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Journal Articles

MoS2-assisted growth of highly-oriented AlN thin films by low-temperature van der Waals epitaxy

Editor’s PickAvailable to Purchase
J. Patouillard, M. Bernard, S. Cadot, R. Gassilloud, N. Bernier, A. Grenier, A. Mantoux, E. Blanquet, F. Martin, C. Raynaud, F. Gianesello
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 050401 (2024)
https://doi.org/10.1116/6.0003652
Published: July 2024
View articletitled, MoS2-assisted growth of highly-oriented AlN thin films by low-temperature van der Waals epitaxy
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Journal Articles

Influence of spraying power on microstructure and wear resistance of plasma spray Ni-10 wt. %Al coatings with a sound vibration

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Jichun Wang, Haibo Wang, Xunxun Mu, Xixi Ma, Jiaming Qian, Pengfei Gao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043102 (2024)
https://doi.org/10.1116/6.0003604
Published: May 2024
View articletitled, Influence of spraying power on microstructure and wear resistance of plasma spray Ni-10 wt. %Al coatings with a sound vibration
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Journal Articles

Design of a custom vapor transport co-deposition system for scalable production of perovskite solar cells

Editor’s PickOpen Access
Ella Wassweiler, Anurag Panda, Tamar Kadosh, Thienan Nguyen, Wan-Ju Hsu, Emma Pettit, Russell J. Holmes, Harry Tuller, Vladimir Bulovic
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052801 (2023)
https://doi.org/10.1116/6.0002668
Published: July 2023
View articletitled, Design of a custom vapor transport co-deposition system for scalable production of perovskite solar cells
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Includes: Supplementary data
Journal Articles

Extending atomic layer deposition for use in next-generation piezoMEMS: Review and perspective

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Nicholas A. Strnad, Daniel M. Potrepka, Brendan M. Hanrahan, Glen R. Fox, Ronald G. Polcawich, Jeffrey S. Pulskamp, Ryan R. Knight, Ryan Q. Rudy
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 050801 (2023)
https://doi.org/10.1116/6.0002431
Published: July 2023
View articletitled, Extending atomic layer deposition for use in next-generation piezoMEMS: Review and perspective
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Journal Articles

Elaboration and characterization of porous ultrathin gold films grown by ion beam assisted deposition

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A. Aassime, M. Duquennoy, F. Hamouda, T. Kadi, F. Mahut, M. Ouaftouh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 053404 (2022)
https://doi.org/10.1116/6.0002050
Published: September 2022
View articletitled, Elaboration and characterization of porous ultrathin gold films grown by ion beam assisted deposition
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Journal Articles

Ultrasonic atomization of titanium isopropoxide at room temperature for TiO2 atomic layer deposition

Editor’s PickAvailable to Purchase
Moon-Hyung Jang, Yu Lei
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 062405 (2020)
https://doi.org/10.1116/6.0000464
Published: October 2020
View articletitled, Ultrasonic atomization of titanium isopropoxide at room temperature for TiO2 atomic layer deposition
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Includes: Supplementary data
Journal Articles

Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition

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Brian C. Welch, Olivia M. McIntee, Anand B. Ode, Bonnie B. McKenzie, Alan R. Greenberg, Victor M. Bright, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 052409 (2020)
https://doi.org/10.1116/6.0000271
Published: August 2020
View articletitled, Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition
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Journal Articles

Effect of pretreatment with ultrasonic vibration for plasma-processed multiwalled carbon nanotubes

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Daisuke Ogawa, Kohei Nishimura, Hideo Uchida, Keiji Nakamura
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 053001 (2020)
https://doi.org/10.1116/6.0000151
Published: July 2020
View articletitled, Effect of pretreatment with ultrasonic vibration for plasma-processed multiwalled carbon nanotubes
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Journal Articles

Surface energy engineering for LiTaO3 and α-quartz SiO2 for low temperature (<220 °C) wafer bonding

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Brian Baker, Nicole Herbots, Shawn D. Whaley, Mohammed Sahal, Jacob Kintz, Aliya Yano, Saaketh Narayan, Alex L. Brimhall, Wey-Lyn Lee, Yuko Akabane, Robert J. Culbertson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 041101 (2019)
https://doi.org/10.1116/1.5095157
Published: July 2019
View articletitled, Surface energy engineering for LiTaO3 and α-quartz SiO2 for low temperature (&lt;220 °C) wafer bonding
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Journal Articles

Gas modulation refractometry for high-precision assessment of pressure under non-temperature-stabilized conditions

