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Journal Articles

Ultrathin stable Ohmic contacts for high-temperature operation of β-Ga₂O₃ devices

William A. Callahan, Edwin Supple, David Ginley, Michael Sanders, Brian P. Gorman, Ryan O’Hayre, Andriy Zakutayev

J. Vac. Sci. Technol. A 41, 043211 (2023)

https://doi.org/10.1116/6.0002645

Published: June 2023

View article titled, Ultrathin stable Ohmic contacts for high-temperature operation of β-Ga2O3 devices

Includes: Supplementary data

Journal Articles

Ge-ion implantation and activation in (100) β-Ga₂O₃ for ohmic contact improvement using pulsed rapid thermal annealing

Kornelius Tetzner, Andreas Thies, Palvan Seyidov, Ta-Shun Chou, Jana Rehm, Ina Ostermay, Zbigniew Galazka, Andreas Fiedler, Andreas Popp, Joachim Würfl, Oliver Hilt

J. Vac. Sci. Technol. A 41, 043102 (2023)

https://doi.org/10.1116/6.0002642

Published: May 2023

View article titled, Ge-ion implantation and activation in (100) β-Ga2O3 for ohmic contact improvement using pulsed rapid thermal annealing

Journal Articles

Enhancing the photo-response characteristics of graphene/n-Si based Schottky barrier photodiodes by increasing the number of graphene layers

Mehmet Fidan, Özhan Ünverdi, Cem Çelebi

J. Vac. Sci. Technol. A 40, 032203 (2022)

https://doi.org/10.1116/6.0001758

Published: April 2022

View article titled, Enhancing the photo-response characteristics of graphene/n-Si based Schottky barrier photodiodes by increasing the number of graphene layers

Journal Articles

Atomic-scale growth, imaging, spectroscopy, and electronic transport properties of metal-oxide films and interfaces

Takeo Ohsawa

J. Vac. Sci. Technol. A 40, 010806 (2022)

https://doi.org/10.1116/6.0001469

Published: December 2021

View article titled, Atomic-scale growth, imaging, spectroscopy, and electronic transport properties of metal-oxide films and interfaces

Journal Articles

Effect of buffer termination on intermixing and conductivity in LaTiO₃/SrTiO₃ heterostructures integrated on Si(100)

Tongjie Chen, Kamyar Ahmadi-Majlan, Zheng Hui Lim, Zhan Zhang, Joseph H. Ngai, Divine P. Kumah

J. Vac. Sci. Technol. A 40, 013206 (2022)

https://doi.org/10.1116/6.0001464

Published: December 2021

View article titled, Effect of buffer termination on intermixing and conductivity in LaTiO3/SrTiO3 heterostructures integrated on Si(100)

Journal Articles

Silicon-ion implantation induced doping and nanoporosity in molecular beam epitaxy grown GaSb epitaxial films

Rakesh Kumar Pandey, Puspashree Mishra, Akhilesh Pandey, Shankar Dutta, Aman Arora, Shyama Rath

J. Vac. Sci. Technol. A 39, 043413 (2021)

https://doi.org/10.1116/6.0000895

Published: June 2021

View article titled, Silicon-ion implantation induced doping and nanoporosity in molecular beam epitaxy grown GaSb epitaxial films

Journal Articles

Effect of probe geometry during measurement of >100 A Ga₂O₃ vertical rectifiers

Ribhu Sharma, Minghan Xian, Chaker Fares, Mark E. Law, Marko Tadjer, Karl D. Hobart, Fan Ren, Stephen J. Pearton

J. Vac. Sci. Technol. A 39, 013406 (2021)

https://doi.org/10.1116/6.0000815

Published: December 2020

View article titled, Effect of probe geometry during measurement of >100 A Ga2O3 vertical rectifiers

Journal Articles

Contact potential induced carrier localization in nanometer-thin Cu/Ru, Cu/Co, and Cu/Mo superlattices

Jiyoon Jessica Kim, Gwo-Ching Wang, Toh-Ming Lu, Tung-Sheng Kuan

J. Vac. Sci. Technol. A 38, 033208 (2020)

https://doi.org/10.1116/1.5142826

Published: April 2020

View article titled, Contact potential induced carrier localization in nanometer-thin Cu/Ru, Cu/Co, and Cu/Mo superlattices

