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Journal Articles

Improved optical efficiency of GaAs-based infrared vertical-cavity surface-emitting laser enabled by combining a metallic reflector and a Bragg reflector

In-Kyu Jang, Hyung-Joo Lee, Dae-Kwang Kim, Lee-Ku Kwac, Sung Woon Cho
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063415 (2023)
https://doi.org/10.1116/6.0002975
Published: November 2023
View article titled, Improved optical efficiency of GaAs-based infrared vertical-cavity surface-emitting laser enabled by combining a metallic reflector and a Bragg reflector
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Journal Articles

Effects of C4F8 plasma polymerization film on etching profiles in the Bosch process

Tomoyuki Nonaka, Kazuo Takahashi, Akimi Uchida, Stefan Lundgaard, Osamu Tsuji
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063004 (2023)
https://doi.org/10.1116/5.0158954
Published: October 2023
View article titled, Effects of C<sub>4</sub>F<sub>8</sub> plasma polymerization film on etching profiles in the Bosch process
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Journal Articles

Thermal transport and structural improvements due to annealing of wafer bonded β-Ga2O3|4H-SiC

Michael E. Liao, Kenny Huynh, Zhe Cheng, Jingjing Shi, Samuel Graham, Mark S. Goorsky
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063203 (2023)
https://doi.org/10.1116/6.0002693
Published: September 2023
View article titled, Thermal transport and structural improvements due to annealing of wafer bonded β-Ga<sub>2</sub>O<sub>3</sub>|4H-SiC
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Journal Articles

Extending atomic layer deposition for use in next-generation piezoMEMS: Review and perspective

Nicholas A. Strnad, Daniel M. Potrepka, Brendan M. Hanrahan, Glen R. Fox, Ronald G. Polcawich, Jeffrey S. Pulskamp, Ryan R. Knight, Ryan Q. Rudy
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 050801 (2023)
https://doi.org/10.1116/6.0002431
Published: July 2023
View article titled, Extending atomic layer deposition for use in next-generation piezoMEMS: Review and perspective
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Journal Articles

Determination of stress in thin films using micro-machined buckled membranes

Editor’s Pick
C. Malhaire, M. Granata, D. Hofman, A. Amato, V. Martinez, G. Cagnoli, A. Lemaitre, N. Shcheblanov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043401 (2023)
https://doi.org/10.1116/6.0002590
Published: May 2023
View article titled, Determination of stress in thin films using micro-machined buckled membranes
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Journal Articles

In situ diagnostics of the Si etching structures profile in ICP SF6/C4F8 plasma: Macrostructures

Editor’s Pick
Artem Osipov, Alina Gagaeva, Anastasia Speshilova, Armenak Osipov, Yakov Enns, Alexey Kazakin, Ekaterina Endiiarova, Roman Kornilov, Sergey Alexandrov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033007 (2023)
https://doi.org/10.1116/6.0002427
Published: April 2023
View article titled, <em>In situ</em> diagnostics of the Si etching structures profile in ICP SF<sub>6</sub>/C<sub>4</sub>F<sub>8</sub> plasma: Macrostructures
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Journal Articles

Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition

Oili M. E. Ylivaara, Andreas Langner, Satu Ek, Jari Malm, Jaakko Julin, Mikko Laitinen, Saima Ali, Sakari Sintonen, Harri Lipsanen, Timo Sajavaara, Riikka L. Puurunen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 062414 (2022)
https://doi.org/10.1116/6.0002095
Published: November 2022
View article titled, Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition
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Journal Articles

Plasma enhanced atomic layer deposition of textured aluminum nitride on platinized substrates for MEMS

Nicholas A. Strnad, Wendy L. Sarney, Gilbert B. Rayner, Jr., Robert R. Benoit, Glen R. Fox, Ryan Q. Rudy, Thomas J. Larrabee, Jeffrey Shallenberger, Jeffrey S. Pulskamp
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 042403 (2022)
https://doi.org/10.1116/6.0001633
Published: May 2022
View article titled, Plasma enhanced atomic layer deposition of textured aluminum nitride on platinized substrates for MEMS
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Includes: Supplementary data
Journal Articles

Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls

Editor’s Pick
Elmeri Österlund, Heli Seppänen, Kristina Bespalova, Ville Miikkulainen, Mervi Paulasto-Kröckel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 032403 (2021)
https://doi.org/10.1116/6.0000724
Published: March 2021
View article titled, Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls
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Includes: Supplementary data
Journal Articles

Suspended single-crystalline oxide structures on silicon through wet-etch techniques: Effects of oxygen vacancies and dislocations on etch rates

