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Journal Articles

Comparative studies of cold/hot probe techniques for accurate plasma measurements

Jian-quan Li, Qing-he Zhang, Zan-yang Xing, Wen-qi Lu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033001 (2022)
https://doi.org/10.1116/6.0001461
Published: March 2022
View article titled, Comparative studies of cold/hot probe techniques for accurate plasma measurements
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Journal Articles

Determination of recombination coefficients for hydrogen, oxygen, and nitrogen gasses via in situ radical probe system

Dren Qerimi, Gianluca Panici, Arihant Jain, Daniel Jacobson, David N. Ruzic
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 023004 (2021)
https://doi.org/10.1116/6.0000787
Published: March 2021
View article titled, Determination of recombination coefficients for hydrogen, oxygen, and nitrogen gasses via <em>in situ</em> radical probe system
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Journal Articles

Plasma-enhanced atomic layer deposition of titanium vanadium nitride

Mark J. Sowa, Ling Ju, Alexander C. Kozen, Nicholas C. Strandwitz, Guosong Zeng, Tomas F. Babuska, Zakaria Hsain, Brandon A. Krick
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 06A103 (2018)
https://doi.org/10.1116/1.5037463
Published: October 2018
View article titled, Plasma-enhanced atomic layer deposition of titanium vanadium nitride
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Includes: Supplementary data
Journal Articles

Microplasma jet cleaning of Langmuir probes for methane-air premixed flame diagnostics

Steven J. Doyle, Paulo R. Salvador, Kunning G. Xu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 061309 (2017)
https://doi.org/10.1116/1.4986891
Published: October 2017
View article titled, Microplasma jet cleaning of Langmuir probes for methane-air premixed flame diagnostics
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Journal Articles

Metal oxide morphology in argon-assisted glancing angle deposition

J. B. Sorge, M. T. Taschuk, N. G. Wakefield, J. C. Sit, M. J. Brett
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 021507 (2012)
https://doi.org/10.1116/1.3687204
Published: February 2012
View article titled, Metal oxide morphology in argon-assisted glancing angle deposition
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Journal Articles

Temperature dependence of the infrared absorption cross-sections of neutral species commonly found in fluorocarbon plasmas

Caleb T. Nelson, Lawrence J. Overzet, Matthew J. Goeckner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 021305 (2012)
https://doi.org/10.1116/1.3679408
Published: February 2012
View article titled, Temperature dependence of the infrared absorption cross-sections of neutral species commonly found in fluorocarbon plasmas
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Journal Articles

Spatially resolved study of primary electron transport in magnetic cusps

Aimee A. Hubble, John E. Foster
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 011301 (2012)
https://doi.org/10.1116/1.3656742
Published: November 2011
View article titled, Spatially resolved study of primary electron transport in magnetic cusps
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Journal Articles

Comparison of compressive and tensile relaxed composition-graded GaAsP and (Al)InGaP substrates

M. J. Mori, S. T. Boles, E. A. Fitzgerald
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 182–188 (2010)
https://doi.org/10.1116/1.3290762
Published: January 2010
View article titled, Comparison of compressive and tensile relaxed composition-graded GaAsP and (Al)InGaP substrates
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Journal Articles

Coating techniques of metal chambers for remote catalytic chemical vapor deposition applications

Hironobu Umemoto, Shota Setoguchi, Hitoshi Uemura, Hideki Matsumura
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 309–311 (2008)
https://doi.org/10.1116/1.2844313
Published: February 2008
View article titled, Coating techniques of metal chambers for remote catalytic chemical vapor deposition applications
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Journal Articles

Measurement of Cu atom density in a magnetron sputtering plasma source using an YBaCuO target by laser-induced fluorescence imaging spectroscopy

Junsi Gao, Nayan Nafarizal, Koichi Sasaki
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 2100–2104 (2006)
https://doi.org/10.1116/1.2353850
Published: October 2006
View article titled, Measurement of Cu atom density in a magnetron sputtering plasma source using an YBaCuO target by laser-induced fluorescence imaging spectroscopy
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Journal Articles

Atmospheric pressure plasma analysis by modulated molecular beam mass spectrometry

