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Journal Articles
J. Vac. Sci. Technol. A 43, 033105 (2025)
Published: April 2025
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J. Vac. Sci. Technol. A 43, 032405 (2025)
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J. Vac. Sci. Technol. A 43, 030801 (2025)
Published: March 2025
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J. Vac. Sci. Technol. A 43, 033001 (2025)
Published: March 2025
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J. Vac. Sci. Technol. A 43, 023005 (2025)
Published: February 2025
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J. Vac. Sci. Technol. A 43, 023003 (2025)
Published: February 2025
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J. Vac. Sci. Technol. A 43, 020801 (2025)
Published: January 2025
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Yudong Li, Hubertus Marbach, Christian Preischl, Michael Budach, Daniel Rhinow, Klaus Edinger, Gottlieb S. Oehrlein
J. Vac. Sci. Technol. A 43, 013004 (2025)
Published: January 2025
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J. Vac. Sci. Technol. A 43, 012401 (2025)
Published: December 2024
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J. Vac. Sci. Technol. A 43, 013002 (2025)
Published: December 2024
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V. S. Santosh K. Kondeti, Shurik Yatom, Ivan Romadanov, Yevgeny Raitses, Leonid Dorf, Andrei Khomenko
J. Vac. Sci. Technol. A 42, 063005 (2024)
Published: November 2024
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Ajay Ravi, Long Viet Than, Jacqueline Lewis, Jingwei Shi, Andreas Werbrouck, Jingyi Han, Miika Mattinen, Stacey F. Bent
J. Vac. Sci. Technol. A 42, 062407 (2024)
Published: November 2024
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J. Vac. Sci. Technol. A 42, 063405 (2024)
Published: October 2024
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Chi-Yuan Kuo, Wei-Chen Lin, Tsung-Tien Lo, Ching-Hsuan Shen, Ming-Yu Shen, Chia-Chan Lee, Chi-Ping Lin, Yuang-Ming Lin, Haw-Tyng Huang, Po-Chun Yeh, Hsin-Chu Chen, Chih-I Wu
J. Vac. Sci. Technol. A 42, 053412 (2024)
Published: August 2024
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J. Vac. Sci. Technol. A 42, 052603 (2024)
Published: August 2024
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J. Vac. Sci. Technol. A 42, 033009 (2024)
Published: April 2024
Includes: Supplementary data
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Rosemary Jones, Giulio D’Acunto, Payam Shayesteh, Indiana Pinsard, François Rochet, Fabrice Bournel, Jean-Jacques Gallet, Ashley Head, Joachim Schnadt
J. Vac. Sci. Technol. A 42, 022404 (2024)
Published: February 2024
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 42, 013205 (2024)
Published: January 2024
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 063415 (2023)
Published: November 2023
Journal Articles
Ziyi Hu, Hua Shao, Junjie Li, Panpan Lai, Wenrui Wang, Chen Li, Qi Yan, Xiaobin He, Junfeng Li, Tao Yang, Rui Chen, Yayi Wei
J. Vac. Sci. Technol. A 41, 063113 (2023)
Published: November 2023
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