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Journal Articles
J. Vac. Sci. Technol. A 43, 020801 (2025)
Published: January 2025
Journal Articles
J. Vac. Sci. Technol. A 43, 013006 (2025)
Published: January 2025
Journal Articles
J. Vac. Sci. Technol. A 42, 062410 (2024)
Published: November 2024
Journal Articles
Zaoyang Lin, Sven Dekelver, Daire Cott, Benjamin Groven, Stefanie Sergeant, Thierry Conard, Xiangyu Wu, Pierre Morin, Dennis Lin, Cesar Javier Lockhart de la Rosa, Gouri Sankar Kar, Annelies Delabie
J. Vac. Sci. Technol. A 42, 062202 (2024)
Published: October 2024
Journal Articles
Chi-Yuan Kuo, Wei-Chen Lin, Tsung-Tien Lo, Ching-Hsuan Shen, Ming-Yu Shen, Chia-Chan Lee, Chi-Ping Lin, Yuang-Ming Lin, Haw-Tyng Huang, Po-Chun Yeh, Hsin-Chu Chen, Chih-I Wu
J. Vac. Sci. Technol. A 42, 053412 (2024)
Published: August 2024
Journal Articles
Christian Miersch, Sarah Seidel, Alexander Schmid, Thomas Fuhs, Johannes Heitmann, Franziska C. Beyer
J. Vac. Sci. Technol. A 42, 022604 (2024)
Published: February 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 022601 (2024)
Published: January 2024
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 062406 (2023)
Published: October 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 053406 (2023)
Published: July 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 033002 (2023)
Published: March 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 022402 (2023)
Published: February 2023
Journal Articles
Gilles Delie, Peter M. Litwin, Gaby C. Abad, Stephen J. McDonnell, Daniele Chiappe, Valeri V. Afanasiev
J. Vac. Sci. Technol. A 40, 062201 (2022)
Published: September 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 053401 (2022)
Published: July 2022
Journal Articles
J.-F. de Marneffe, D. Marinov, A. Goodyear, P.-J. Wyndaele, N. St. J. Braithwaite, S. Kundu, I. Asselberghs, M. Cooke, S. De Gendt
J. Vac. Sci. Technol. A 40, 042602 (2022)
Published: May 2022
Journal Articles
Amorphous semi-insulating Al-doped In2O3 growth by atomic layer deposition for thin-film transistors
Zecheng Wu, Yu Zhang, Shiqiang Lu, Rongxu Bai, Na Gao, Kai Huang, Hao Zhu, Shen Hu, Qingqing Sun, David Wei Zhang, Xingwei Ding, Jack C. Lee, Li Ji
J. Vac. Sci. Technol. A 40, 042402 (2022)
Published: May 2022
Includes: Supplementary data
Journal Articles
Alexander Y. Polyakov, Vladimir I. Nikolaev, Eugene B. Yakimov, Fan Ren, Stephen J. Pearton, Jihyun Kim
J. Vac. Sci. Technol. A 40, 020804 (2022)
Published: February 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 020803 (2022)
Published: February 2022
Journal Articles
J. Vac. Sci. Technol. A 39, 063207 (2021)
Published: September 2021
Includes: Supplementary data
Journal Articles
Antony Premkumar Peter, Takayama Tomomi, Ebisudani Taishi, Shiba Eiichiro, Alfonso Sepulveda, Timothee Blanquart, Yosuke Kimura, Sujith Subramanian, Sylvain Baudot, Briggs Basoene, Anshul Gupta, Anabela Veloso, Elena Capogreco, Hans Mertens, Johan Meersschaut, Thierry Conard, Praveen Dara, Jef Geypen, Gerardo Martinez, Dmitry Batuk, Steven Demuynck, Pierre Morin
J. Vac. Sci. Technol. A 39, 042401 (2021)
Published: May 2021
Journal Articles
Daisuke Ohori, Takahiro Sawada, Kenta Sugawara, Masaya Okada, Ken Nakata, Kazutaka Inoue, Daisuke Sato, Seiji Samukawa
J. Vac. Sci. Technol. A 39, 042601 (2021)
Published: May 2021
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