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Journal Articles

Ultrahigh density InGaN/GaN nanopyramid quantum dots for visible emissions with high quantum efficiency

Cheng Liu, Nikhil Pokharel, Qinchen Lin, Miguel A. Betancourt Ponce, Jian Sun, Dominic Lane, Thomas J. De Prinse, Nelson Tansu, Padma Gopalan, Chirag Gupta, Shubhra S. Pasayat, Luke J. Mawst

J. Vac. Sci. Technol. A 41, 062705 (2023)

https://doi.org/10.1116/6.0002997

Published: November 2023

View article titled, Ultrahigh density InGaN/GaN nanopyramid quantum dots for visible emissions with high quantum efficiency

Journal Articles

Deep UV AlGaN LED reliability for long duration space missions

Benjamin C. Letson, Simon Barke, Peter Wass, Guido Mueller, Fan Ren, Stephen J. Pearton, John W. Conklin

J. Vac. Sci. Technol. A 41, 013202 (2023)

https://doi.org/10.1116/6.0002199

Published: December 2022

View article titled, Deep UV AlGaN LED reliability for long duration space missions

Journal Articles

Homogeneous high In content In_xGa_1−x N films by supercycle atomic layer deposition

Chih-Wei Hsu, Ivan Martinovic, Roger Magnusson, Babak Bakhit, Justinas Palisaitis, Per. O. Å. Persson, Polla Rouf, Henrik Pedersen

J. Vac. Sci. Technol. A 40, 060402 (2022)

https://doi.org/10.1116/6.0002079

Published: November 2022

View article titled, Homogeneous high In content InxGa1−x N films by supercycle atomic layer deposition

Includes: Supplementary data

Journal Articles

Vapor deposition of CsPbBr₃ thin films by evaporation of CsBr and PbBr₂

Iver J. Cleveland, Minh N. Tran, Anamika Dey, Eray S. Aydil

J. Vac. Sci. Technol. A 39, 043415 (2021)

https://doi.org/10.1116/6.0000875

Published: June 2021

View article titled, Vapor deposition of CsPbBr3 thin films by evaporation of CsBr and PbBr2

Includes: Supplementary data

Journal Articles

Effects of electrochemical potentiostatic activation on carrier transport in AlGaN-based deep-ultraviolet light-emitting diodes

Dong Yeong Kim, Hyunwoong Kang, Koh Eun Lee, Rak Jun Choi, June Key Lee, Jaehee Cho

J. Vac. Sci. Technol. A 39, 023410 (2021)

https://doi.org/10.1116/6.0000827

Published: February 2021

View article titled, Effects of electrochemical potentiostatic activation on carrier transport in AlGaN-based deep-ultraviolet light-emitting diodes

Includes: Supplementary data

Journal Articles

Comparative study of two atomic layer etching processes for GaN

Cédric Mannequin, Christophe Vallée, Katsuhiro Akimoto, Thierry Chevolleau, Christophe Durand, Christian Dussarrat, Takashi Teramoto, Etienne Gheeraert, Henri Mariette

J. Vac. Sci. Technol. A 38, 032602 (2020)

https://doi.org/10.1116/1.5134130

Published: March 2020

View article titled, Comparative study of two atomic layer etching processes for GaN

Includes: Supplementary data

Journal Articles

Flexible Al₂O₃/plasma polymer multilayer moisture barrier films deposited by a spatial atomic layer deposition process

Sun Jung Kim, Sang Heon Yong, You Jin Choi, Hyeok Hwangbo, Woo-Young Yang, Heeyeop Chae

J. Vac. Sci. Technol. A 38, 022418 (2020)

https://doi.org/10.1116/1.5130727

Published: February 2020

View article titled, Flexible Al2O3/plasma polymer multilayer moisture barrier films deposited by a spatial atomic layer deposition process

Journal Articles

Crystallographic orientation and layer impurities in two-dimensional metal halide perovskite thin films

Alexander Z. Chen, Joshua J. Choi

J. Vac. Sci. Technol. A 38, 010801 (2020)

https://doi.org/10.1116/1.5126738

Published: December 2019

View article titled, Crystallographic orientation and layer impurities in two-dimensional metal halide perovskite thin films

