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Journal Articles
J. Vac. Sci. Technol. A 41, 063415 (2023)
Published: November 2023
Journal Articles
Ziyi Hu, Hua Shao, Junjie Li, Panpan Lai, Wenrui Wang, Chen Li, Qi Yan, Xiaobin He, Junfeng Li, Tao Yang, Rui Chen, Yayi Wei
J. Vac. Sci. Technol. A 41, 063113 (2023)
Published: November 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 063004 (2023)
Published: October 2023
Journal Articles
Azmain A. Hossain, Haozhe Wang, David S. Catherall, Martin Leung, Harm C. M. Knoops, James R. Renzas, Austin J. Minnich
J. Vac. Sci. Technol. A 41, 062601 (2023)
Published: September 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 063203 (2023)
Published: September 2023
Journal Articles
Nickolas Ashburn, Xiuyao Lang, Sumeet Pandey, Steven Wolf, Steve Kramer, John Smythe, Gurtej Sandhu, Charles Winter, Andrew C. Kummel, Kyeongjae Cho
J. Vac. Sci. Technol. A 41, 052403 (2023)
Published: August 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 053002 (2023)
Published: July 2023
Journal Articles
Nicholas A. Strnad, Daniel M. Potrepka, Brendan M. Hanrahan, Glen R. Fox, Ronald G. Polcawich, Jeffrey S. Pulskamp, Ryan R. Knight, Ryan Q. Rudy
J. Vac. Sci. Technol. A 41, 050801 (2023)
Published: July 2023
Journal Articles
William A. Callahan, Edwin Supple, David Ginley, Michael Sanders, Brian P. Gorman, Ryan O’Hayre, Andriy Zakutayev
J. Vac. Sci. Technol. A 41, 043211 (2023)
Published: June 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 043401 (2023)
Published: May 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 033407 (2023)
Published: April 2023
Includes: Supplementary data
Journal Articles
Artem Osipov, Alina Gagaeva, Anastasia Speshilova, Armenak Osipov, Yakov Enns, Alexey Kazakin, Ekaterina Endiiarova, Roman Kornilov, Sergey Alexandrov
J. Vac. Sci. Technol. A 41, 033007 (2023)
Published: April 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 023408 (2023)
Published: February 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 023001 (2023)
Published: February 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 013006 (2023)
Published: December 2022
Journal Articles
Oili M. E. Ylivaara, Andreas Langner, Satu Ek, Jari Malm, Jaakko Julin, Mikko Laitinen, Saima Ali, Sakari Sintonen, Harri Lipsanen, Timo Sajavaara, Riikka L. Puurunen
J. Vac. Sci. Technol. A 40, 062414 (2022)
Published: November 2022
Journal Articles
Yao Du, Florian Krüger, Sang Ki Nam, Hoki Lee, Suyoung Yoo, Jacob Eapen, Mark J. Kushner, Steven Shannon
J. Vac. Sci. Technol. A 40, 053007 (2022)
Published: September 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 041602 (2022)
Published: June 2022
Journal Articles
Nicholas A. Strnad, Wendy L. Sarney, Gilbert B. Rayner, Jr., Robert R. Benoit, Glen R. Fox, Ryan Q. Rudy, Thomas J. Larrabee, Jeffrey Shallenberger, Jeffrey S. Pulskamp
J. Vac. Sci. Technol. A 40, 042403 (2022)
Published: May 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 033206 (2022)
Published: April 2022
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