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Journal Articles

MOS structure with as-deposited ALD Al2O3/4H-SiC heterostructure with high electrical performance: Investigation of the interfacial region

Yu-Xuan Zeng, Xi-Rui Wang, Ruo-Yun Yang, Wei Huang, Lei Yang, Hong-Ping Ma, Qing-Chun Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053207 (2024)
https://doi.org/10.1116/5.0202640
Published: August 2024
View article titled, MOS structure with as-deposited ALD Al<sub>2</sub>O<sub>3</sub>/4H-SiC heterostructure with high electrical performance: Investigation of the interfacial region
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Journal Articles

Sputter-deposited zirconium doped nickel-aluminide coatings for high-temperature oxidation-resistant applications

Sunil Kumar Tiwari, Akula Umamaheswara Rao, Archana Singh Kharb, Piyush Chandra Verma, Paritosh Dubey, Vipin Chawla, Neha Sardana, Sanjeev Kumar, Devesh Kumar Avasthi, Amit Kumar Chawla
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053408 (2024)
https://doi.org/10.1116/6.0003848
Published: August 2024
View article titled, Sputter-deposited zirconium doped nickel-aluminide coatings for high-temperature oxidation-resistant applications
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Journal Articles

Investigation of capacitance for InAs/GaAs quantum dot solar cells by photoreflectance

Editor’s Pick
Behnam Zeinalvand Farzin, Jong Su Kim, Geun Hyeong Kim, DongKun Lee, Im Sik Han, Sang Jun Lee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053203 (2024)
https://doi.org/10.1116/6.0003787
Published: August 2024
View article titled, Investigation of capacitance for InAs/GaAs quantum dot solar cells by photoreflectance
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Journal Articles

Nitrogen-incorporated tetrahedral amorphous carbon optically transparent thin film electrode

Nina Baule, Lars Haubold, Thomas Schuelke
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053103 (2024)
https://doi.org/10.1116/6.0003786
Published: July 2024
View article titled, Nitrogen-incorporated tetrahedral amorphous carbon optically transparent thin film electrode
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Journal Articles

Controlling electron and hole concentration in MoS2 through scalable plasma processes

Christopher M. Smyth, Taisuke Ohta, Stanley S. Chou, Tzu-Ming Lu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 042204 (2024)
https://doi.org/10.1116/6.0003486
Published: June 2024
View article titled, Controlling electron and hole concentration in MoS<sub>2</sub> through scalable plasma processes
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Journal Articles

Microstructural evolution and strengthening behavior induced by N addition in TiVCrAl medium entropy alloy films

Z. Y. Zhang, L. Wang, Y. J. Ma, Y. W. Zhang, X. C. Shen, X. Hua, G. J. Li, Z. H. Cao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043410 (2024)
https://doi.org/10.1116/6.0003625
Published: June 2024
View article titled, Microstructural evolution and strengthening behavior induced by N addition in TiVCrAl medium entropy alloy films
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Journal Articles

Performance evaluation of GaN etching using Cl2-based plasma with bias pulsing

Simon Ruel, Patricia Pimenta-Barros, Maxime Pezeril, Philippe Thoueille, François Gaucher, Nicolas Posseme
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043006 (2024)
https://doi.org/10.1116/6.0003703
Published: June 2024
View article titled, Performance evaluation of GaN etching using Cl<sub>2</sub>-based plasma with bias pulsing
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Journal Articles

Epitaxial growth and characterization of GaAs (111) on 4H-SiC

Subhashis Das, Nirosh M. Eldose, Hryhorii Stanchu, Fernando Maia de Oliveira, Mourad Benamara, Yuriy I. Mazur, Zhong Chen, Alan Mantooth, Gregory J. Salamo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 042702 (2024)
https://doi.org/10.1116/6.0003454
Published: May 2024
View article titled, Epitaxial growth and characterization of GaAs (111) on 4H-SiC
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Journal Articles

Novel 3D reciprocal space visualization of strain relaxation in InSb on GaAs substrates

Editor’s Pick
T. Blaikie, Y. Shi, M. C. Tam, B. D. Moreno, Z. R. Wasilewski
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 032704 (2024)
https://doi.org/10.1116/6.0003455
Published: April 2024
View article titled, Novel 3D reciprocal space visualization of strain relaxation in InSb on GaAs substrates
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Journal Articles

Effect of template on the photoresponsivity of BaSi2 films grown on Ge(111) substrates by molecular beam epitaxy

Sho Aonuki, Kaori Takayanagi, Ai Iwai, Kaoru Toko, Takashi Suemasu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 032702 (2024)
https://doi.org/10.1116/6.0003503
Published: March 2024
View article titled, Effect of template on the photoresponsivity of BaSi<sub>2</sub> films grown on Ge(111) substrates by molecular beam epitaxy
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Journal Articles

Stability investigation of Eu3+ doped CaF2 thin film with ZnO coating under electron beam irradiation