Zheng Hui Lim, Matthew Chrysler, Abinash Kumar, Jacob P. Mauthe, Divine P. Kumah, Chris Richardson, James M. LeBeau, Joseph H. Ngai
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 013406 (2020)
https://doi.org/10.1116/1.5135035
Published: December 2019
View article titled, Suspended single-crystalline oxide structures on silicon through wet-etch techniques: Effects of oxygen vacancies and dislocations on etch rates
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Journal Articles

Infrared absorption cross section of SiNx thin films

Sara N. DiGregorio, Scott D. Habermehl
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 013404 (2020)
https://doi.org/10.1116/1.5128359
Published: December 2019
View article titled, Infrared absorption cross section of SiN<sub>x</sub> thin films
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Includes: Supplementary data
Journal Articles

Surface energy engineering for LiTaO3 and α-quartz SiO2 for low temperature (<220 °C) wafer bonding

Brian Baker, Nicole Herbots, Shawn D. Whaley, Mohammed Sahal, Jacob Kintz, Aliya Yano, Saaketh Narayan, Alex L. Brimhall, Wey-Lyn Lee, Yuko Akabane, Robert J. Culbertson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 041101 (2019)
https://doi.org/10.1116/1.5095157
Published: July 2019
View article titled, Surface energy engineering for LiTaO<sub>3</sub> and α-quartz SiO<sub>2</sub> for low temperature (&lt;220 °C) wafer bonding
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Journal Articles

Calibration of ultra-fine helium leak rates for leak testing of microelectromechanical systems

Hajime Yoshida, Kenta Arai
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 031602 (2019)
https://doi.org/10.1116/1.5090454
Published: April 2019
View article titled, Calibration of ultra-fine helium leak rates for leak testing of microelectromechanical systems
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Journal Articles

Patterned films by atomic layer deposition using Parafilm as a mask

Chao Zhang, Jesse Kalliomäki, Markku Leskelä, Mikko Ritala
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 01B102 (2018)
https://doi.org/10.1116/1.5001033
Published: August 2017
View article titled, Patterned films by atomic layer deposition using Parafilm as a mask
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Journal Articles

XeF2 etching of epitaxial Nb2N for lift-off or micromachining of III-N materials and devices

Brian P. Downey, D. Scott Katzer, Neeraj Nepal, Matthew T. Hardy, David J. Meyer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 05C312 (2017)
https://doi.org/10.1116/1.4994400
Published: July 2017
View article titled, XeF<sub>2</sub> etching of epitaxial Nb<sub>2</sub>N for lift-off or micromachining of III-N materials and devices
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Journal Articles

Rarefied gas flow into vacuum through short tubes at variable wall temperatures

Mingxing Zhang, Christian Day, Stylianos Varoutis, Guobiao Cai
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 021604 (2017)
https://doi.org/10.1116/1.4974751
Published: January 2017
View article titled, Rarefied gas flow into vacuum through short tubes at variable wall temperatures
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Journal Articles

Experimental and simulation approach for process optimization of atomic layer deposited thin films in high aspect ratio 3D structures

Matthias C. Schwille, Timo Schössler, Jonas Barth, Martin Knaut, Florian Schön, Arnim Höchst, Martin Oettel, Johann W. Bartha
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 01B118 (2017)
https://doi.org/10.1116/1.4971196
Published: December 2016
View article titled, Experimental and simulation approach for process optimization of atomic layer deposited thin films in high aspect ratio 3D structures
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Journal Articles

Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

Oili M. E. Ylivaara, Lauri Kilpi, Xuwen Liu, Sakari Sintonen, Saima Ali, Mikko Laitinen, Jaakko Julin, Eero Haimi, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula, Helena Ronkainen, Riikka L. Puurunen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 01B105 (2017)
https://doi.org/10.1116/1.4966198
Published: November 2016
View article titled, Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties
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Journal Articles

Characterization of alkali-metal vapor cells fabricated with an alkali-metal source tablet

Kazuhiro Ban, Yoshikazu Hirai, Kazuya Tsujimoto, Akira Terao, Natsuhiko Mizutani, Tetsuo Kobayashi, Osamu Tabata
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 061601 (2016)
https://doi.org/10.1116/1.4963108
Published: September 2016
View article titled, Characterization of alkali-metal vapor cells fabricated with an alkali-metal source tablet
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Journal Articles

Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition

Maria Berdova, Xuwen Liu, Claudia Wiemer, Alessio Lamperti, Grazia Tallarida, Elena Cianci, Marco Fanciulli, Sami Franssila
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 051510 (2016)
https://doi.org/10.1116/1.4961113
Published: August 2016
View article titled, Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition
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