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Journal Articles
J. Vac. Sci. Technol. A 42, 053207 (2024)
Published: August 2024
Journal Articles
J. Vac. Sci. Technol. A 41, 053201 (2023)
Published: July 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 023203 (2023)
Published: February 2023
Journal Articles
J. Vac. Sci. Technol. A 40, 053202 (2022)
Published: July 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 023202 (2022)
Published: January 2022
Journal Articles
Toshihide Nabatame, Erika Maeda, Mari Inoue, Masafumi Hirose, Yoshihiro Irokawa, Akihiko Ohi, Naoki Ikeda, Takashi Onaya, Koji Shiozaki, Ryota Ochi, Tamotsu Hashizume, Yasuo Koide
J. Vac. Sci. Technol. A 39, 062405 (2021)
Published: October 2021
Journal Articles
Masafumi Hirose, Toshihide Nabatame, Yoshihiro Irokawa, Erika Maeda, Akihiko Ohi, Naoki Ikeda, Liwen Sang, Yasuo Koide, Hajime Kiyono
J. Vac. Sci. Technol. A 39, 012401 (2021)
Published: December 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 062401 (2020)
Published: September 2020
Journal Articles
Spyridon Korkos, Nikolaos J. Xanthopoulos, Martha A. Botzakaki, Charalampos Drivas, Styliani Kennou, Spyridon Ladas, Anastasios Travlos, Stavroula N. Georga, Christoforos A. Krontiras
J. Vac. Sci. Technol. A 38, 032402 (2020)
Published: March 2020
Journal Articles
J. Vac. Sci. Technol. A 37, 011101 (2019)
Published: December 2018
Journal Articles
J. Vac. Sci. Technol. A 35, 061511 (2017)
Published: October 2017
Journal Articles
Hanearl Jung, Il-Kwon Oh, Seungmin Yeo, Hyungjun Kim, Su Jeong Lee, Yun Cheol Kim, Jae-Min Myoung, Soo-Hyun Kim, Jun Hyung Lim, Sunhee Lee
J. Vac. Sci. Technol. A 35, 031510 (2017)
Published: April 2017
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 35, 01B122 (2017)
Published: December 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 01A133 (2016)
Published: December 2015
Journal Articles
J. Vac. Sci. Technol. A 33, 020602 (2015)
Published: January 2015
Journal Articles
J. Vac. Sci. Technol. A 33, 021507 (2015)
Published: December 2014
Journal Articles
J. Vac. Sci. Technol. A 33, 01A118 (2015)
Published: November 2014
Journal Articles
J. Vac. Sci. Technol. A 32, 041504 (2014)
Published: May 2014
Journal Articles
J. Vac. Sci. Technol. A 32, 041501 (2014)
Published: May 2014
Journal Articles
J. Vac. Sci. Technol. A 32, 031601 (2014)
Published: March 2014
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