Journal Articles

Measuring thickness in thin NbN films for superconducting devices

Owen Medeiros, Marco Colangelo, Ilya Charaev, Karl K. Berggren

J. Vac. Sci. Technol. A 37, 041501 (2019)

https://doi.org/10.1116/1.5088061

Published: May 2019

View article titled, Measuring thickness in thin NbN films for superconducting devices

Journal Articles

Optical properties of MoO₃/Ag/MoO₃ multilayer structures determined using spectroscopic ellipsometry

Dae Ho Jung, Hyeon Seob So, Hosun Lee, Jin-Yeong Park, Han-Ki Kim

J. Vac. Sci. Technol. A 37, 031515 (2019)

https://doi.org/10.1116/1.5095958

Published: May 2019

View article titled, Optical properties of MoO3/Ag/MoO3 multilayer structures determined using spectroscopic ellipsometry

Journal Articles

Erratum: “Epitaxial growth and electrical properties of VO₂ on [LaAlO₃]_0.3[Sr₂AlTaO₆]_0.7 (111) substrate” [J. Vac. Sci. Technol. A 36 , 061506 (2018)]

Yang Liu, Shanyuan Niu, Thomas Orvis, Haimeng Zhang, Huan Zhao, Han Wang, Jayakanth Ravichandran

J. Vac. Sci. Technol. A 37, 033401 (2019)

https://doi.org/10.1116/1.5093041

Published: March 2019

View article titled, Erratum: “Epitaxial growth and electrical properties of VO2 on [LaAlO3]0.3[Sr2AlTaO6]0.7 (111) substrate” [J. Vac. Sci. Technol. A 36 , 061506 (2018)]

Journal Articles

Growth-temperature dependence of conductivity at the LaCrO₃/SrTiO₃ (001) interface

Athby Al-Tawhid, Jordan R. Frick, Daniel B. Dougherty, Divine P. Kumah

J. Vac. Sci. Technol. A 37, 021102 (2019)

https://doi.org/10.1116/1.5085334

Published: February 2019

View article titled, Growth-temperature dependence of conductivity at the LaCrO3/SrTiO3 (001) interface

Journal Articles

Low-temperature homoepitaxial growth of two-dimensional antimony superlattices in silicon

April D. Jewell, Michael E. Hoenk, Alexander G. Carver, Shouleh Nikzad

J. Vac. Sci. Technol. A 36, 061513 (2018)

https://doi.org/10.1116/1.5040837

Published: November 2018

View article titled, Low-temperature homoepitaxial growth of two-dimensional antimony superlattices in silicon

Journal Articles

Tunable resistivity in ink-jet printed electrical structures on paper by plasma conversion of particle-free, stabilizer-free silver inks

Yongkun Sui, Souvik Ghosh, Christopher Miller, Daphne Pappas, R. Mohan Sankaran, Christian A. Zorman

J. Vac. Sci. Technol. A 36, 051302 (2018)

https://doi.org/10.1116/1.5042459

Published: August 2018

View article titled, Tunable resistivity in ink-jet printed electrical structures on paper by plasma conversion of particle-free, stabilizer-free silver inks

Includes: Supplementary data

Journal Articles

Fabrication and characterization of transparent conducting reduced graphene oxide/Ag nanowires/ZnO:Ga composite thin films on flexible substrates

Ching-Tian Chou, Fang-Hsing Wang

J. Vac. Sci. Technol. A 36, 05G504 (2018)

https://doi.org/10.1116/1.5035155

Published: July 2018

View article titled, Fabrication and characterization of transparent conducting reduced graphene oxide/Ag nanowires/ZnO:Ga composite thin films on flexible substrates

Journal Articles

Selective anisotropic etching of GaN over AlGaN for very thin films

Joel C. Wong, Miroslav Micovic, David F. Brown, Isaac Khalaf, Adam Williams, Andrea Corrion

J. Vac. Sci. Technol. A 36, 030603 (2018)

https://doi.org/10.1116/1.5012530

Published: April 2018

View article titled, Selective anisotropic etching of GaN over AlGaN for very thin films

