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Journal Articles
J. Vac. Sci. Technol. A 41, 062706 (2023)
Published: November 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 062411 (2023)
Published: November 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 062704 (2023)
Published: October 2023
Journal Articles
Seokhwi Song, Eungju Kim, Kyunghoo Kim, Jangho Bae, Jinho Lee, Chang Hwa Jung, Hanjin Lim, Hyeongtag Jeon
J. Vac. Sci. Technol. A 41, 062404 (2023)
Published: October 2023
Journal Articles
Taleb Alwadi, Christian Notthoff, Shankar Dutt, Jessica Wierbik, Nahid Afrin, Alexander Kiy, Patrick Kluth
J. Vac. Sci. Technol. A 41, 063404 (2023)
Published: October 2023
Journal Articles
Xuguang Luo, Xiong Zhang, Ruiting Fang, Lin Chen, Shenyu Xu, Jia Cui, Zhiyi Lou, Yifeng Xu, Shuchang Wang, Guohua Hu
J. Vac. Sci. Technol. A 41, 052705 (2023)
Published: July 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 052704 (2023)
Published: July 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 052702 (2023)
Published: July 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 053406 (2023)
Published: July 2023
Journal Articles
Stefan P. Svensson, Nadeemullah A. Mahadik, Gela Kipshidze, Dmitri Donetski, Jingze Zhao, Gregory Belenky
J. Vac. Sci. Technol. A 41, 040802 (2023)
Published: June 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 042709 (2023)
Published: June 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 043404 (2023)
Published: June 2023
Journal Articles
Tzu-Ling Chen, Sheng-Yu Hsu, Yuan-Tai Lai, Shou-Yi Chang, Hsueh-Hsing Hung, Su-Yueh Tsai, Jenq-Gong Duh
J. Vac. Sci. Technol. A 41, 043101 (2023)
Published: May 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 033206 (2023)
Published: April 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 033205 (2023)
Published: March 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 033102 (2023)
Published: March 2023
Journal Articles
Yuanfeng Ding, Bingxin Li, Jinshan Yao, Huanhuan Song, Lian Wei, Yang Lu, Junwei Huang, Hongtao Yuan, Hong Lu, Yan-Feng Chen
J. Vac. Sci. Technol. A 41, 023406 (2023)
Published: February 2023
Journal Articles
A. Y. Polyakov, A. I. Kochkova, Amanda Langørgen, Lasse Vines, A. Vasilev, I. V. Shchemerov, A. A. Romanov, S. J. Pearton
J. Vac. Sci. Technol. A 41, 023401 (2023)
Published: January 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 023201 (2023)
Published: January 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 012601 (2023)
Published: December 2022
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