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Journal Articles

In vacuo atomic layer deposition and electron tunneling characterization of ultrathin dielectric films for metal/insulator/metal tunnel junctions

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Judy Z. Wu, Jagaran Acharya, Ryan Goul
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 040802 (2020)
https://doi.org/10.1116/1.5141078
Published: May 2020
View articletitled, In vacuo atomic layer deposition and electron tunneling characterization of ultrathin dielectric films for metal/insulator/metal tunnel junctions
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Journal Articles

Experimental demonstration of single electron transistors featuring SiO2 plasma-enhanced atomic layer deposition in Ni-SiO2-Ni tunnel junctions

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Golnaz Karbasian, Michael S. McConnell, Alexei O. Orlov, Sergei Rouvimov, Gregory L. Snider
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 01A122 (2016)
https://doi.org/10.1116/1.4935960
Published: November 2015
View articletitled, Experimental demonstration of single electron transistors featuring SiO2 plasma-enhanced atomic layer deposition in Ni-SiO2-Ni tunnel junctions
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Journal Articles

Calibration of tip and sample temperature of a scanning tunneling microscope using a superconductive sample

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Matthias Stocker, Holger Pfeifer, Berndt Koslowski
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 031605 (2014)
https://doi.org/10.1116/1.4871082
Published: April 2014
View articletitled, Calibration of tip and sample temperature of a scanning tunneling microscope using a superconductive sample
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Journal Articles

Highly transparent low capacitance plasma enhanced atomic layer deposition Al2O3-HfO2 tunnel junction engineering

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Khalil El Hajjam, Nicolas Baboux, Francis Calmon, Abdelkader Souifi, Olivier Poncelet, Laurent A. Francis, Serge Ecoffey, Dominique Drouin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 01A132 (2014)
https://doi.org/10.1116/1.4853075
Published: December 2013
View articletitled, Highly transparent low capacitance plasma enhanced atomic layer deposition Al2O3-HfO2 tunnel junction engineering
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Journal Articles

Fabrication of superconducting tantalum nitride thin films using infrared pulsed laser deposition

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Saumyadip Chaudhuri, Ilari J. Maasilta, Lucie Chandernagor, Marion Ging, Manu Lahtinen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 061502 (2013)
https://doi.org/10.1116/1.4812698
Published: July 2013
View articletitled, Fabrication of superconducting tantalum nitride thin films using infrared pulsed laser deposition
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Journal Articles

Studies of Al 2 O 3 barriers for use in tunnel junctions for nonlocal spin detection experiments

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J. Abel, J. J. Garramone, I. L. Sitnitsky, V. P. LaBella
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 702–705 (2010)
https://doi.org/10.1116/1.3386589
Published: June 2010
View articletitled, Studies of Al 2 O 3 barriers for use in tunnel junctions for nonlocal spin detection experiments
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Journal Articles

Characterization of ALD copper thin films on palladium seed layers

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Irene J. Hsu, Brian E. McCandless, Conan Weiland, Brian G. Willis
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 660–667 (2009)
https://doi.org/10.1116/1.3143663
Published: May 2009
View articletitled, Characterization of ALD copper thin films on palladium seed layers
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Journal Articles

Experimental and theoretical results of room-temperature single-electron transistor formed by the atomic force microscope nano-oxidation process

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Y. Gotoh, K. Matsumoto, T. Maeda, E. B. Cooper, S. R. Manalis, H. Fang, S. C. Minne, T. Hunt, H. Dai, J. Harris, C. F. Quate
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 1321–1325 (2000)
https://doi.org/10.1116/1.582347
Published: July 2000
View articletitled, Experimental and theoretical results of room-temperature single-electron transistor formed by the atomic force microscope nano-oxidation process
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Journal Articles

Ferromagnetic semiconductor heterostructures based on (GaMn)As

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M. Tanaka, H. Shimizu, T. Hayashi, H. Shimada, K. Ando
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 1247–1253 (2000)
https://doi.org/10.1116/1.582334
Published: July 2000
View articletitled, Ferromagnetic semiconductor heterostructures based on (GaMn)As
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Journal Articles

The use of a Si-based resist system and Ti electrode for the fabrication of sub-10 nm metal-insulator-metal tunnel junctions

