Skip Nav Destination
Update search
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
NARROW
Format
Collections
Topics
Subjects
Journal
Article Type
Issue Section
Date
Availability
Journal Articles
Haolan Qu, Wei Huang, Yu Zhang, Jin Sui, Jiaxiang Chen, Baile Chen, David Wei Zhang, Yuangang Wang, Yuanjie Lv, Zhihong Feng, Xinbo Zou
J. Vac. Sci. Technol. A 42, 023418 (2024)
Published: February 2024
Journal Articles
J. Vac. Sci. Technol. A 41, 063104 (2023)
Published: September 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 023201 (2023)
Published: January 2023
Journal Articles
J. Vac. Sci. Technol. A 40, 063407 (2022)
Published: November 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 043211 (2022)
Published: June 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 030802 (2022)
Published: May 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 013415 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 040402 (2021)
Published: June 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 033203 (2021)
Published: March 2021
Journal Articles
Luke A. M. Lyle, Kunyao Jiang, Elizabeth V. Favela, Kalyan Das, Andreas Popp, Zbigniew Galazka, Guenter Wagner, Lisa M. Porter
J. Vac. Sci. Technol. A 39, 033202 (2021)
Published: March 2021
Includes: Supplementary data
Journal Articles
Ribhu Sharma, Minghan Xian, Chaker Fares, Mark E. Law, Marko Tadjer, Karl D. Hobart, Fan Ren, Stephen J. Pearton
J. Vac. Sci. Technol. A 39, 013406 (2021)
Published: December 2020
Journal Articles
Spyridon Korkos, Nikolaos J. Xanthopoulos, Martha A. Botzakaki, Charalampos Drivas, Styliani Kennou, Spyridon Ladas, Anastasios Travlos, Stavroula N. Georga, Christoforos A. Krontiras
J. Vac. Sci. Technol. A 38, 032402 (2020)
Published: March 2020
Journal Articles
J. Vac. Sci. Technol. A 37, 030602 (2019)
Published: April 2019
Journal Articles
J. Vac. Sci. Technol. A 37, 011101 (2019)
Published: December 2018
Journal Articles
J. Vac. Sci. Technol. A 35, 021601 (2017)
Published: January 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 021501 (2017)
Published: November 2016
Journal Articles
Valentin Craciun, Daniel Cristea, Gabriel Socol, Eric Lambers, Roxana Trusca, Steven Fairchild, Tyson Back, Greggory Gruen, Doina Craciun
J. Vac. Sci. Technol. A 34, 051509 (2016)
Published: August 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 04C101 (2016)
Published: April 2016
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 34, 02D104 (2016)
Published: December 2015
Journal Articles
J. Vac. Sci. Technol. A 33, 060801 (2015)
Published: October 2015
1