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Journal Articles

Effect of nitrogen pressure on the fabrication of AlCrFeCoNiCu0.5 high entropy nitride thin films via cathodic arc deposition

Tenghao Jiang, Hong Zhao, Kostadinos Tsoutas, Lixian Sun, Hongwei Liu, Yanping Liu, Fanjun Xu, Zhong Zheng, Marcela M. Bilek, Zongwen Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063410 (2023)
https://doi.org/10.1116/6.0003064
Published: October 2023
View article titled, Effect of nitrogen pressure on the fabrication of AlCrFeCoNiCu<sub>0.5</sub> high entropy nitride thin films via cathodic arc deposition
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Includes: Supplementary data
Journal Articles

High-mass metal ion irradiation enables growth of high-entropy sublattice nitride thin films from elemental targets

Vladyslav Rogoz, Oleksandr Pshyk, Bartosz Wicher, Justinas Palisaitis, Jun Lu, Daniel Primetzhofer, Ivan Petrov, Lars Hultman, Grzegorz Greczynski
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063108 (2023)
https://doi.org/10.1116/6.0003065
Published: October 2023
View article titled, High-mass metal ion irradiation enables growth of high-entropy sublattice nitride thin films from elemental targets
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Journal Articles

(AlCrNiTiZr)Nx high-entropy nitride coatings with enhanced hardness via tailoring N2 flow rates for anti-wear applications

Jia Zheng, Cunxiu Zhang, Jingchuan Li, Junyi Chen, Yifan Dong, Sam Zhang, Jian Zhang, Deen Sun
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053404 (2023)
https://doi.org/10.1116/6.0002837
Published: July 2023
View article titled, (AlCrNiTiZr)N<sub>x</sub> high-entropy nitride coatings with enhanced hardness via tailoring N<sub>2</sub> flow rates for anti-wear applications
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Journal Articles

Searching for superconductivity in high entropy oxide Ruddlesden–Popper cuprate films

Alessandro R. Mazza, Xingyao Gao, Daniel J. Rossi, Brianna L. Musico, Tyler W. Valentine, Zachary Kennedy, Jie Zhang, Jason Lapano, Veerle Keppens, Robert G. Moore, Matthew Brahlek, Christina M. Rost, Thomas Z. Ward
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 013404 (2022)
https://doi.org/10.1116/6.0001441
Published: November 2021
View article titled, Searching for superconductivity in high entropy oxide Ruddlesden–Popper cuprate films
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Includes: Supplementary data
Journal Articles

Estimating the thermochemical properties of trimethylaluminum for thin-film processing applications

Raymond A. Adomaitis
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 050602 (2018)
https://doi.org/10.1116/1.5045342
Published: August 2018
View article titled, Estimating the thermochemical properties of trimethylaluminum for thin-film processing applications
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Journal Articles

Fabrication of nanopower generators using thin atomic layer deposited films

Robert Parker Given, Kyle S. Wenger, Virginia D. Wheeler, Brian C. Utter, Giovanna Scarel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 01B120 (2017)
https://doi.org/10.1116/1.4971403
Published: December 2016
View article titled, Fabrication of nanopower generators using thin atomic layer deposited films
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Journal Articles

Investigating routes toward atomic layer deposition of silicon carbide: Ab initio screening of potential silicon and carbon precursors

Ekaterina A. Filatova, Dennis Hausmann, Simon D. Elliott
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 01B103 (2017)
https://doi.org/10.1116/1.4964890
Published: October 2016
View article titled, Investigating routes toward atomic layer deposition of silicon carbide: <em>Ab initio</em> screening of potential silicon and carbon precursors
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Includes: Supplementary data
Journal Articles

Magnetocaloric effect in nanoscale thin films and heterostructures

Casey W. Miller, Dustin D. Belyea, Brian J. Kirby
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 040802 (2014)
https://doi.org/10.1116/1.4882858
Published: June 2014
View article titled, Magnetocaloric effect in nanoscale thin films and heterostructures
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Journal Articles

Phase formation and morphological stability of ultrathin Ni-Co-Pt silicide films formed on Si(100)

Peng Xu, Tomas Kubart, Xindong Gao, Dongping Wu, Shi-Li Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 031503 (2014)
https://doi.org/10.1116/1.4868121
Published: March 2014
View article titled, Phase formation and morphological stability of ultrathin Ni-Co-Pt silicide films formed on Si(100)
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Journal Articles

Mechanisms for hyperthermal polyatomic hydrocarbon modification of PMMA surfaces from molecular dynamics simulations

