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Journal Articles

Thermal study of an indium trisguanidinate as a possible indium nitride precursor

Sydney C. Buttera, Karl Rönnby, Henrik Pedersen, Lars Ojamäe, Seán T. Barry
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 01A101 (2018)
https://doi.org/10.1116/1.5002634
Published: October 2017
View article titled, Thermal study of an indium trisguanidinate as a possible indium nitride precursor
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Includes: Supplementary data
Journal Articles

Phase formation and morphological stability of ultrathin Ni-Co-Pt silicide films formed on Si(100)

Peng Xu, Tomas Kubart, Xindong Gao, Dongping Wu, Shi-Li Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 031503 (2014)
https://doi.org/10.1116/1.4868121
Published: March 2014
View article titled, Phase formation and morphological stability of ultrathin Ni-Co-Pt silicide films formed on Si(100)
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Journal Articles

Atomic layer deposition of zinc oxide: Understanding the reactions of ozone with diethylzinc

Ellis J. Warner, Christopher J. Cramer, Wayne L. Gladfelter
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 041504 (2013)
https://doi.org/10.1116/1.4806800
Published: May 2013
View article titled, Atomic layer deposition of zinc oxide: Understanding the reactions of ozone with diethylzinc
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Includes: Supplementary data
Journal Articles

Extensive Raman spectroscopic investigation of ultrathin Co1−xNixSi2 films grown on Si(100)

Yinghua Piao, Zhiwei Zhu, Xindong Gao, Aliaksandra Karabko, Cheng Hu, Zhijun Qiu, Jun Luo, Zhi-Bin Zhang, Shi-Li Zhang, Dongping Wu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 041511 (2012)
https://doi.org/10.1116/1.4726295
Published: June 2012
View article titled, Extensive Raman spectroscopic investigation of ultrathin Co<sub>1−x</sub>Ni<sub>x</sub>Si<sub>2</sub> films grown on Si(100)
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Journal Articles

Deposition of novel nanocomposite films by a newly developed differential pumping co-sputtering system

Masateru Nose, Takeshi Kurimoto, Atsushi Saiki, Kenji Matsuda, Kiyoshi Terayama
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 011502 (2012)
https://doi.org/10.1116/1.3659704
Published: November 2011
View article titled, Deposition of novel nanocomposite films by a newly developed differential pumping co-sputtering system
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Journal Articles

Dry etching of CoFe films using a C H 4 ∕ Ar inductively coupled plasma for magnetic random access memory application

Doo-Seung Um, Dong-Pyo Kim, Jong-Chang Woo, Chang-Il Kim, Sung-Kwon Lee, Tae-Woo Jung, Seung-Chan Moon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 818–820 (2009)
https://doi.org/10.1116/1.3155401
Published: June 2009
View article titled, Dry etching of CoFe films using a C H 4 ∕ Ar inductively coupled plasma for magnetic random access memory application
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Journal Articles

Technique to measure contact angle of micro/nanodroplets using atomic force microscopy

Yong Chae Jung, Bharat Bhushan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 777–782 (2008)
https://doi.org/10.1116/1.2832409
Published: June 2008
View article titled, Technique to measure contact angle of micro/nanodroplets using atomic force microscopy
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Journal Articles

X-ray photoelectron spectroscopy studies of water-induced surface reorganization of amphiphilic poly(2-hydroxyethyl methacrylate- g -dimethylsiloxane) copolymers using cryogenic sample handling techniques

Lu Chen, Daniel J. Hook, Paul L. Valint, Jr., Joseph A. Gardella, Jr
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 616–623 (2008)
https://doi.org/10.1116/1.2943643
Published: June 2008
View article titled, X-ray photoelectron spectroscopy studies of water-induced surface reorganization of amphiphilic poly(2-hydroxyethyl methacrylate- g -dimethylsiloxane) copolymers using cryogenic sample handling techniques
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Journal Articles

Computational analysis of solid-vapor equilibria for ZnS and SrS phosphor synthesis conditions

Heribert Wiedemeier
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 450–458 (2006)
https://doi.org/10.1116/1.2190648
Published: April 2006
View article titled, Computational analysis of solid-vapor equilibria for ZnS and SrS phosphor synthesis conditions
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Journal Articles