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T. Wada, S. Haraichi, K. Ishii, H. Hiroshima, M. Komuro, S. M. Gorwadkar
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 16, 1430–1434 (1998)
https://doi.org/10.1116/1.581163
Published: May 1998
View articletitled, The use of a Si-based resist system and Ti electrode for the fabrication of sub-10 nm metal-insulator-metal tunnel junctions
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Journal Articles

Role of secondary electrons in hot-electron femtochemistry at surfaces using tunnel junctions

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J. W. Gadzuk
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 15, 1520–1525 (1997)
https://doi.org/10.1116/1.580573
Published: May 1997
View articletitled, Role of secondary electrons in hot-electron femtochemistry at surfaces using tunnel junctions
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Journal Articles

Conductance and leakage in superconducting tunnel junctions

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M. S. Goodchild, Z. H. Barber, M. G. Blamire
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 14, 2427–2432 (1996)
https://doi.org/10.1116/1.580031
Published: July 1996
View articletitled, Conductance and leakage in superconducting tunnel junctions
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Journal Articles

SiO2/poly‐Si electron beam resist process for nanofabrication

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T. Wada, S. Haraichi, K. Ishii, H. Hiroshima, M. Komuro, M. Hirayama
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 14, 1850–1854 (1996)
https://doi.org/10.1116/1.580348
Published: May 1996
View articletitled, SiO2/poly‐Si electron beam resist process for nanofabrication
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Journal Articles

Characterization of ultrathin sputtered SiO films on alumina by inelastic electron tunneling spectroscopy and atomic force microscopy

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R. R. Mallik, P. N. Henriksen, T. Butler, Jr., W. J. Kulnis, Jr., T. Confer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 10, 2412–2418 (1992)
https://doi.org/10.1116/1.577976
Published: July 1992
View articletitled, Characterization of ultrathin sputtered SiO films on alumina by inelastic electron tunneling spectroscopy and atomic force microscopy
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Journal Articles

Force microscopy utilizing tunnel junction control

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H. S. Kim, P. J. Bryant
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 10, 641–644 (1992)
https://doi.org/10.1116/1.577702
Published: July 1992
View articletitled, Force microscopy utilizing tunnel junction control
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Journal Articles

Tunneling spectroscopy of conductive ceramics

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Takanori Oshio, Junzo Tanaka, Akira Ono, Toshihiko Nagamura, Yasuhiko Kamizono, Yoshiyuki Sakai, Shaw Ehara
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 8, 455–458 (1990)
https://doi.org/10.1116/1.577017
Published: January 1990
View articletitled, Tunneling spectroscopy of conductive ceramics
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Journal Articles

Scanning tunneling microscopy topography of electron‐beam evaporated niobium thin films in Nb–NbOx–Pb tunnel junctions on quartz substrates

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D. G. Walmsley, R. J. Turner, H. P. Hagan, N. Garcia, A. Baro, L. Vazquez, R. Paganini
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 6, 404–407 (1988)
https://doi.org/10.1116/1.575405
Published: March 1988
View articletitled, Scanning tunneling microscopy topography of electron‐beam evaporated niobium thin films in Nb–NbOx–Pb tunnel junctions on quartz substrates
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Journal Articles

Detection of vortex motion in a type‐II superconductor by tunneling

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R. Dittrich, C. Heiden
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 6, 263–265 (1988)
https://doi.org/10.1116/1.575439
Published: March 1988
View articletitled, Detection of vortex motion in a type‐II superconductor by tunneling
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Journal Articles

Theory of tunneling in metal–superconductor devices: Supercurrents in the superconductor gap at zero temperature

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N. García, F. Flores, F. Guinea
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 6, 323–326 (1988)
https://doi.org/10.1116/1.575445
Published: March 1988
View articletitled, Theory of tunneling in metal–superconductor devices: Supercurrents in the superconductor gap at zero temperature
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Journal Articles

Scanning tunneling microscopy and optical spectrum studies of light‐emitting tunnel junctions

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D. Pappas, P. D. Sparks, H. Hopster, J. E. Rutledge
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 6, 415–418 (1988)
https://doi.org/10.1116/1.575385
Published: March 1988
View articletitled, Scanning tunneling microscopy and optical spectrum studies of light‐emitting tunnel junctions
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