Journal Articles

Structural defects of GaN deposited on (111) Si with Gd₂O₃-related buffer layers

Ko-Ying Lo, Pei-Hsin Lin, Hung-Jung Chen, Jyh-Rong Gong, Hsun-Feng Hsu, Yu-Wei Lee, Wei-Li Chen

J. Vac. Sci. Technol. A 35, 061513 (2017)

https://doi.org/10.1116/1.5000986

Published: October 2017

View article titled, Structural defects of GaN deposited on (111) Si with Gd2O3-related buffer layers

Journal Articles

Metalorganic chemical vapor deposition-regrown Ga-rich InGaP films on SiGe virtual substrates for Si-based III-V optoelectronic device applications

TaeWan Kim, Bing Wang, Cong Wang, David A. Kohen, Jeong Woo Hwang, Jae Cheol Shin, Sang-Woo Kang, Jürgen Michel

J. Vac. Sci. Technol. A 35, 031507 (2017)

https://doi.org/10.1116/1.4979272

Published: March 2017

View article titled, Metalorganic chemical vapor deposition-regrown Ga-rich InGaP films on SiGe virtual substrates for Si-based III-V optoelectronic device applications

Journal Articles

Defect analysis in low temperature atomic layer deposited Al₂O₃ and physical vapor deposited SiO barrier films and combination of both to achieve high quality moisture barriers

Tony Maindron, Tony Jullien, Agathe André

J. Vac. Sci. Technol. A 34, 031513 (2016)

https://doi.org/10.1116/1.4947289

Published: May 2016

View article titled, Defect analysis in low temperature atomic layer deposited Al2O3 and physical vapor deposited SiO barrier films and combination of both to achieve high quality moisture barriers

Journal Articles

Influence of PEDOT:PSS on the effectiveness of barrier layers prepared by atomic layer deposition in organic light emitting diodes

Barbara Wegler, Oliver Schmidt, Bernhard Hensel

J. Vac. Sci. Technol. A 33, 01A147 (2015)

https://doi.org/10.1116/1.4904500

Published: December 2014

View article titled, Influence of PEDOT:PSS on the effectiveness of barrier layers prepared by atomic layer deposition in organic light emitting diodes

Journal Articles

Characterization of ZnO film grown on polycarbonate by atomic layer deposition at low temperature

Gyeong Beom Lee, Gwon Deok Han, Joon Hyung Shim, Byoung-Ho Choi

J. Vac. Sci. Technol. A 33, 01A134 (2015)

https://doi.org/10.1116/1.4903270

Published: December 2014

View article titled, Characterization of ZnO film grown on polycarbonate by atomic layer deposition at low temperature

Journal Articles

Roll-to-roll atomic layer deposition process for flexible electronics encapsulation applications

Philipp S. Maydannik, Tommi O. Kääriäinen, Kimmo Lahtinen, David C. Cameron, Mikko Söderlund, Pekka Soininen, Petri Johansson, Jurkka Kuusipalo, Lorenza Moro, Xianghui Zeng

J. Vac. Sci. Technol. A 32, 051603 (2014)

https://doi.org/10.1116/1.4893428

Published: August 2014

View article titled, Roll-to-roll atomic layer deposition process for flexible electronics encapsulation applications

Journal Articles

Improvement in mechanical and barrier properties of polyethylene blown films using atomic layer deposition

Gyeong Beom Lee, Seung Hak Song, Sung Wook Moon, Jun Woo Kim, Joon Hyung Shim, Byoung-Ho Choi, Young Moo Heo

J. Vac. Sci. Technol. A 32, 01A126 (2014)

https://doi.org/10.1116/1.4849075

Published: December 2013

View article titled, Improvement in mechanical and barrier properties of polyethylene blown films using atomic layer deposition

Journal Articles

Investigation of nanostructured transparent conductive films grown by rotational-sequential-sputtering