Rapid thermal oxidation of Ge-rich Si 1 − x Ge x heterolayers

M. K. Bera, S. Chakraborty, R. Das, G. K. Dalapati, S. Chattopadhyay, S. K. Samanta, W. J. Yoo, A. K. Chakraborty, Y. Butenko, L. Šiller, M. R. C. Hunt, S. Saha, C. K. Maiti
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 84–90 (2006)
https://doi.org/10.1116/1.2137329
Published: December 2005
View article titled, Rapid thermal oxidation of Ge-rich Si 1 − x Ge x heterolayers
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Journal Articles

Epitaxial iron oxide growth on a stepped Pt(9 11 11) surface

Guido Ketteler, Wolfgang Ranke
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 1055–1060 (2005)
https://doi.org/10.1116/1.1889441
Published: June 2005
View article titled, Epitaxial iron oxide growth on a stepped Pt(9 11 11) surface
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Journal Articles

Investigation of etching properties of metal nitride/high- k gate stacks using inductively coupled plasma

Wan Sik Hwang, Jinghao Chen, Won Jong Yoo, Vladimir Bliznetsov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 964–970 (2005)
https://doi.org/10.1116/1.1927536
Published: June 2005
View article titled, Investigation of etching properties of metal nitride/high- k gate stacks using inductively coupled plasma
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Journal Articles

Magnetic response of nanostructured systems: A ferromagnetic resonance investigation

J. Lindner, U. Wiedwald, K. Baberschke, M. Farle
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 796–803 (2005)
https://doi.org/10.1116/1.4809520
Published: June 2005
View article titled, Magnetic response of nanostructured systems: A ferromagnetic resonance investigation
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Journal Articles

Anti-emission characteristics of the grid coated with hafnium film

Jun Jiang, Bingyao Jiang, Congxin Ren, Tao Feng, Xi Wang, Xianghuai Liu, Shichang Zou
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 506–511 (2005)
https://doi.org/10.1116/1.1894726
Published: April 2005
View article titled, Anti-emission characteristics of the grid coated with hafnium film
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Journal Articles

Effects of wetting ability of plating electrolyte on Cu seed layer for electroplated copper film

Chi-Wen Liu, Jung-Chih Tsao, Ming-Shih Tsai, Ying-Lang Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 2315–2320 (2004)
https://doi.org/10.1116/1.1795831
Published: October 2004
View article titled, Effects of wetting ability of plating electrolyte on Cu seed layer for electroplated copper film
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Journal Articles

Phase behavior in the CdTe–CdS pseudobinary system

Brian E. McCandless, Gregory M. Hanket, D. Garth Jensen, Robert W. Birkmire
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 1462–1467 (2002)
https://doi.org/10.1116/1.1487872
Published: June 2002
View article titled, Phase behavior in the CdTe–CdS pseudobinary system
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Journal Articles

Determination of atomic potential energy for Pd adatom diffusion across W (111) islands and surfaces

Tsu-Yi Fu, Lung-Chieh Cheng, Tien T. Tsong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 897–899 (2002)
https://doi.org/10.1116/1.1472429
Published: May 2002
View article titled, Determination of atomic potential energy for Pd adatom diffusion across W (111) islands and surfaces
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Journal Articles

Phase development in annealed zirconia-titania nanolaminates

J. D. DeLoach, J. J. Shibilski, C. R. Crape, C. R. Aita
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 2922–2927 (2000)
https://doi.org/10.1116/1.1319681
Published: November 2000
View article titled, Phase development in annealed zirconia-titania nanolaminates
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Journal Articles

Scanning force microscopic studies of surface structure and protein adsorption behavior of organosilane monolayers

Atsushi Takahara, Ken Kojio, Shou‐Ren Ge, Tisato Kajiyama
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 14, 1747–1754 (1996)
https://doi.org/10.1116/1.580331
Published: May 1996
View article titled, Scanning force microscopic studies of surface structure and protein adsorption behavior of organosilane monolayers
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Journal Articles

Effect of surface microphase‐separated structure on interaction between biological components and multiphase polymer surface

Atsushi Takahara, Kinzo Korehisa, Shou‐Ren Ge, Tisato Kajiyama
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 12, 2956–2961 (1994)
https://doi.org/10.1116/1.578921
Published: September 1994
View article titled, Effect of surface microphase‐separated structure on interaction between biological components and multiphase polymer surface
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