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Journal Articles

Atomic layer deposition of lithium metaphosphate from H3PO4 and P4O10 facilitated via direct liquid injection: Experiment and theory

Ivan Kundrata, Antónia Mošková, Martin Moško, Matej Mičušík, Edmund Dobročka, Karol Fröhlich
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 062407 (2021)
https://doi.org/10.1116/6.0001255
Published: November 2021
View article titled, Atomic layer deposition of lithium metaphosphate from H<sub>3</sub>PO<sub>4</sub> and P<sub>4</sub>O<sub>10</sub> facilitated via direct liquid injection: Experiment and theory
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Includes: Supplementary data
Journal Articles

Thermodynamic stability of hexagonal and rhombohedral boron nitride under chemical vapor deposition conditions from van der Waals corrected first principles calculations

Henrik Pedersen, Björn Alling, Hans Högberg, Annop Ektarawong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 040603 (2019)
https://doi.org/10.1116/1.5107455
Published: June 2019
View article titled, Thermodynamic stability of hexagonal and rhombohedral boron nitride under chemical vapor deposition conditions from van der Waals corrected first principles calculations
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Includes: Supplementary data
Journal Articles

Gas rarefaction effects during high power pulsed magnetron sputtering of groups IVb and VIb transition metals in Ar

Grzegorz Greczynski, Igor Zhirkov, Ivan Petrov, J. E. Greene, Johanna Rosen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 060601 (2017)
https://doi.org/10.1116/1.4989674
Published: July 2017
View article titled, Gas rarefaction effects during high power pulsed magnetron sputtering of groups IVb and VIb transition metals in Ar
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Journal Articles

Hydrogen interactions with oxidized austenitic stainless steel

Vincenc Nemanič, Marko Žumer, Mitja Lakner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 021605 (2017)
https://doi.org/10.1116/1.4975142
Published: January 2017
View article titled, Hydrogen interactions with oxidized austenitic stainless steel
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Journal Articles

Deposition of highly textured AlN thin films by reactive high power impulse magnetron sputtering

Milena A. Moreira, Tobias Törndahl, Ilia Katardjiev, Tomas Kubart
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 021518 (2015)
https://doi.org/10.1116/1.4907874
Published: February 2015
View article titled, Deposition of highly textured AlN thin films by reactive high power impulse magnetron sputtering
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Journal Articles

Application of electron stimulated desorption techniques to measure the isotherm and the mean residence time of hydrogen physisorbed on a metal surface

Ichiro Arakawa, Hideyuki Shimizu, Taku Kawarabuki, Koichiro Yamakawa, Takashi Miura
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 021602 (2015)
https://doi.org/10.1116/1.4904033
Published: December 2014
View article titled, Application of electron stimulated desorption techniques to measure the isotherm and the mean residence time of hydrogen physisorbed on a metal surface
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Journal Articles

Hybrid modeling of time-dependent rarefied gas expansion

Manuel Vargas, Steryios Naris, Dimitris Valougeorgis, Sarantis Pantazis, Karl Jousten
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 021602 (2014)
https://doi.org/10.1116/1.4830283
Published: November 2013
View article titled, Hybrid modeling of time-dependent rarefied gas expansion
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Journal Articles

Comprehensive computer model for magnetron sputtering. I. Gas heating and rarefaction

Francisco J. Jimenez, Steven K. Dew
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 041302 (2012)
https://doi.org/10.1116/1.4712534
Published: May 2012
View article titled, Comprehensive computer model for magnetron sputtering. I. Gas heating and rarefaction
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Journal Articles

Effect of target–substrate distance on properties of flexible InZnSnO films grown by linear facing target sputtering

Hyun-Su Shin, Ju-Hyun Lee, Han-Ki Kim
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 031510 (2012)
https://doi.org/10.1116/1.4705520
Published: April 2012
View article titled, Effect of target–substrate distance on properties of flexible InZnSnO films grown by linear facing target sputtering
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Journal Articles

Simple self-gettering differential-pump for minimizing source oxidation in oxide-MBE environment

