, Roberto Ballarini
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 060801 (2017)
https://doi.org/10.1116/1.5003378
Published: September 2017
View article titled, Review Article: Case studies in future trends of computational and experimental nanomechanics
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Journal Articles

Effect of the addition of Si into Nb2O5 coatings on their structural, optical, and mechanical properties

Roberto Mirabal-Rojas, Stephen Muhl, Sandra E. Rodil, Enrique Camps, Michael Lejeune, Andreas Zeinert
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 041518 (2016)
https://doi.org/10.1116/1.4954985
Published: July 2016
View article titled, Effect of the addition of Si into Nb<sub>2</sub>O<sub>5</sub> coatings on their structural, optical, and mechanical properties
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Journal Articles

Synthesis and characterization of MoB2−x thin films grown by nonreactive DC magnetron sputtering

Paulius Malinovskis, Justinas Palisaitis, Per O. Å. Persson, Erik Lewin, Ulf Jansson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 031511 (2016)
https://doi.org/10.1116/1.4948234
Published: April 2016
View article titled, Synthesis and characterization of MoB<sub>2−x</sub> thin films grown by nonreactive DC magnetron sputtering
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Journal Articles

Effect of microstructural evolution on mechanical and tribological properties of Ti-doped DLC films: How was an ultralow friction obtained?

Fei Zhao, Hongxuan Li, Li Ji, Yongjun Wang, Xiaohong Liu, Huidi Zhou, Jianmin Chen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 031504 (2016)
https://doi.org/10.1116/1.4944053
Published: March 2016
View article titled, Effect of microstructural evolution on mechanical and tribological properties of Ti-doped DLC films: How was an ultralow friction obtained?
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Journal Articles

Microstructural, nanomechanical, and microtribological properties of Pb thin films prepared by pulsed laser deposition and thermal evaporation techniques

Esteban Broitman, Francisco J. Flores-Ruiz, Massimo Di Giulio, Francisco Gontad, Antonella Lorusso, Alessio Perrone
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 021505 (2016)
https://doi.org/10.1116/1.4936080
Published: December 2015
View article titled, Microstructural, nanomechanical, and microtribological properties of Pb thin films prepared by pulsed laser deposition and thermal evaporation techniques
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Journal Articles

Oxidation behavior and tribological properties of multilayered Ti-Al-N/Mo-Si-B thin films

Helmut Riedl, Christian Martin Koller, Andreas Limbeck, Jiri Kalaš, Peter Polcik, Paul Heinz Mayrhofer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 05E129 (2015)
https://doi.org/10.1116/1.4929536
Published: August 2015
View article titled, Oxidation behavior and tribological properties of multilayered Ti-Al-N/Mo-Si-B thin films
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