Journal Articles

Atomic layer deposition of amorphous Ni-Ta-N films for Cu diffusion barrier

Yong-Ping Wang, Zi-Jun Ding, Bao Zhu, Wen-Jun Liu, David Wei Zhang, Shi-Jin Ding

J. Vac. Sci. Technol. A 36, 031502 (2018)

https://doi.org/10.1116/1.5002727

Published: March 2018

View article titled, Atomic layer deposition of amorphous Ni-Ta-N films for Cu diffusion barrier

Journal Articles

Remote doping of graphene on SiO₂ with 5 keV x-rays in air

Björn Salzmann, Carlo Bernard, Adrian Hemmi, Thomas Greber

J. Vac. Sci. Technol. A 36, 020603 (2018)

https://doi.org/10.1116/1.5013003

Published: February 2018

View article titled, Remote doping of graphene on SiO2 with 5 keV x-rays in air

Journal Articles

Nucleation mechanism during WS₂ plasma enhanced atomic layer deposition on amorphous Al₂O₃ and sapphire substrates

Benjamin Groven, Ankit Nalin Mehta, Hugo Bender, Quentin Smets, Johan Meersschaut, Alexis Franquet, Thierry Conard, Thomas Nuytten, Patrick Verdonck, Wilfried Vandervorst, Marc Heyns, Iuliana Radu, Matty Caymax, Annelies Delabie

J. Vac. Sci. Technol. A 36, 01A105 (2018)

https://doi.org/10.1116/1.5003361

Published: November 2017

View article titled, Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates

Includes: Supplementary data

Journal Articles

Characterization of transparent conductive ZnO and Ga-doped ZnO films on polyethylene naphthalate sheets aged for six years in ambient atmospheric

Housei Akazawa

J. Vac. Sci. Technol. A 35, 041515 (2017)

https://doi.org/10.1116/1.4990538

Published: June 2017

View article titled, Characterization of transparent conductive ZnO and Ga-doped ZnO films on polyethylene naphthalate sheets aged for six years in ambient atmospheric

NARROW

Topics

Ultrathin stable Ohmic contacts for high-temperature operation of β-Ga₂O₃ devices

Ge-ion implantation and activation in (100) β-Ga₂O₃ for ohmic contact improvement using pulsed rapid thermal annealing

Enhancing the photo-response characteristics of graphene/n-Si based Schottky barrier photodiodes by increasing the number of graphene layers

Atomic-scale growth, imaging, spectroscopy, and electronic transport properties of metal-oxide films and interfaces

Effect of buffer termination on intermixing and conductivity in LaTiO₃/SrTiO₃ heterostructures integrated on Si(100)

Silicon-ion implantation induced doping and nanoporosity in molecular beam epitaxy grown GaSb epitaxial films

Effect of probe geometry during measurement of >100 A Ga₂O₃ vertical rectifiers

Contact potential induced carrier localization in nanometer-thin Cu/Ru, Cu/Co, and Cu/Mo superlattices

Measuring thickness in thin NbN films for superconducting devices

Optical properties of MoO₃/Ag/MoO₃ multilayer structures determined using spectroscopic ellipsometry

Erratum: “Epitaxial growth and electrical properties of VO₂ on [LaAlO₃]_0.3[Sr₂AlTaO₆]_0.7 (111) substrate” [J. Vac. Sci. Technol. A 36 , 061506 (2018)]

Growth-temperature dependence of conductivity at the LaCrO₃/SrTiO₃ (001) interface

Low-temperature homoepitaxial growth of two-dimensional antimony superlattices in silicon

Tunable resistivity in ink-jet printed electrical structures on paper by plasma conversion of particle-free, stabilizer-free silver inks

Fabrication and characterization of transparent conducting reduced graphene oxide/Ag nanowires/ZnO:Ga composite thin films on flexible substrates

Selective anisotropic etching of GaN over AlGaN for very thin films

Atomic layer deposition of amorphous Ni-Ta-N films for Cu diffusion barrier

Remote doping of graphene on SiO₂ with 5 keV x-rays in air

Nucleation mechanism during WS₂ plasma enhanced atomic layer deposition on amorphous Al₂O₃ and sapphire substrates

Characterization of transparent conductive ZnO and Ga-doped ZnO films on polyethylene naphthalate sheets aged for six years in ambient atmospheric

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