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Journal Articles
J. Vac. Sci. Technol. A 43, 043410 (2025)
Published: June 2025
Journal Articles
Gallium oxide/indium gallium zinc oxide heterojunction Schottky barrier thin-film transistors with ultrahigh 2D electron density over 6 × 1013/cm2
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J. Vac. Sci. Technol. A 43, 043409 (2025)
Published: June 2025
Journal Articles
Control of iron doping during the growth of bulk gallium oxide crystals by the Czochralski method
Available to PurchaseD. A. Bauman, D. I. Panov, V. A. Spiridonov, A. Yu. Ivanov, P. A. Bogdanov, W. V. Lundin, E. Yu. Lundina, A. F. Tsatsulnikov, M. V. Tokarev, B. Y. Ber, S. S. Rachkov, D. Yu. Kazantsev, P. N. Brunkov, A. E. Romanov
J. Vac. Sci. Technol. A 43, 042804 (2025)
Published: May 2025
Journal Articles
Michael Snure, Eric W. Blanton, Gordon Grzybowski, Bita Pourbahari, Nabil Bassim, Nicholas R. Glavin
J. Vac. Sci. Technol. A 43, 043405 (2025)
Published: May 2025
Journal Articles
Luminescence and thermally stimulated conductivity of polycrystalline β-Ga2O3: Mn and β-Ga2O3: Mn, Si
Available to PurchaseAndriy Luchechko, Vyacheslav Vasyltsiv, Markiyan Kushlyk, Ihor Syvorotka, Lyudmyla Kostyk, Dmytro Slobodzyan, Yaroslav Zhydachevskyy
J. Vac. Sci. Technol. A 43, 042802 (2025)
Published: May 2025
Journal Articles
Thermal annealing and radiation effects on structural and electrical properties of NbN/GaN superconductor/semiconductor junction
Available to PurchaseStephen Margiotta, Binzhi Liu, Saleh Ahmed Khan, Gabriel Calderon Ortiz, Ahmed Ibreljic, Jinwoo Hwang, A. F. M. Anhar Uddin Bhuiyan
J. Vac. Sci. Technol. A 43, 042701 (2025)
Published: May 2025
Journal Articles
Insight into the mechanism of lattice damage in ground and polished InAs substrates
Available to PurchaseXinyu Lv, Hui Xie, Chenhui Li, Wenwen Yang, Yihan Bai, Guowei Wang, Youwen Zhao, Yingqiang Xu, Lijie Liu, Li He, Guiying Shen
J. Vac. Sci. Technol. A 43, 033208 (2025)
Published: April 2025
Journal Articles
Growth of InBi on InSb(100) via molecular beam epitaxy
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J. Vac. Sci. Technol. A 43, 033406 (2025)
Published: April 2025
Journal Articles
Growth regimes of (0001) AlN by ammonia molecular beam epitaxy
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J. Vac. Sci. Technol. A 43, 032706 (2025)
Published: April 2025
Journal Articles
Optimizing GaAs/AlGaAs growth on GaAs (111)B for enhanced nonlinear efficiency in quantum optical metasurfaces
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J. Vac. Sci. Technol. A 43, 032703 (2025)
Published: April 2025
Journal Articles
Molybdenum carbonitride Schottky contacts prepared by thermal atomic layer deposition on gallium nitride
Available to PurchaseJacob W. Clark, Chan-Wen Chiu, Bangzhi Liu, Thomas J. Larrabee, Sr., Nathan S. Banner, Nicholas D. Redwing, Jennifer Gray, Suzanne E. Mohney
J. Vac. Sci. Technol. A 43, 032402 (2025)
Published: March 2025
Journal Articles
J. Vac. Sci. Technol. A 43, 038501 (2025)
Published: March 2025
Journal Articles
Effect of phase transition on structural, dielectric, and electrical properties of pulsed laser deposited Y doped high-k HfO2 thin films
Available to PurchaseMangla Nand, P. S. Padhi, Shilpa Tripathi, Yogesh Kumar, Pabitra Sahu, Manvendra Kumar, Anit Dawar, Sunil Ojha, Pankaj Misra, Himanshu Srivastava, S. K. Rai
J. Vac. Sci. Technol. A 43, 023411 (2025)
Published: March 2025
Journal Articles
Sn-doping concentration dependence of electrical, optical, and magnetic properties in epitaxial Mn-doped indium tin oxide films deposited by RF magnetron sputtering
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J. Vac. Sci. Technol. A 43, 023409 (2025)
Published: February 2025
Journal Articles
J. Vac. Sci. Technol. A 43, 022410 (2025)
Published: February 2025
Journal Articles
J. Vac. Sci. Technol. A 43, 020801 (2025)
Published: January 2025
Journal Articles
Harshil Kashyap, Ping-Che Lee, Kisung Chae, Matthias Passlack, Ajay K. Yadav, Keith Wong, Srini Nemani, Ellie Yieh, Jeffrey Spiegelman, Kyeongjae Cho, Asif Islam Khan, Andrew C. Kummel
J. Vac. Sci. Technol. A 43, 022401 (2025)
Published: January 2025
Journal Articles
Selective molecular gas phase etching in layered high aspect-ratio nanostructures for semiconductor processing. II. Experiments and model validation
J. Vac. Sci. Technol. A 43, 013007 (2025)
Published: January 2025
Journal Articles
Molecular dynamics investigation of heteroepitaxial growth of quaternary AlInGaN on wurtzite-GaN surface along [0001] direction
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J. Vac. Sci. Technol. A 43, 012702 (2025)
Published: December 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 060801 (2024)
Published: November 2024
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