1-8 of 8
Digital circuits
Close
Save search
Follow your search
Access your saved searches in your account
Close Modal
Sort by
Journal Articles

Applying sputtering theory to directional atomic layer etching

Ivan L. Berry, Keren J. Kanarik, Thorsten Lill, Samantha Tan, Vahid Vahedi, Richard A. Gottscho
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 01B105 (2018)
https://doi.org/10.1116/1.5003393
Published: December 2017
View article titled, Applying sputtering theory to directional atomic layer etching
Open the PDF for Applying sputtering theory to directional atomic layer etching in another window
Journal Articles

Very low-voltage operation capability of complementary metal-oxide-semiconductor ring oscillators and logic gates

M. Jamal Deen, Sasan Naseh, Ognian Marinov, Mehdi H. Kazemeini
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 763–769 (2006)
https://doi.org/10.1116/1.2167973
Published: May 2006
View article titled, Very low-voltage operation capability of complementary metal-oxide-semiconductor ring oscillators and logic gates
Open the PDF for Very low-voltage operation capability of complementary metal-oxide-semiconductor ring oscillators and logic gates in another window
Journal Articles

Speed-controlled particle injection into a low-pressure system

Jung Hyeun Kim, Heinz Fissan, Christof Asbach, Se-Jin Yook, David Y. H. Pui
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 229–234 (2006)
https://doi.org/10.1116/1.2165660
Published: February 2006
View article titled, Speed-controlled particle injection into a low-pressure system
Open the PDF for Speed-controlled particle injection into a low-pressure system in another window
Journal Articles

Design of multiplexer in amorphous silicon technology

N. Mohan, K. S. Karim, A. Nathan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 1043–1047 (2002)
https://doi.org/10.1116/1.1474413
Published: May 2002
View article titled, Design of multiplexer in amorphous silicon technology
Open the PDF for Design of multiplexer in amorphous silicon technology in another window
Journal Articles

Hybrid ferromagnet–semiconductor devices

Mark Johnson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 16, 1806–1811 (1998)
https://doi.org/10.1116/1.581111
Published: May 1998
View article titled, Hybrid ferromagnet–semiconductor devices
Open the PDF for Hybrid ferromagnet–semiconductor devices in another window
Journal Articles

Total reflection x‐ray fluorescence analysis of planarized semiconductor product wafers

M. A. Lavoie, E. D. Adams, G. L. Miles
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 14, 1924–1926 (1996)
https://doi.org/10.1116/1.580361
Published: May 1996
View article titled, Total reflection x‐ray fluorescence analysis of planarized semiconductor product wafers
Open the PDF for Total reflection x‐ray fluorescence analysis of planarized semiconductor product wafers in another window
Journal Articles

Simple, inexpensive delay circuit for protection against vacuum loss from power interruptions

J. A. Polta, P. A. Thiel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 5, 386–387 (1987)
https://doi.org/10.1116/1.574167
Published: May 1987
View article titled, Simple, inexpensive delay circuit for protection against vacuum loss from power interruptions
Open the PDF for Simple, inexpensive delay circuit for protection against vacuum loss from power interruptions in another window
Journal Articles

High‐end computer packaging—VLSI scaling and materials science

W. D. Grobman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 3, 725–731 (1985)
https://doi.org/10.1116/1.573296
Published: May 1985
View article titled, High‐end computer packaging—VLSI scaling and materials science
Open the PDF for High‐end computer packaging—VLSI scaling and materials science in another window