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Journal Articles

Application of high-spatial-resolution distributed fiber-optic sensing technique for neutral gas temperature mapping in inductively coupled Ar plasmas

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Qian Luo, Tuo Lv, Peng-Yu Wang, Da-Peng Zhou, Fei Gao, You-Nian Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043006 (2025)
https://doi.org/10.1116/6.0004640
Published: June 2025
View articletitled, Application of high-spatial-resolution distributed fiber-optic sensing technique for neutral gas temperature mapping in inductively coupled Ar plasmas
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Journal Articles

Growth and properties of Sn-doped sol-gel Ga2O3 thin films

FeaturedOpen Access
Kate M. Wislang, Rodrigo Martinez-Gazoni, Roger J. Reeves, Martin W. Allen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043410 (2025)
https://doi.org/10.1116/6.0004540
Published: June 2025
View articletitled, Growth and properties of Sn-doped sol-gel Ga2O3 thin films
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Journal Articles

In situ metal organic chemical vapor deposition of ultrathin sp2-bonded boron nitride dielectric on gallium nitride

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Michael Snure, Eric W. Blanton, Gordon Grzybowski, Bita Pourbahari, Nabil Bassim, Nicholas R. Glavin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043405 (2025)
https://doi.org/10.1116/6.0004483
Published: May 2025
View articletitled, In situ metal organic chemical vapor deposition of ultrathin sp2-bonded boron nitride dielectric on gallium nitride
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Journal Articles

Luminescence and thermally stimulated conductivity of polycrystalline β-Ga2O3: Mn and β-Ga2O3: Mn, Si

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Andriy Luchechko, Vyacheslav Vasyltsiv, Markiyan Kushlyk, Ihor Syvorotka, Lyudmyla Kostyk, Dmytro Slobodzyan, Yaroslav Zhydachevskyy
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042802 (2025)
https://doi.org/10.1116/6.0004570
Published: May 2025
View articletitled, Luminescence and thermally stimulated conductivity of polycrystalline β-Ga2O3: Mn and β-Ga2O3: Mn, Si
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Journal Articles

Study on the properties of MoS2 thin films and devices prepared under different annealing pressures

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Zhiping Huang, Xiaoqian Yang, Lukai Zhang, Dongjin Liao, Ying Xu, XingXing Xu, Yang Ding, Yu Zhang, Wei Yu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042803 (2025)
https://doi.org/10.1116/6.0004395
Published: May 2025
View articletitled, Study on the properties of MoS2 thin films and devices prepared under different annealing pressures
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Journal Articles

Investigation of the impact of magnetic field intensity on the multimode operational characteristics of kilowatt-class double-stage anode layer Hall thrusters utilizing krypton

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Rui Ding, Yong Wang, Tianlin Wu, Lei Wang, Yi Li, Zijian Liu, Guanrong Hang, Qimeng Xia, Hong Li, Liqiu Wei, Yongjie Ding
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033006 (2025)
https://doi.org/10.1116/6.0004334
Published: April 2025
View articletitled, Investigation of the impact of magnetic field intensity on the multimode operational characteristics of kilowatt-class double-stage anode layer Hall thrusters utilizing krypton
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Journal Articles

Power generation enhanced dye-sensitized solar cells by sodium adsorption with aluminum silicate coated TiO2 photoelectrodes

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Sho Kamiyama, Hibiki Takeda, Ryo Miyazawa, Masanori Miura, Bashir Ahmmad, Fumihiko Hirose
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032407 (2025)
https://doi.org/10.1116/6.0004246
Published: April 2025
View articletitled, Power generation enhanced dye-sensitized solar cells by sodium adsorption with aluminum silicate coated TiO2 photoelectrodes
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Journal Articles

Epitaxy of high-quality antiferromagnetic metal chromium nitride films with 90° and 40° off-axis magnetron sputtering

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Zhiliang Xu, Rongjing Zhai, Jiachang Bi, Ruyi Zhang, Chuyi Ning, Zhangyuan Guo, Yanwei Cao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032707 (2025)
https://doi.org/10.1116/6.0004445
Published: April 2025
View articletitled, Epitaxy of high-quality antiferromagnetic metal chromium nitride films with 90° and 40° off-axis magnetron sputtering
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Journal Articles

Molecular beam epitaxy of boron arsenide layers

Open Access
Tin S. Cheng, Jonathan Bradford, Leo Norman, Xiaoyang Ji, Arpit Nandi, Gerardo T. Martinez, Stuart Robertson, Paul R. Edwards, James W. Pomeroy, David Cherns, Christopher J. Mellor, Robert W. Martin, Peter H. Beton, Martin Kuball, Sergei V. Novikov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032705 (2025)
https://doi.org/10.1116/6.0004383
Published: April 2025
View articletitled, Molecular beam epitaxy of boron arsenide layers
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Journal Articles

Comparison study on C–Cr and a-C coatings on titanium plates for PEMFCs applications via midfrequency magnetron sputtering