Yong-Seung Kim, Namrata Bansal, Seongshik Oh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 29, 041505 (2011)
https://doi.org/10.1116/1.3591384
Published: May 2011
View article titled, Simple self-gettering differential-pump for minimizing source oxidation in oxide-MBE environment
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Journal Articles

Sr flux stability against oxidation in oxide-molecular-beam-epitaxy environment: Flux, geometry, and pressure dependence

Y. S. Kim, Namrata Bansal, Carlos Chaparro, Heiko Gross, Seongshik Oh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 271–276 (2010)
https://doi.org/10.1116/1.3298880
Published: February 2010
View article titled, Sr flux stability against oxidation in oxide-molecular-beam-epitaxy environment: Flux, geometry, and pressure dependence
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Journal Articles

Influence of the magnetron on the growth of aluminum nitride thin films deposited by reactive sputtering

G. F. Iriarte
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 193–198 (2010)
https://doi.org/10.1116/1.3280174
Published: January 2010
View article titled, Influence of the magnetron on the growth of aluminum nitride thin films deposited by reactive sputtering
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Journal Articles

Gas temperature measurement in C F 4 , S F 6 , O 2 , Cl 2 , and HBr inductively coupled plasmas

G. Cunge, R. Ramos, D. Vempaire, M. Touzeau, M. Neijbauer, N. Sadeghi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 471–478 (2009)
https://doi.org/10.1116/1.3106626
Published: March 2009
View article titled, Gas temperature measurement in C F 4 , S F 6 , O 2 , Cl 2 , and HBr inductively coupled plasmas
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Journal Articles

Test particle simulation of the role of ballistic electrons in hybrid dc/rf capacitively coupled C F 4 plasmas

P. L. G. Ventzek, K. Denpoh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 287–294 (2009)
https://doi.org/10.1116/1.3072922
Published: February 2009
View article titled, Test particle simulation of the role of ballistic electrons in hybrid dc/rf capacitively coupled C F 4 plasmas
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Journal Articles

Magnetron sputtering of Ti 3 Si C 2 thin films from a compound target

P. Eklund, M. Beckers, J. Frodelius, H. Högberg, L. Hultman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 1381–1388 (2007)
https://doi.org/10.1116/1.2757178
Published: August 2007
View article titled, Magnetron sputtering of Ti 3 Si C 2 thin films from a compound target
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Journal Articles

Microstructural differences in thin film Zn Ga 2 O 4 : Mn phosphor produced by differences in sputtering gas pressure

Joo Han Kim, Paul H. Holloway
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 2164–2171 (2006)
https://doi.org/10.1116/1.2359737
Published: October 2006
View article titled, Microstructural differences in thin film Zn Ga 2 O 4 : Mn phosphor produced by differences in sputtering gas pressure
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Journal Articles

Inhomogeneous rarefaction of the process gas in a direct current magnetron sputtering system

F. Jimenez, S. D. Ekpe, S. K. Dew
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1530–1534 (2006)
https://doi.org/10.1116/1.2210005
Published: June 2006
View article titled, Inhomogeneous rarefaction of the process gas in a direct current magnetron sputtering system
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Journal Articles

Layer structure of ultrathin Ag films on Ni ∕ Pt ( 111 )

H. Y. Ho, Y. J. Chen, C. W. Su, R. H. Chen, C. S. Shern
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1020–1023 (2006)
https://doi.org/10.1116/1.2208993
Published: June 2006
View article titled, Layer structure of ultrathin Ag films on Ni ∕ Pt ( 111 )
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Journal Articles

Crystallization and (Al,Ti)-oxide growth in annealed Ti O 2 – Al 2 O 3 multilayers

M. A. Omari, R. S. Sorbello, C. R. Aita
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 317–323 (2006)
https://doi.org/10.1116/1.2171710
Published: February 2006
View article titled, Crystallization and (Al,Ti)-oxide growth in annealed Ti O 2 – Al 2 O 3 multilayers
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Journal Articles

John Ambrose Fleming and the beginning of electronics

H. F. Dylla, Steven T. Corneliussen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 1244–1251 (2005)
https://doi.org/10.1116/1.1881652
Published: June 2005
View article titled, John Ambrose Fleming and the beginning of electronics
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