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Journal Articles

OrbiSIMS depth profiling of semiconductor materials—Useful yield and depth resolution

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Yundong Zhou, Alexis Franquet, Valentina Spampinato, Alex Merkulov, Michael R. Keenan, Paul A. W. van der Heide, Gustavo F. Trindade, Wilfried Vandervorst, Ian S. Gilmore
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053208 (2024)
https://doi.org/10.1116/6.0003821
Published: September 2024
View article titled, OrbiSIMS depth profiling of semiconductor materials—Useful yield and depth resolution
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Journal Articles

Method to compensate radiation-induced errors in a hot-cathode-ionization gauge with correcting electrode

Hiroshi Saeki, Tamotsu Magome
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 29, 061601 (2011)
https://doi.org/10.1116/1.3645599
Published: October 2011
View article titled, Method to compensate radiation-induced errors in a hot-cathode-ionization gauge with correcting electrode
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Journal Articles

Bent belt-beam gauge: Extending low-pressure measurement limits in a hot-cathode ionization vacuum gauge by combining multiple methods

Fumio Watanabe
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 486–494 (2010)
https://doi.org/10.1116/1.3400233
Published: April 2010
View article titled, Bent belt-beam gauge: Extending low-pressure measurement limits in a hot-cathode ionization vacuum gauge by combining multiple methods
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Journal Articles

Performance of a hot-cathode-ionization-gauge head with correcting electrode and shield tube, operated with an automated-pressure-compensating circuit in a synchrotron radiation environment

Hiroshi Saeki, Tamotsu Magome, Yoshihiko Shoji
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1148–1150 (2006)
https://doi.org/10.1116/1.2208992
Published: June 2006
View article titled, Performance of a hot-cathode-ionization-gauge head with correcting electrode and shield tube, operated with an automated-pressure-compensating circuit in a synchrotron radiation environment
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Journal Articles

Axial-symmetric transmission gauge: Extension of its pressure measuring range and reduction of the electron stimulated desorption ion effect in ultrahigh vacuum

N. Takahashi, J. Yuyama, Y. Tuzi, H. Akimichi, I. Arakawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 554–558 (2005)
https://doi.org/10.1116/1.1901668
Published: April 2005
View article titled, Axial-symmetric transmission gauge: Extension of its pressure measuring range and reduction of the electron stimulated desorption ion effect in ultrahigh vacuum
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Journal Articles

Detection of quasimolecular ion of Cu(hfac)(tmvs) by ion attachment mass spectrometry

Megumi Nakamura, Yoshiro Shiokawa, Toshihiro Fujii, Masao Takayanagi, Munetaka Nakata
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 2347–2350 (2004)
https://doi.org/10.1116/1.1798751
Published: October 2004
View article titled, Detection of quasimolecular ion of Cu(hfac)(tmvs) by ion attachment mass spectrometry
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Journal Articles

Pressure-measurement errors in a cold-cathode-ionization gauge caused by an external-electron source

Hiroshi Saeki, Tamotsu Magome, Yoshihiko Shoji, Takashi Momose
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 2212–2215 (2004)
https://doi.org/10.1116/1.1781184
Published: September 2004
View article titled, Pressure-measurement errors in a cold-cathode-ionization gauge caused by an external-electron source
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Journal Articles

Quantum-dot cellular automata

G. L. Snider, A. O. Orlov, I. Amlani, X. Zuo, G. H. Bernstein, C. S. Lent, J. L. Merz, W. Porod
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 17, 1394–1398 (1999)
https://doi.org/10.1116/1.581826
Published: July 1999
View article titled, Quantum-dot cellular automata
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Journal Articles

Techniques for measuring mass spectrometer performance parameters

James A. Basford
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 9, 1991–1995 (1991)
https://doi.org/10.1116/1.577441
Published: May 1991
View article titled, Techniques for measuring mass spectrometer performance parameters
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Journal Articles

Process monitoring of tritium concentration

R. E. Ellefson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 1, 865–868 (1983)
https://doi.org/10.1116/1.572011
Published: April 1983
View article titled, Process monitoring of tritium concentration
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