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Hanzhuo He, Song Li, Saiqiang Wang, De Ning, Ming Ma, Jiao Yang, Zhi Long, Dongfeng Xue, Chunlei Yang, Weimin Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033101 (2025)
https://doi.org/10.1116/6.0004271
Published: March 2025
View articletitled, Comparison study on C–Cr and a-C coatings on titanium plates for PEMFCs applications via midfrequency magnetron sputtering
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Journal Articles

Structural, electrical, and thermal characterization of homoepitaxial close-injection showerhead metalorganic chemical vapor deposition β-Ga2O3 enhancement-mode recessed-gate MOSFETs

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Hannah N. Masten, Gustavo Armando Alvarez, Corey Halverson, Joyce Christiansen-Salameh, Eugene Y. Kwon, Michael Liao, James Spencer Lundh, Audrey Rose Gutierrez, Fikadu Alema, Andrei Osinsky, Alan G. Jacobs, Mark S. Goorsky, Marc H. Weber, Zhiting Tian, Karl D. Hobart, Marko J. Tadjer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022703 (2025)
https://doi.org/10.1116/6.0004176
Published: February 2025
View articletitled, Structural, electrical, and thermal characterization of homoepitaxial close-injection showerhead metalorganic chemical vapor deposition β-Ga2O3 enhancement-mode recessed-gate MOSFETs
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Journal Articles

Electrically tunable nonadiabatic quantum spin pumping in zigzag/bearded graphene nanoribbons

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Yingran Zhang, Jiaming Yu, Chongdan Ren, Hongyu Tian, Liang Xue, Jingguo Hu, Sake Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022202 (2025)
https://doi.org/10.1116/6.0004262
Published: February 2025
View articletitled, Electrically tunable nonadiabatic quantum spin pumping in zigzag/bearded graphene nanoribbons
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Journal Articles

Enhancing chemical vapor deposition growth and fabrication techniques to maximize hole conduction in tungsten diselenide for monolithic CMOS integration

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Jatin Vikram Singh, Matthew N. Disiena, S. S. Teja Nibhanupudi, Nicholas T. Watanabe, JaeHyun Ahn, Dong-Won Kim, Anupam Roy, Sanjay K. Banerjee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022201 (2025)
https://doi.org/10.1116/6.0003893
Published: February 2025
View articletitled, Enhancing chemical vapor deposition growth and fabrication techniques to maximize hole conduction in tungsten diselenide for monolithic CMOS integration
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Journal Articles

Preparation and characterization of high-quality Bi1−xSbx thin films: A sputtering deposition approach

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G. G. de Almeida, A. M. H. de Andrade, M. A. Tumelero
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 013406 (2025)
https://doi.org/10.1116/6.0004109
Published: January 2025
View articletitled, Preparation and characterization of high-quality Bi1−xSbx thin films: A sputtering deposition approach
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Journal Articles

Internal chemical potential in mixed covalent-ionic photosensitive systems

Editor’s PickOpen Access
Małgorzata Kot, Karsten Henkel, Dieter Schmeißer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 012802 (2025)
https://doi.org/10.1116/6.0004179
Published: January 2025
View articletitled, Internal chemical potential in mixed covalent-ionic photosensitive systems
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Journal Articles

Influence of Sb content on carrier transport and thermoelectric properties of flexible Bi–Sb films

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Zhihao Ben, Guihong Song, Yu Chen, Yusheng Wu, Junhua You
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 013405 (2025)
https://doi.org/10.1116/6.0004097
Published: December 2024
View articletitled, Influence of Sb content on carrier transport and thermoelectric properties of flexible Bi–Sb films
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Journal Articles

Perspective on breakdown in Ga2O3 vertical rectifiers

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Jian-Sian Li, Chao-Ching Chiang, Hsiao-Hsuan Wan, Fan Ren, Yu-Te Liao, Stephen J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 018501 (2025)
https://doi.org/10.1116/6.0004146
Published: December 2024
View articletitled, Perspective on breakdown in Ga2O3 vertical rectifiers
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Journal Articles

Surface passivation approaches for silicon, germanium, and III–V semiconductors

Editor’s PickOpen Access
Roel J. Theeuwes, Wilhelmus M. M. Kessels, Bart Macco
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 060801 (2024)
https://doi.org/10.1116/6.0004030
Published: November 2024
View articletitled, Surface passivation approaches for silicon, germanium, and III–V semiconductors
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Journal Articles

Influence of polymorphism on the lattice thermal conductivity of Ga2O3

Open Access
Haoran Sun, Gang Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 062801 (2024)
https://doi.org/10.1116/6.0003844
Published: November 2024
View articletitled, Influence of polymorphism on the lattice thermal conductivity of Ga2O3
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Journal Articles

Electron temperature and ion density distribution on a vertical section in a weakly magnetized inductively coupled plasma

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You He, Yi-Lang Jiang, Myoung-Jae Lee, Beom-Jun Seo, Ju-Ho Kim, Chin-Wook Chung
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063004 (2024)
https://doi.org/10.1116/6.0003874
Published: November 2024
View articletitled, Electron temperature and ion density distribution on a vertical section in a weakly magnetized inductively coupled plasma
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