Skip Nav Destination
Update search
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
NARROW
Format
Collections
Topics
Subjects
Journal
Article Type
Issue Section
Date
Availability
Journal Articles
Jeong Won Kim, Ansoon Kim, Hui Ung Hwang, Jun Hyung Kim, Seungwook Choi, Norbert Koch, Dongguen Shin, Zhijuan Zhao, Fen Liu, Minki Choi, Kyu Myung Lee, Yongsup Park
J. Vac. Sci. Technol. A 41, 053211 (2023)
Published: August 2023
Journal Articles
Benjamin C. Letson, Simon Barke, Peter Wass, Guido Mueller, Fan Ren, Stephen J. Pearton, John W. Conklin
J. Vac. Sci. Technol. A 41, 013202 (2023)
Published: December 2022
Journal Articles
Morgann Berg, Sean W. Smith, David A. Scrymgeour, Michael T. Brumbach, Ping Lu, Sara M. Dickens, Joseph R. Michael, Taisuke Ohta, Ezra Bussmann, Harold P. Hjalmarson, Peter A. Schultz, Paul G. Clem, Matthew M. Hopkins, Christopher H. Moore
J. Vac. Sci. Technol. A 40, 023207 (2022)
Published: February 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 013415 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 063202 (2021)
Published: September 2021
Journal Articles
Michael Hayes, Melanie A. Jenkins, Jacob Woodruff, Daniel F. Moser, Charles L. Dezelah, John F. Conley, Jr.
J. Vac. Sci. Technol. A 39, 052402 (2021)
Published: July 2021
Includes: Supplementary data
Journal Articles
Ekaterina Zoubenko, Sara Iacopetti, Kamira Weinfeld, Yaron Kauffmann, Patrick Van Cleemput, Moshe Eizenberg
J. Vac. Sci. Technol. A 39, 043201 (2021)
Published: May 2021
Includes: Supplementary data
Journal Articles
Luke A. M. Lyle, Kunyao Jiang, Elizabeth V. Favela, Kalyan Das, Andreas Popp, Zbigniew Galazka, Guenter Wagner, Lisa M. Porter
J. Vac. Sci. Technol. A 39, 033202 (2021)
Published: March 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 020803 (2021)
Published: February 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 013002 (2021)
Published: December 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 067001 (2020)
Published: November 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 063002 (2020)
Published: October 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 050805 (2020)
Published: September 2020
Journal Articles
J. Vac. Sci. Technol. A 37, 061404 (2019)
Published: November 2019
Journal Articles
J. Vac. Sci. Technol. A 37, 061504 (2019)
Published: October 2019
Includes: Supplementary data
Journal Articles
Urmilaben P. Rathod, Bimin Cai, Chukwudi Iheomamere, Gilbert Nyandoto, Andrey A. Voevodin, Nigel D. Shepherd
J. Vac. Sci. Technol. A 37, 051505 (2019)
Published: August 2019
Journal Articles
Esteban Broitman, Antonella Lorusso, Alessio Perrone, Vagelis Karoutsos, Nikolaos A. Vainos, Francisco Gontad
J. Vac. Sci. Technol. A 37, 031507 (2019)
Published: April 2019
Journal Articles
Salvatore Macis, Carla Aramo, Carmela Bonavolontà, Giannantonio Cibin, Alessandro D’Elia, Ivan Davoli, Mario De Lucia, Massimiliano Lucci, Stefano Lupi, Marco Miliucci, Andrea Notargiacomo, Carlo Ottaviani, Claudio Quaresima, Manuela Scarselli, Jessica Scifo, Massimo Valentino, Paola De Padova, Augusto Marcelli
J. Vac. Sci. Technol. A 37, 021513 (2019)
Published: February 2019
Journal Articles
J. Vac. Sci. Technol. A 37, 011201 (2019)
Published: December 2018
Journal Articles
Yafeng Zhu, Fangsen Li, Rong Huang, Tong Liu, Yanfei Zhao, Yang Shen, Jian Zhang, An Dingsun, Yun Guo
J. Vac. Sci. Technol. A 36, 041501 (2018)
Published: May 2018
Includes: Supplementary data
1