Open Access
Isak Silander, Thomas Hausmaninger, Martin Zelan, Ove Axner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 03E105 (2018)
https://doi.org/10.1116/1.5022244
Published: April 2018
View articletitled, Gas modulation refractometry for high-precision assessment of pressure under non-temperature-stabilized conditions
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Journal Articles

Interferometry of plasma bursts in helium atmospheric-pressure plasma jets

Editor’s PickFree
Vladimir Samara, Sylwia Ptasinska
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 04F402 (2018)
https://doi.org/10.1116/1.5023113
Published: March 2018
View articletitled, Interferometry of plasma bursts in helium atmospheric-pressure plasma jets
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Includes: Supplementary data
Journal Articles

Experimental investigation of SF6–O2 plasma for advancement of the anisotropic Si etch process

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Khaled A. Alshaltami, Muhammad Morshed, Cezar Gaman, Jim Conway, Stephen Daniels
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 031307 (2017)
https://doi.org/10.1116/1.4981785
Published: April 2017
View articletitled, Experimental investigation of SF6–O2 plasma for advancement of the anisotropic Si etch process
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Journal Articles

Wet-cleaning of MgO(001): Modification of surface chemistry and effects on thin film growth investigated by x-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectroscopy

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Arnaud Le Febvrier, Jens Jensen, Per Eklund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 021407 (2017)
https://doi.org/10.1116/1.4975595
Published: February 2017
View articletitled, Wet-cleaning of MgO(001): Modification of surface chemistry and effects on thin film growth investigated by x-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectroscopy
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Journal Articles

Energy accommodation coefficient extracted from acoustic resonator experiments

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Felix Sharipov, Michael R. Moldover
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 061604 (2016)
https://doi.org/10.1116/1.4966620
Published: November 2016
View articletitled, Energy accommodation coefficient extracted from acoustic resonator experiments
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Journal Articles

Water transport control on a patterned superhydrophobic surface via laser direct writing

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Tianchi Chen, Hongtao Liu, Shuhua Teng, Wei Yan, Haifeng Yang, Jiande Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 061103 (2016)
https://doi.org/10.1116/1.4966617
Published: October 2016
View articletitled, Water transport control on a patterned superhydrophobic surface via laser direct writing
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Includes: Supplementary data
Journal Articles

Solventless grafting of functional polymer coatings onto Parylene C

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Mark M. De Luna, Benny Chen, Laura C. Bradley, Ravi Bhandia, Malancha Gupta
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 041403 (2016)
https://doi.org/10.1116/1.4953876
Published: June 2016
View articletitled, Solventless grafting of functional polymer coatings onto Parylene C
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Journal Articles

Atomic layer deposition synthesized TiOx thin films and their application as microbolometer active materials

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Mahmud Yusuf Tanrikulu, Hamid Reza Rasouli, Mohammad Ghaffari, Kagan Topalli, Ali Kemal Okyay
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 031510 (2016)
https://doi.org/10.1116/1.4947120
Published: April 2016
View articletitled, Atomic layer deposition synthesized TiOx thin films and their application as microbolometer active materials
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Includes: Supplementary data
Journal Articles

Single vacuum chamber with multiple close space sublimation sources to fabricate CdTe solar cells

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Drew E. Swanson, Jason M. Kephart, Pavel S. Kobyakov, Kevin Walters, Kevan C. Cameron, Kurt L. Barth, Walajabad S. Sampath, Jennifer Drayton, James R. Sites
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 021202 (2016)
https://doi.org/10.1116/1.4941071
Published: February 2016
View articletitled, Single vacuum chamber with multiple close space sublimation sources to fabricate CdTe solar cells
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Journal Articles

Spatial atomic layer deposition on flexible porous substrates: ZnO on anodic aluminum oxide films and Al2O3 on Li ion battery electrodes

Free
Kashish Sharma, Dmitri Routkevitch, Natalia Varaksa, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 01A146 (2016)
https://doi.org/10.1116/1.4937728
Published: December 2015
View articletitled, Spatial atomic layer deposition on flexible porous substrates: ZnO on anodic aluminum oxide films and Al2O3 on Li ion battery electrodes
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Journal Articles

Atomic layer deposition of alternative glass microchannel plates

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Aileen O'Mahony, Christopher A. Craven, Michael J. Minot, Mark A. Popecki, Joseph M. Renaud, Daniel C. Bennis, Justin L. Bond, Michael E. Stochaj, Michael R. Foley, Bernhard W. Adams, Anil U. Mane, Jeffrey W. Elam, Camden Ertley, Oswald H. W. Siegmund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 01A128 (2016)
https://doi.org/10.1116/1.4936231
Published: November 2015
View articletitled, Atomic layer deposition of alternative glass microchannel plates
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