Skip Nav Destination
Update search
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
NARROW
Format
Collections
Topics
Subjects
Journal
Article Type
Issue Section
Date
Availability
Journal Articles
J. Vac. Sci. Technol. A 41, 063414 (2023)
Published: November 2023
Journal Articles
J. Vac. Sci. Technol. A 40, 013408 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 063208 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 062801 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 022402 (2021)
Published: January 2021
Includes: Supplementary data
Journal Articles
Janne-Petteri Niemelä, Morteza Aghaee, Wilhelmus M. M. (Erwin) Kessels, Mariadriana Creatore, Marcel A. Verheijen
J. Vac. Sci. Technol. A 37, 040602 (2019)
Published: May 2019
Includes: Supplementary data
Journal Articles
Eiji Kobayashi, Mathieu Boccard, Quentin Jeangros, Nathan Rodkey, Daniel Vresilovic, Aïcha Hessler-Wyser, Max Döbeli, Daniel Franta, Stefaan De Wolf, Monica Morales-Masis, Christophe Ballif
J. Vac. Sci. Technol. A 36, 021518 (2018)
Published: March 2018
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 35, 01B120 (2017)
Published: December 2016
Journal Articles
Richard M. Osgood, III, Stephen Giardini, Joel Carlson, Prakash Periasamy, Harvey Guthrey, Ryan O'Hayre, Matthew Chin, Barbara Nichols, Madan Dubey, Gustavo Fernandes, Jin Ho Kim, Jimmy Xu, Philip Parilla, Joseph Berry, David Ginley
J. Vac. Sci. Technol. A 34, 051514 (2016)
Published: August 2016
Journal Articles
Devender, Kelly Lofgreen, Shankar Devasenathipathy, Johanna Swan, Ravi Mahajan, Theodorian Borca-Tasciuc, Ganpati Ramanath
J. Vac. Sci. Technol. A 33, 060611 (2015)
Published: November 2015
Journal Articles
Veronika Stelmakh, Daniel Peykov, Walker R. Chan, Jay J. Senkevich, John D. Joannopoulos, Marin Soljačić, Ivan Celanovic, Robert Castillo, Kent Coulter, Ronghua Wei
J. Vac. Sci. Technol. A 33, 061204 (2015)
Published: November 2015
Journal Articles
Harkirat S. Mann, Brian N. Lang, Yosyp Schwab, Janne-Petteri Niemelä, Maarit Karppinen, Giovanna Scarel
J. Vac. Sci. Technol. A 33, 01A124 (2015)
Published: November 2014
Journal Articles
Veronika Stelmakh, Veronika Rinnerbauer, John D. Joannopoulos, Marin Soljačić, Ivan Celanovic, Jay J. Senkevich, Charles Tucker, Thomas Ives, Ronney Shrader
J. Vac. Sci. Technol. A 31, 061505 (2013)
Published: August 2013
Journal Articles
J. Vac. Sci. Technol. A 31, 050816 (2013)
Published: August 2013
Journal Articles
J. Vac. Sci. Technol. A 31, 050810 (2013)
Published: June 2013
Journal Articles
J. Vac. Sci. Technol. A 31, 050805 (2013)
Published: June 2013
Journal Articles
J. Vac. Sci. Technol. A 31, 020603 (2013)
Published: February 2013
Journal Articles
J. Vac. Sci. Technol. A 31, 01A111 (2013)
Published: October 2012
Journal Articles
X. Tang, L. A. Francis, P. Simonis, M. Haslinger, R. Delamare, O. Deschaume, D. Flandre, P. Defrance, A. M. Jonas, J. P. Vigneron, J. P. Raskin
J. Vac. Sci. Technol. A 30, 01A146 (2012)
Published: December 2011
Journal Articles
J. Vac. Sci. Technol. A 28, 1269–1274 (2010)
Published: September 2010
1