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Journal Articles

Chemical significance of x-ray photoelectron spectroscopy binding energy shifts: A Perspective

Paul S. Bagus, Connie J. Nelin, C. R. Brundle
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 068501 (2023)
https://doi.org/10.1116/6.0003081
Published: October 2023
View article titled, Chemical significance of x-ray photoelectron spectroscopy binding energy shifts: A Perspective
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Includes: Supplementary data
Journal Articles

Effects of the focus ring on the ion kinetics at the wafer edge in capacitively coupled plasma reactors

Fang-Fang Ma, Quan-Zhi Zhang, Dao-Man Han, Zi-Lan Xiong, Ming Gao, You-Nian Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053002 (2023)
https://doi.org/10.1116/6.0002585
Published: July 2023
View article titled, Effects of the focus ring on the ion kinetics at the wafer edge in capacitively coupled plasma reactors
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Journal Articles

Characterization of a broad beam Kaufman-type ion source operated with CHF3 and O2

Gregor Dornberg, Erik Rohkamm, Peter Birtel, Frank Scholze, Frank Frost
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053104 (2023)
https://doi.org/10.1116/6.0002766
Published: July 2023
View article titled, Characterization of a broad beam Kaufman-type ion source operated with CHF<sub>3</sub> and O<sub>2</sub>
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Includes: Supplementary data
Journal Articles

Simulation studies of floating field plate in β-Ga2O3 power devices and modules

Zhao Han, Guangwei Xu, Xueqiang Xiang, Weibing Hao, Yuanbiao Li, Xuanze Zhou, Xiaobing Yan, Shibing Long
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053102 (2023)
https://doi.org/10.1116/6.0002650
Published: July 2023
View article titled, Simulation studies of floating field plate in <em>β</em>-Ga<sub>2</sub>O<sub>3</sub> power devices and modules
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Journal Articles

Modulation of the LaFeO3 film growth by the terrace width of SrTiO3 substrates

Zeguo Lin, Xiaofeng Xu, Xiaoran Liu, Jiandong Guo, Fang Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043204 (2023)
https://doi.org/10.1116/6.0002579
Published: May 2023
View article titled, Modulation of the LaFeO<sub>3</sub> film growth by the terrace width of SrTiO<sub>3</sub> substrates
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Includes: Supplementary data
Journal Articles

Effect of focus ring with external circuit on cathode edge sheath dynamics in a capacitively coupled plasma

Yuhua Xiao, Joel Brandon, Joshua Morsell, Sang Ki Nam, KiHo Bae, Jang-Yeob Lee, Steven Shannon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033008 (2023)
https://doi.org/10.1116/6.0002496
Published: April 2023
View article titled, Effect of focus ring with external circuit on cathode edge sheath dynamics in a capacitively coupled plasma
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Journal Articles

7.5 kV, 6.2 GW cm−2 NiO/β-Ga2O3 vertical rectifiers with on–off ratio greater than 1013

Jian-Sian Li, Chao-Ching Chiang, Xinyi Xia, Hsiao-Hsuan Wan, Fan Ren, S. J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 030401 (2023)
https://doi.org/10.1116/6.0002580
Published: April 2023
View article titled, 7.5 kV, 6.2 GW cm<sup>−2</sup> NiO/β-Ga<sub>2</sub>O<sub>3</sub> vertical rectifiers with on–off ratio greater than 10<sup>13</sup>
Open the PDF for 7.5 kV, 6.2 GW cm<sup>−2</sup> NiO/β-Ga<sub>2</sub>O<sub>3</sub> vertical rectifiers with on–off ratio greater than 10<sup>13</sup> in another window
Journal Articles

On the possible nature of deep centers in Ga2O3

A. Y. Polyakov, A. I. Kochkova, Amanda Langørgen, Lasse Vines, A. Vasilev, I. V. Shchemerov, A. A. Romanov, S. J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023401 (2023)
https://doi.org/10.1116/6.0002307
Published: January 2023
View article titled, On the possible nature of deep centers in Ga<sub>2</sub>O<sub>3</sub>
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Includes: Supplementary data
Journal Articles

Target ion and neutral spread in high power impulse magnetron sputtering

H. Hajihoseini, N. Brenning, M. Rudolph, M. A. Raadu, D. Lundin, J. Fischer, T. M. Minea, J. T. Gudmundsson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 013002 (2023)
https://doi.org/10.1116/6.0002292
Published: December 2022
View article titled, Target ion and neutral spread in high power impulse magnetron sputtering
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Journal Articles

Synthesis and characteristics of Sn-doped SiO2 via plasma-enhanced atomic layer deposition for self-aligned patterning

Suhyeon Park, Junyung An, Hyeongtag Jeon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 062401 (2022)
https://doi.org/10.1116/6.0001895
Published: September 2022
View article titled, Synthesis and characteristics of Sn-doped SiO<sub>2</sub> via plasma-enhanced atomic layer deposition for self-aligned patterning
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Journal Articles