R. A. A. Abdallah, R. E. Kroon, E. Coetsee, E. H. H. Hasabeldaim, H. C. Swart
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033203 (2024)
https://doi.org/10.1116/6.0003363
Published: March 2024
View article titled, Stability investigation of Eu<sup>3+</sup> doped CaF<sub>2</sub> thin film with ZnO coating under electron beam irradiation
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Journal Articles

Electrical conductivity, luminescence, and deep acceptor levels in β-Ga2O3-In2O3 polycrystalline solid solution doped with Zr4+ or Ca2+ ions

A. Luchechko, V. Vasyltsiv, M. Kushlyk, L. Kostyk, D. Slobodzyan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033202 (2024)
https://doi.org/10.1116/6.0003466
Published: March 2024
View article titled, Electrical conductivity, luminescence, and deep acceptor levels in <em>β</em>-Ga<sub>2</sub>O<sub>3</sub>-In<sub>2</sub>O<sub>3</sub> polycrystalline solid solution doped with Zr<sup>4+</sup> or Ca<sup>2+</sup> ions
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Journal Articles

High-performance a-Ga2O3 solar-blind photodetectors by pulsed magnetron sputtering deposition

Difei Xue, Peiwen Lv, Kai Peng, Qiang Hu, Chenlong Chen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033403 (2024)
https://doi.org/10.1116/6.0003442
Published: March 2024
View article titled, High-performance a-Ga<sub>2</sub>O<sub>3</sub> solar-blind photodetectors by pulsed magnetron sputtering deposition
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Journal Articles

Radiation damage effects on electronic and optical properties of β-Ga2O3 from first-principles

Xiaoning Zhang, Xi Liang, Xing Li, Yuan Li, Jia-Yue Yang, Linhua Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033201 (2024)
https://doi.org/10.1116/6.0003430
Published: March 2024
View article titled, Radiation damage effects on electronic and optical properties of <em>β</em>-Ga<sub>2</sub>O<sub>3</sub> from first-principles
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Includes: Supplementary data
Journal Articles

Nucleation of highly uniform AlN thin films by high volume batch ALD on 200 mm platform

Editor’s Pick
Partha Mukhopadhyay, Ivan Fletcher, Zuriel Caribe Couvertier, Brent Schwab, John Gumpher, Winston V. Schoenfeld, Jon Kretzschmar, Anton deVilliers, Jim Fulford
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 032401 (2024)
https://doi.org/10.1116/6.0003405
Published: March 2024
View article titled, Nucleation of highly uniform AlN thin films by high volume batch ALD on 200 mm platform
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Journal Articles

Advances in growth, doping, and devices and applications of zinc oxide

Vishal Saravade, Zhe Chuan Feng, Manika Tun Nafisa, Chuanle Zhou, Na Lu, Benjamin Klein, Ian Ferguson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 020802 (2024)
https://doi.org/10.1116/6.0003171
Published: February 2024
View article titled, Advances in growth, doping, and devices and applications of zinc oxide
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Journal Articles

High crystalline quality homoepitaxial Si-doped β-Ga2O3(010) layers with reduced structural anisotropy grown by hot-wall MOCVD

D. Gogova, D. Q. Tran, V. Stanishev, V. Jokubavicius, L. Vines, M. Schubert, R. Yakimova, P. P. Paskov, V. Darakchieva
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 022708 (2024)
https://doi.org/10.1116/6.0003424
Published: February 2024
View article titled, High crystalline quality homoepitaxial Si-doped <em>β</em>-Ga<sub>2</sub>O<sub>3</sub>(010) layers with reduced structural anisotropy grown by hot-wall MOCVD
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Journal Articles

Review on ultrahigh growth rate GaAs solar cells by metalorganic vapor-phase epitaxy

Robin Lang, Christoph Klein, Jens Ohlmann, Frank Dimroth, David Lackner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 020801 (2024)
https://doi.org/10.1116/6.0003393
Published: February 2024
View article titled, Review on ultrahigh growth rate GaAs solar cells by metalorganic vapor-phase epitaxy
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Journal Articles

Infrared photoelectric detection of polycrystalline Bi2Te3 thin films prepared by pulsed laser deposition

Qijun Kao, Yi Xiao, Yongfeng Jia, Jin Wang, Chuanbin Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023421 (2024)
https://doi.org/10.1116/6.0003343
Published: February 2024
View article titled, Infrared photoelectric detection of polycrystalline Bi<sub>2</sub>Te<sub>3</sub> thin films prepared by pulsed laser deposition
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Journal Articles

Structural and magnetic properties of Ni cluster embedded (111)NiO layers grown on (0001)GaN films

Simran Arora, Shivesh Yadav, Amandeep Kaur, Bhabani Prasad Sahu, Zainab Hussain, Subhabrata Dhar
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 022706 (2024)
https://doi.org/10.1116/6.0003195
Published: February 2024
View article titled, Structural and magnetic properties of Ni cluster embedded (111)NiO layers grown on (0001)GaN films
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