Y. Aranda Gonzalvo, T. D. Whitmore, J. A. Rees, D. L. Seymour, E. Stoffels
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 550–553 (2006)
https://doi.org/10.1116/1.2194938
Published: April 2006
View article titled, Atmospheric pressure plasma analysis by modulated molecular beam mass spectrometry
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Journal Articles

Threshold ionization mass spectrometry of reactive species in remote Ar ∕ C 2 H 2 expanding thermal plasma

Jan Benedikt, Sumit Agarwal, Dimitri Eijkman, Wouter Vandamme, Mariadriana Creatore, M. C. M. van de Sanden
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 1400–1412 (2005)
https://doi.org/10.1116/1.2006138
Published: August 2005
View article titled, Threshold ionization mass spectrometry of reactive species in remote Ar ∕ C 2 H 2 expanding thermal plasma
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Journal Articles

Inductively coupled plasmas: Optimizing the inductive-coupling efficiency for large-area source design

P. Colpo, T. Meziani, F. Rossi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 270–277 (2005)
https://doi.org/10.1116/1.1854695
Published: February 2005
View article titled, Inductively coupled plasmas: Optimizing the inductive-coupling efficiency for large-area source design
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Journal Articles

Two-dimensional pulsed-plasma simulation of a chlorine discharge

Badri Ramamurthi, Demetre J. Economou
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 467–478 (2002)
https://doi.org/10.1116/1.1450581
Published: March 2002
View article titled, Two-dimensional pulsed-plasma simulation of a chlorine discharge
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Journal Articles

Development of vacuum ultraviolet absorption spectroscopy technique employing nitrogen molecule microdischarge hollow cathode lamp for absolute density measurements of nitrogen atoms in process plasmas

Seigou Takashima, Shigeo Arai, Masaru Hori, Toshio Goto, Akihiro Kono, Masafumi Ito, Katsumi Yoneda
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 19, 599–602 (2001)
https://doi.org/10.1116/1.1340655
Published: March 2001
View article titled, Development of vacuum ultraviolet absorption spectroscopy technique employing nitrogen molecule microdischarge hollow cathode lamp for absolute density measurements of nitrogen atoms in process plasmas
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Journal Articles

New very high frequency plasma source using a TM 01 -mode patch antenna with short pins

Tomohiro Okumura, Takuya Matsui, Hideo Suzuki, Kazuyuki Sakiyama
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 2815–2821 (2000)
https://doi.org/10.1116/1.1310654
Published: November 2000
View article titled, New very high frequency plasma source using a TM 01 -mode patch antenna with short pins
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Journal Articles

Optical spectroscopic analyses of OH incorporation into SiO 2 films deposited from O 2 /tetraethoxysilane plasmas

A. Goullet, C. Vallée, A. Granier, G. Turban
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 2452–2458 (2000)
https://doi.org/10.1116/1.1287152
Published: September 2000
View article titled, Optical spectroscopic analyses of OH incorporation into SiO 2 films deposited from O 2 /tetraethoxysilane plasmas
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Journal Articles

Graphite macroparticle filtering efficiency of three different magnetic filter designs used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon films

M. Hakovirta, K. C. Walter, B. P. Wood, M. Nastasi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 17, 3077–3080 (1999)
https://doi.org/10.1116/1.582009
Published: September 1999
View article titled, Graphite macroparticle filtering efficiency of three different magnetic filter designs used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon films
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Journal Articles

Density measurement of thin glass layers for gas barrier films

Norihito Fukugami, Hideo Nishino, Masa-aki Yanaka, Kozue Tomiyama, Yusuke Tsukahara
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 17, 1840–1842 (1999)
https://doi.org/10.1116/1.581901
Published: July 1999
View article titled, Density measurement of thin glass layers for gas barrier films
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Journal Articles

Sculptured thin films and glancing angle deposition: Growth mechanics and applications

K. Robbie, M. J. Brett
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 15, 1460–1465 (1997)
https://doi.org/10.1116/1.580562
Published: May 1997
View article titled, Sculptured thin films and glancing angle deposition: Growth mechanics and applications
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