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Journal Articles
J. Vac. Sci. Technol. A 43, 022404 (2025)
Published: February 2025
Journal Articles
J. Vac. Sci. Technol. A 42, 043402 (2024)
Published: May 2024
Journal Articles
Thomas Vincent, Damien Coutancier, Pia Dally, Mirella Al Katrib, Mathieu Frégnaux, Stefania Cacovich, Frédérique Donsanti, Armelle Yaïche, Karim Medjoubi, Thomas Guillemot, Marion Provost, Jean Rousset, Muriel Bouttemy, Nathanaelle Schneider
J. Vac. Sci. Technol. A 42, 032802 (2024)
Published: March 2024
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 042401 (2023)
Published: May 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 032603 (2023)
Published: April 2023
Includes: Supplementary data
Journal Articles
Jonas C. Gertsch, Jonathan L. Partridge, Austin M. Cano, Joel W. Clancey, Victor M. Bright, Steven M. George
J. Vac. Sci. Technol. A 41, 012603 (2023)
Published: January 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 013003 (2023)
Published: December 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 063401 (2022)
Published: September 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 053407 (2022)
Published: September 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 043005 (2022)
Published: June 2022
Journal Articles
Kazuki Yoshida, Issei Nagata, Kentaro Saito, Masanori Miura, Kensaku Kanomata, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose
J. Vac. Sci. Technol. A 40, 022408 (2022)
Published: February 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 022401 (2022)
Published: January 2022
Journal Articles
J. Vac. Sci. Technol. A 39, 062404 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 032414 (2021)
Published: April 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 023413 (2021)
Published: February 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 022403 (2021)
Published: January 2021
Journal Articles
Ultrasonic atomization of titanium isopropoxide at room temperature for TiO2 atomic layer deposition
J. Vac. Sci. Technol. A 38, 062405 (2020)
Published: October 2020
Includes: Supplementary data
Journal Articles
Devika Choudhury, David J. Mandia, Ryan R. Langeslay, Angel Yanguas-Gil, Steven Letourneau, Alfred P. Sattelberger, Mahalingam Balasubramanium, Anil U. Mane, Massimiliano Delferro, Jeffrey W. Elam
J. Vac. Sci. Technol. A 38, 042407 (2020)
Published: June 2020
Journal Articles
Théo Henry, Paolo Martins, Etienne Eustache, Bernard Servet, Laurent Divay, Pierre Jouanne, Philippe Grasset, Jean-Paul Dudon, Patrick Hugonnot, Karl Fleury-Frenette
J. Vac. Sci. Technol. A 38, 043404 (2020)
Published: June 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 032407 (2020)
Published: March 2020
Includes: Supplementary data
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