Jong-Hong Lu, Bo-Ying Chen, Chih-Hsuan Wang

J. Vac. Sci. Technol. A 32, 02B107 (2014)

https://doi.org/10.1116/1.4846155

Published: December 2013

View article titled, Investigation of nanostructured transparent conductive films grown by rotational-sequential-sputtering

Journal Articles

Perspectives on future directions in III-N semiconductor research

Charles R. Eddy, Jr., Neeraj Nepal, Jennifer K. Hite, Michael A. Mastro

J. Vac. Sci. Technol. A 31, 058501 (2013)

https://doi.org/10.1116/1.4813687

Published: July 2013

View article titled, Perspectives on future directions in III-N semiconductor research

Journal Articles

InGaN light-emitting diodes: Efficiency-limiting processes at high injection

Vitaliy Avrutin, Shopan din Ahmad Hafiz, Fan Zhang, Ümit Özgür, Hadis Morkoç, Arvidas Matulionis

J. Vac. Sci. Technol. A 31, 050809 (2013)

https://doi.org/10.1116/1.4810789

Published: June 2013

View article titled, InGaN light-emitting diodes: Efficiency-limiting processes at high injection

Journal Articles

Electron-injecting properties of Rb₂CO₃-doped Alq₃ thin films in organic light-emitting diodes

Jin Woo Park, Jong Tae Lim, Jong Sik Oh, Sung Hee Kim, Phuong Pham Viet, Myung S. Jhon, Geun Young Yeom

J. Vac. Sci. Technol. A 31, 031101 (2013)

https://doi.org/10.1116/1.4798302

Published: April 2013

View article titled, Electron-injecting properties of Rb2CO3-doped Alq3 thin films in organic light-emitting diodes

Journal Articles

GaN-based light-emitting diodes by laser lift-off with micro- and nano-sized reflectors

Younghun Jung, Sung Hyun Kim, Jihyun Kim, Xiaotie Wang, Fan Ren, Kyoung Jin Choi, Stephen J. Pearton

J. Vac. Sci. Technol. A 30, 050605 (2012)

https://doi.org/10.1116/1.4739769

Published: August 2012

View article titled, GaN-based light-emitting diodes by laser lift-off with micro- and nano-sized reflectors

NARROW

Topics

Ultrahigh density InGaN/GaN nanopyramid quantum dots for visible emissions with high quantum efficiency

Deep UV AlGaN LED reliability for long duration space missions

Homogeneous high In content In_xGa_1−x N films by supercycle atomic layer deposition

Vapor deposition of CsPbBr₃ thin films by evaporation of CsBr and PbBr₂

Effects of electrochemical potentiostatic activation on carrier transport in AlGaN-based deep-ultraviolet light-emitting diodes

Comparative study of two atomic layer etching processes for GaN

Flexible Al₂O₃/plasma polymer multilayer moisture barrier films deposited by a spatial atomic layer deposition process

Crystallographic orientation and layer impurities in two-dimensional metal halide perovskite thin films

Structural defects of GaN deposited on (111) Si with Gd₂O₃-related buffer layers

Metalorganic chemical vapor deposition-regrown Ga-rich InGaP films on SiGe virtual substrates for Si-based III-V optoelectronic device applications

Defect analysis in low temperature atomic layer deposited Al₂O₃ and physical vapor deposited SiO barrier films and combination of both to achieve high quality moisture barriers

Influence of PEDOT:PSS on the effectiveness of barrier layers prepared by atomic layer deposition in organic light emitting diodes

Characterization of ZnO film grown on polycarbonate by atomic layer deposition at low temperature

Roll-to-roll atomic layer deposition process for flexible electronics encapsulation applications

Improvement in mechanical and barrier properties of polyethylene blown films using atomic layer deposition

Investigation of nanostructured transparent conductive films grown by rotational-sequential-sputtering

Perspectives on future directions in III-N semiconductor research

InGaN light-emitting diodes: Efficiency-limiting processes at high injection

Electron-injecting properties of Rb₂CO₃-doped Alq₃ thin films in organic light-emitting diodes

GaN-based light-emitting diodes by laser lift-off with micro- and nano-sized reflectors

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