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Journal Articles
Aleksei Almaev, Vladimir Nikolaev, Nikita Yakovlev, Pavel Butenko, Alexander Tsymbalov, Michael Boiko, Viktor Kopyev, Vladimir Krymov, Bogdan Kushnarev, Sevastian Shapenkov, Michael Sharkov, Anton Zarichny
J. Vac. Sci. Technol. A 42, 042802 (2024)
Published: May 2024
Journal Articles
Nicolas Le Brun, Gilles Cunge, Pascal Gouraud, Camille Petit-Etienne, Linda Parmigiani, Stéphane Allegret-Maret, Denis Guiheux, Jonathan S. Steckel
J. Vac. Sci. Technol. A 42, 033007 (2024)
Published: April 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 033403 (2024)
Published: March 2024
Journal Articles
Yiyin Nie, Hongliang Lu, Shujie Jiao, Xianghu Wang, Song Yang, Dongbo Wang, Shiyong Gao, Zhendong Fu, Aimin Li, Jinzhong Wang
J. Vac. Sci. Technol. A 42, 023420 (2024)
Published: February 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 013411 (2024)
Published: January 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 013409 (2024)
Published: January 2024
Journal Articles
Cheng Liu, Nikhil Pokharel, Qinchen Lin, Miguel A. Betancourt Ponce, Jian Sun, Dominic Lane, Thomas J. De Prinse, Nelson Tansu, Padma Gopalan, Chirag Gupta, Shubhra S. Pasayat, Luke J. Mawst
J. Vac. Sci. Technol. A 41, 062705 (2023)
Published: November 2023
Journal Articles
J. Vac. Sci. Technol. A 40, 063405 (2022)
Published: November 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 062702 (2022)
Published: October 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 032203 (2022)
Published: April 2022
Journal Articles
Alexander Y. Polyakov, Vladimir I. Nikolaev, Eugene B. Yakimov, Fan Ren, Stephen J. Pearton, Jihyun Kim
J. Vac. Sci. Technol. A 40, 020804 (2022)
Published: February 2022
Journal Articles
J. Vac. Sci. Technol. A 39, 063202 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 053412 (2021)
Published: August 2021
Includes: Supplementary data
Journal Articles
Emanuel Knehr, Mario Ziegler, Sven Linzen, Konstantin Ilin, Patrick Schanz, Jonathan Plentz, Marco Diegel, Heidemarie Schmidt, Evgeni Il’ichev, Michael Siegel
J. Vac. Sci. Technol. A 39, 052401 (2021)
Published: July 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 043415 (2021)
Published: June 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 032802 (2021)
Published: May 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 033410 (2021)
Published: April 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 030803 (2021)
Published: April 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 020804 (2021)
Published: February 2021
Journal Articles
J. Vac. Sci. Technol. A 38, 052202 (2020)
Published: August 2020
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