Kamal Choudhary, Leah B. Hill, Travis W. Kemper, Susan B. Sinnott
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 061403 (2013)
https://doi.org/10.1116/1.4823477
Published: October 2013
View article titled, Mechanisms for hyperthermal polyatomic hydrocarbon modification of PMMA surfaces from molecular dynamics simulations
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Journal Articles

Effects of preparation conditions on the magnetocaloric properties of Gd thin films

Hillary F. Kirby, Dustin D. Belyea, Jonathon T. Willman, Casey W. Miller
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 031506 (2013)
https://doi.org/10.1116/1.4795817
Published: April 2013
View article titled, Effects of preparation conditions on the magnetocaloric properties of Gd thin films
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Journal Articles

Phase formation and film morphology of ultrathin Co1−xNixSi2 films

Zhiwei Zhu, Xindong Gao, Yinghua Piao, Cheng Hu, Zhijun Qiu, Zhi-Bin Zhang, Dongping Wu, Shi-Li Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 050602 (2012)
https://doi.org/10.1116/1.4732736
Published: July 2012
View article titled, Phase formation and film morphology of ultrathin Co<sub>1−</sub><sub><em>x</em></sub>Ni<sub><em>x</em></sub>Si<sub>2</sub> films
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Journal Articles

Thin layer composition profiling with angular resolved x-ray photoemission spectroscopy: Factors affecting quantitative results

T. Conard, W. Vandervorst, A. Bergmaier, K. Kimura
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 031509 (2012)
https://doi.org/10.1116/1.4704603
Published: April 2012
View article titled, Thin layer composition profiling with angular resolved x-ray photoemission spectroscopy: Factors affecting quantitative results
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Journal Articles

Ti surface alloying of an AISI 316L stainless steel by low energy high current pulsed electron beam treatment

K. M. Zhang, J. X. Zou, T. Grosdidier, C. Dong, S. Weber
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 1407–1414 (2008)
https://doi.org/10.1116/1.2976566
Published: October 2008
View article titled, Ti surface alloying of an AISI 316L stainless steel by low energy high current pulsed electron beam treatment
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Journal Articles

Can the throttling of a perfect gas through a free molecular orifice produce a cooling effect?

Robert M. Young, Timothy T. Braggins, Christopher F. Kirby, J. Douglas Adam, Michael B. Petach, Emanuel Tward
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 624–633 (2008)
https://doi.org/10.1116/1.2929843
Published: June 2008
View article titled, Can the throttling of a perfect gas through a free molecular orifice produce a cooling effect?
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Journal Articles

Maximum entropy decomposition of quadrupole mass spectra

U. v. Toussaint, V. Dose, A. Golan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 401–406 (2004)
https://doi.org/10.1116/1.1649345
Published: February 2004
View article titled, Maximum entropy decomposition of quadrupole mass spectra
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Journal Articles

Halogen uptake by thin SiO 2 layers on exposure to HBr/O 2 and Cl 2 plasmas, investigated by vacuum transfer x-ray photoelectron spectroscopy

V. M. Donnelly, N. Layadi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 16, 1571–1576 (1998)
https://doi.org/10.1116/1.581189
Published: May 1998
View article titled, Halogen uptake by thin SiO 2 layers on exposure to HBr/O 2 and Cl 2 plasmas, investigated by vacuum transfer x-ray photoelectron spectroscopy
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Journal Articles

Postdeposition growth of a uniquely nanostructured organic film by vacuum annealing

M. K. Debe, R. J. Poirier
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 12, 2017–2022 (1994)
https://doi.org/10.1116/1.578999
Published: July 1994
View article titled, Postdeposition growth of a uniquely nanostructured organic film by vacuum annealing
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Journal Articles

Simulation of surface topography evolution during plasma etching by the method of characteristics

John C. Arnold, Herbert H. Sawin, Manoj Dalvie, Satoshi Hamaguchi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 12, 620–635 (1994)
https://doi.org/10.1116/1.578846
Published: May 1994
View article titled, Simulation of surface topography evolution during plasma etching by the method of characteristics
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Journal Articles

Thermodynamic analysis of AsH3 and PH3 decomposition including subhydrides

A. S. Jordan, A. Robertson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 12, 204–215 (1994)
https://doi.org/10.1116/1.578884
Published: January 1994
View article titled, Thermodynamic analysis of AsH<sub>3</sub> and PH<sub>3</sub> decomposition including subhydrides
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