Statistical analysis of pulsed spark discharges in water: Effects of gap distance, electrode material, and voltage polarity on discharge characteristics

Audren Dorval, Korentin Geraud, Flavien Valensi, Ahmad Hamdan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043006 (2022)
https://doi.org/10.1116/6.0001923
Published: June 2022
View article titled, Statistical analysis of pulsed spark discharges in water: Effects of gap distance, electrode material, and voltage polarity on discharge characteristics
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Includes: Supplementary data
Journal Articles

Hyperfine interaction studies in the David Shirley group, 1960–1975. II. Perturbed angular correlations and Mössbauer effect

Kenneth S. Krane
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043208 (2022)
https://doi.org/10.1116/6.0001928
Published: June 2022
View article titled, Hyperfine interaction studies in the David Shirley group, 1960–1975. II. Perturbed angular correlations and Mössbauer effect
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Journal Articles

Propagation of nanosecond plasmas in liquids—Streamer velocities and streamer lengths

E. Jüngling, K. Grosse, A. von Keudell
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043003 (2022)
https://doi.org/10.1116/6.0001669
Published: June 2022
View article titled, Propagation of nanosecond plasmas in liquids—Streamer velocities and streamer lengths
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Journal Articles

Energy storage performance in lead-free antiferroelectric 0.92(Bi0.54Na0.46)TiO3-0.08BaTiO3 ultrathin films by pulsed laser deposition

José de Jesús Serralta-Macías, Rodolfo Antonio Rodriguez-Davila, Manuel Quevedo-Lopez, Daniel Olguín, Santos Jesús Castillo, Chadwin D. Young, José Martin Yáñez-Limón
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033417 (2022)
https://doi.org/10.1116/6.0001755
Published: May 2022
View article titled, Energy storage performance in lead-free antiferroelectric 0.92(Bi<sub>0.54</sub>Na<sub>0.46</sub>)TiO<sub>3</sub>-0.08BaTiO<sub>3</sub> ultrathin films by pulsed laser deposition
Open the PDF for Energy storage performance in lead-free antiferroelectric 0.92(Bi<sub>0.54</sub>Na<sub>0.46</sub>)TiO<sub>3</sub>-0.08BaTiO<sub>3</sub> ultrathin films by pulsed laser deposition in another window
Journal Articles

Atomic step disorder on polycrystalline surfaces leads to spatially inhomogeneous work functions

Morgann Berg, Sean W. Smith, David A. Scrymgeour, Michael T. Brumbach, Ping Lu, Sara M. Dickens, Joseph R. Michael, Taisuke Ohta, Ezra Bussmann, Harold P. Hjalmarson, Peter A. Schultz, Paul G. Clem, Matthew M. Hopkins, Christopher H. Moore
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 023207 (2022)
https://doi.org/10.1116/6.0001729
Published: February 2022
View article titled, Atomic step disorder on polycrystalline surfaces leads to spatially inhomogeneous work functions
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Journal Articles

Phase-separated indenofluorene arrays stabilized by hydrogen and halogen bonds on Au(111)

Jong Hwan Park, Min Hui Chang, Won Jun Jang, Seungwu Han, Se-Jong Kahng
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 013201 (2022)
https://doi.org/10.1116/6.0001345
Published: November 2021
View article titled, Phase-separated indenofluorene arrays stabilized by hydrogen and halogen bonds on Au(111)
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Journal Articles

Deep level defect spectroscopies of complex oxide surfaces and interfaces

Jun Zhang, Kyle McNicholas, Snjezana Balaz, Zhao Quan Zeng, Darrell Schlom, Leonard J. Brillson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063215 (2021)
https://doi.org/10.1116/6.0001339
Published: October 2021
View article titled, Deep level defect spectroscopies of complex oxide surfaces and interfaces
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Includes: Supplementary data
Journal Articles

Nonadiabatic localization of H2 in the field of two external positive tip charges

W. Schattke, M. A. Van Hove, R. Díez Muiño
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 053206 (2021)
https://doi.org/10.1116/6.0001138
Published: August 2021
View article titled, Nonadiabatic localization of H<sub>2</sub> in the field of two external positive tip charges
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Journal Articles

Determining valence band offsets in heterojunctions using a single core-level x-ray photoelectron spectrum

Le Wang, Yingge Du, Scott A. Chambers
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 043208 (2021)
https://doi.org/10.1116/6.0001103
Published: June 2021
View article titled, Determining valence band offsets in heterojunctions using a single core-level x-ray photoelectron spectrum
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Journal Articles

Introductory guide to the application of XPS to epitaxial films and heterostructures

Scott A. Chambers, Le Wang, Donald R. Baer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 061201 (2020)
https://doi.org/10.1116/6.0000465
Published: October 2020
View article titled, Introductory guide to the application of XPS to epitaxial films and heterostructures
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