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Journal Articles

3D numerical modeling and simulation of β-Ga2O3 crystal growth by edge-defined film-fed growth method

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Junlan Wang, Zaoyang Li, Chao Qi, Lijun Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 013202 (2025)
https://doi.org/10.1116/6.0004170
Published: January 2025
View article titled, 3D numerical modeling and simulation of β-Ga2O3 crystal growth by edge-defined film-fed growth method
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Journal Articles

Cyclone-type vaporizer for mass delivery of atomic layer deposition precursors: Simulation and experimental studies

Free
Seung-Ho Seo, Donggeon Shin, Cha-Hee Kim, Keun-Tae Jeong, Yeongjong Lee, Daehyun Kim, Hyun Koock Shin, Won-Jun Lee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 012403 (2025)
https://doi.org/10.1116/6.0004013
Published: December 2024
View article titled, Cyclone-type vaporizer for mass delivery of atomic layer deposition precursors: Simulation and experimental studies
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Journal Articles

Pulsed laser induced atomic layer etching of silicon

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Matthew Eliceiri, Yoonsoo Rho, Runxuan Li, Costas P. Grigoropoulos
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 022602 (2023)
https://doi.org/10.1116/6.0002399
Published: February 2023
View article titled, Pulsed laser induced atomic layer etching of silicon
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Includes: Supplementary data
Journal Articles

Relationship between local coordinates and thermal conductivity in amorphous carbon

Open Access
Emi Minamitani, Takuma Shiga, Makoto Kashiwagi, Ippei Obayashi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033408 (2022)
https://doi.org/10.1116/6.0001744
Published: April 2022
View article titled, Relationship between local coordinates and thermal conductivity in amorphous carbon
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Journal Articles

Two-step growth of β-Ga2O3 films on (100) diamond via low pressure chemical vapor deposition

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Md Rezaul Karim, Zhaoying Chen, Zixuan Feng, Hsien-Lien Huang, Jared M. Johnson, Marko J. Tadjer, Jinwoo Hwang, Hongping Zhao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 023411 (2021)
https://doi.org/10.1116/6.0000854
Published: February 2021
View article titled, Two-step growth of β-Ga2O3 films on (100) diamond via low pressure chemical vapor deposition
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Journal Articles

Compound semiconductor bonded to AlN heat spreader substrate using graded intermediate layer

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K. Jagannadham
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 536–542 (2007)
https://doi.org/10.1116/1.2722762
Published: April 2007
View article titled, Compound semiconductor bonded to AlN heat spreader substrate using graded intermediate layer
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Journal Articles

Thermal conductivity of AlN-diamond particulate composite films on silicon

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K. Jagannadham
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 895–899 (2006)
https://doi.org/10.1116/1.2198862
Published: May 2006
View article titled, Thermal conductivity of AlN-diamond particulate composite films on silicon
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Journal Articles

Integrated AlN/diamond heat spreaders for silicon device processing

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S. N. Yoganand, K. Jagannadham, A. Karoui, H. Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 1974–1982 (2002)
https://doi.org/10.1116/1.1513643
Published: November 2002
View article titled, Integrated AlN/diamond heat spreaders for silicon device processing
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Journal Articles

Heat transfer analysis and optimization of two-beam microelectromechanical thermal actuators

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Ryan Hickey, Marek Kujath, Ted Hubbard
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 971–974 (2002)
https://doi.org/10.1116/1.1468654
Published: May 2002
View article titled, Heat transfer analysis and optimization of two-beam microelectromechanical thermal actuators
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Journal Articles

Toward understanding the fundamental mechanisms and properties of the thermal mass flow controller

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L. D. Hinkle, C. F. Mariano
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 9, 2043–2047 (1991)
https://doi.org/10.1116/1.577452
Published: May 1991
View article titled, Toward understanding the fundamental mechanisms and properties of the thermal mass flow controller
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