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Journal Articles
J. Vac. Sci. Technol. A 24, 763–769 (2006)
Published: May 2006
Journal Articles
J. Vac. Sci. Technol. A 20, 1043–1047 (2002)
Published: May 2002
Journal Articles
J. Vac. Sci. Technol. A 16, 1806–1811 (1998)
Published: May 1998