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Journal Articles

Production of a high-density hydrogen plasma in a capacitively coupled RF discharge with a hollow cathode enclosed by magnets

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Yasunori Ohtsu, Takeshi Uchida, Ryohei Kuno, Julian Schulze
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033011 (2024)
https://doi.org/10.1116/6.0003448
Published: April 2024
View article titled, Production of a high-density hydrogen plasma in a capacitively coupled RF discharge with a hollow cathode enclosed by magnets
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Journal Articles

Effects of atmospheric-pressure discharge type on ionic wind velocity for needle-to-cylinder electrode

Hua Li, Chaoqun Guo, Yukai Li, Xialei Hong, Jianmin Zhu, Zhencheng Chen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 031308 (2016)
https://doi.org/10.1116/1.4947073
Published: April 2016
View article titled, Effects of atmospheric-pressure discharge type on ionic wind velocity for needle-to-cylinder electrode
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Journal Articles

Measurement of spatial and temporal evolution of electromagnetic fields in a 100 MHz plasma source using B dot and double dipole probes

Barton Lane, Colin Campbell, Ikuo Sawada, Peter L. G. Ventzek
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 031302 (2016)
https://doi.org/10.1116/1.4943586
Published: March 2016
View article titled, Measurement of spatial and temporal evolution of electromagnetic fields in a 100 MHz plasma source using B dot and double dipole probes
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Journal Articles

High power pulsed magnetron sputtering: A method to increase deposition rate

Priya Raman, Ivan A. Shchelkanov, Jake McLain, David N Ruzic
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 031304 (2015)
https://doi.org/10.1116/1.4916108
Published: March 2015
View article titled, High power pulsed magnetron sputtering: A method to increase deposition rate
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Journal Articles

Characterizing low-frequency oscillation of Hall thrusters by dielectric wall temperature variation

Guo Ning, Wei Liqiu, Ding Yongjie
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 030604 (2014)
https://doi.org/10.1116/1.4869284
Published: March 2014
View article titled, Characterizing low-frequency oscillation of Hall thrusters by dielectric wall temperature variation
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Journal Articles

Electron depletion via cathode spot dispersion of dielectric powder into an overhead plasma

Eric D. Gillman, John E. Foster
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 061303 (2013)
https://doi.org/10.1116/1.4817753
Published: August 2013
View article titled, Electron depletion via cathode spot dispersion of dielectric powder into an overhead plasma
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Journal Articles

Effect of the cathode on the 3D plume distribution of a Hall thruster

Wei Liqiu, Liang Wei, Fan Jinrui, Zhang Chaohai, Zhao Yequan, Yu Daren
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 051304 (2012)
https://doi.org/10.1116/1.4739422
Published: July 2012
View article titled, Effect of the cathode on the 3D plume distribution of a Hall thruster
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Journal Articles

Spatially resolved measurements of ion density and electron temperature in a dual-frequency capacitively coupled plasma by complete floating double probe technique

Xiang-Zhan Jiang, Yong-Xin Liu, Shuo Yang, Wen-Qi Lu, Zhen-Hua Bi, Xiao-Song Li, You-Nian Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 29, 011006 (2011)
https://doi.org/10.1116/1.3520644
Published: January 2011
View article titled, Spatially resolved measurements of ion density and electron temperature in a dual-frequency capacitively coupled plasma by complete floating double probe technique
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Journal Articles

On the frequency characteristic of inductor in the filter of Hall thrusters

Wei Liqiu, Ning Zhongxi, E. Peng, Yu Daren
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, L9–L13 (2010)
https://doi.org/10.1116/1.3457152
Published: August 2010
View article titled, On the frequency characteristic of inductor in the filter of Hall thrusters
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Journal Articles

Voltage oxide removal for plating: A new method of electroplating oxide coated metals in situ

R. J. von Gutfeld, A. C. West
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 319–323 (2007)
https://doi.org/10.1116/1.2539356
Published: February 2007
View article titled, Voltage oxide removal for plating: A new method of electroplating oxide coated metals <em>in situ</em>
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Journal Articles

Real-time, noninvasive monitoring of ion energy and ion current at a wafer surface during plasma etching

Mark A. Sobolewski
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1892–1905 (2006)
https://doi.org/10.1116/1.2335862
Published: August 2006
View article titled, Real-time, noninvasive monitoring of ion energy and ion current at a wafer surface during plasma etching
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Journal Articles

Effects of pulsing parameters on production and distribution of macroparticles in cathodic vacuum arc deposition

Yawei Hu, Liuhe Li, Hua Dai, Xiaoling Li, Xun Cai, Paul K. Chu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 957–961 (2006)
https://doi.org/10.1116/1.2201046
Published: May 2006
View article titled, Effects of pulsing parameters on production and distribution of macroparticles in cathodic vacuum arc deposition
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Journal Articles

Very low-voltage operation capability of complementary metal-oxide-semiconductor ring oscillators and logic gates

M. Jamal Deen, Sasan Naseh, Ognian Marinov, Mehdi H. Kazemeini
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 763–769 (2006)
https://doi.org/10.1116/1.2167973
Published: May 2006
View article titled, Very low-voltage operation capability of complementary metal-oxide-semiconductor ring oscillators and logic gates
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Journal Articles

Real time quantitative diagnostic technique for measuring chemical vapor deposition precursors

Ju-Young Yun, Kwang-Hwa Chung, Doo-Kyung Moon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 1267–1269 (2005)
https://doi.org/10.1116/1.1913681
Published: June 2005
View article titled, Real time quantitative diagnostic technique for measuring chemical vapor deposition precursors
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Journal Articles

Characterization of a plasma produced by pulsed arc using an electrostatic double probe

L. A. García, A. O. Pulzara, A. Devia, E. Restrepo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 551–553 (2005)
https://doi.org/10.1116/1.1901666
Published: April 2005
View article titled, Characterization of a plasma produced by pulsed arc using an electrostatic double probe
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Journal Articles

Two-dimensional spatial survey of the plasma potential and electric field in a pulsed bipolar magnetron discharge

A. Vetushka, S. K. Karkari, J. W. Bradley
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 2459–2468 (2004)
https://doi.org/10.1116/1.1810167
Published: October 2004
View article titled, Two-dimensional spatial survey of the plasma potential and electric field in a pulsed bipolar magnetron discharge
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Journal Articles

Advances in broadband radio-frequency sensing for real-time control of plasma-based semiconductor processing

Craig Garvin, Dennis S. Grimard, J. W. Grizzle
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 17, 1377–1383 (1999)
https://doi.org/10.1116/1.581823
Published: July 1999
View article titled, Advances in broadband radio-frequency sensing for real-time control of plasma-based semiconductor processing
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Journal Articles

Plasma impedance and microwave interferometric measurements of electron concentrations in dual‐frequency powered sulfur hexafluoride plasmas

V. C. Jaiprakash, B. E. Thompson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 12, 1403–1407 (1994)
https://doi.org/10.1116/1.579328
Published: July 1994
View article titled, Plasma impedance and microwave interferometric measurements of electron concentrations in dual‐frequency powered sulfur hexafluoride plasmas
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Journal Articles

Imaging bacteriorhodopsin lattices in purple membranes with atomic force microscopy

D. L. Worcester, H. S. Kim, R. G. Miller, P. J. Bryant
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 8, 403–405 (1990)
https://doi.org/10.1116/1.576407
Published: January 1990
View article titled, Imaging bacteriorhodopsin lattices in purple membranes with atomic force microscopy
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