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Journal Articles

Density functional theory calculations of mechanical and electronic properties of W_1−xTa_xN₆, W_1−xMo_xN₆, and Mo_1−xTa_xN₆ (0 ≤ x ≤ 1) alloys in a hexagonal structure

S. R. Kandel, D. Gall, S. V. Khare

J. Vac. Sci. Technol. A 41, 063112 (2023)

https://doi.org/10.1116/6.0002923

Published: October 2023

View article titled, Density functional theory calculations of mechanical and electronic properties of W1−xTaxN6, W1−xMoxN6, and Mo1−xTaxN6 (0 ≤ x ≤ 1) alloys in a hexagonal structure

Includes: Supplementary data

Journal Articles

Atomic layer deposition of Al₂O₃ interlayer for improving AlN growth on silicon substrates

Rony Saha, Jonathan Anderson, Mark W. Holtz, Edwin L. Piner

J. Vac. Sci. Technol. A 41, 053208 (2023)

https://doi.org/10.1116/6.0002760

Published: August 2023

View article titled, Atomic layer deposition of Al2O3 interlayer for improving AlN growth on silicon substrates

Journal Articles

Plasma deposited carbon containing zirconia films as thermal barriers

Vitali Bedarev, Philipp A. Maaß, Anna Thewes, Marc Böke, Achim von Keudell

J. Vac. Sci. Technol. A 41, 053001 (2023)

https://doi.org/10.1116/6.0002745

Published: July 2023

View article titled, Plasma deposited carbon containing zirconia films as thermal barriers

Journal Articles

Need for complementary techniques for reliable characterization of MoS₂-like layers

Aditya Deshpande, Koki Hojo, Koichi Tanaka, Pedro Arias, Hicham Zaid, Michael Liao, Mark Goorsky, Suneel Kodambaka

J. Vac. Sci. Technol. A 41, 042203 (2023)

https://doi.org/10.1116/6.0002701

Published: June 2023

View article titled, Need for complementary techniques for reliable characterization of MoS2-like layers

Journal Articles

Physical properties of Zn-Sn-N films governed by the Zn/(Zn + Sn) ratio

JunYan Ren, LingYan Liang, Xiaohan Liu, Hongtao Cao

J. Vac. Sci. Technol. A 41, 033406 (2023)

https://doi.org/10.1116/6.0002454

Published: April 2023

View article titled, Physical properties of Zn-Sn-N films governed by the Zn/(Zn + Sn) ratio

Includes: Supplementary data

Journal Articles

Transient photocapacitance spectroscopy of deep-levels in (001) β-Ga₂O₃

Fenfen Fenda Florena, Aboulaye Traoré, Takeaki Sakurai

J. Vac. Sci. Technol. A 41, 033205 (2023)

https://doi.org/10.1116/6.0002378

Published: March 2023

View article titled, Transient photocapacitance spectroscopy of deep-levels in (001) β-Ga2O3

Journal Articles

Photoresponse of O₂ plasma treated WS₂ monolayers synthesized by chemical vapor deposition

André do Nascimento Barbosa, Neileth Johanna Stand Figueroa, Cesar Augusto Diaz Mendoza, Fernando Lázaro Freire, Jr.

J. Vac. Sci. Technol. A 41, 022202 (2023)

https://doi.org/10.1116/6.0002202

Published: February 2023

View article titled, Photoresponse of O2 plasma treated WS2 monolayers synthesized by chemical vapor deposition

Journal Articles

Numerical ellipsometry: A method for selecting a single β-gallium oxide monoclinic crystal orientation able to determine the complete permittivity tensor

F. K. Urban, III, D. Barton, M. Schubert

J. Vac. Sci. Technol. A 41, 013402 (2023)

https://doi.org/10.1116/6.0002235

Published: December 2022

View article titled, Numerical ellipsometry: A method for selecting a single β-gallium oxide monoclinic crystal orientation able to determine the complete permittivity tensor

Journal Articles

Impact of interfacial thickness on Raman intensity profiles and phonon anisotropy in short-period (AlSb)_n/(GaSb)_m superlattices

Devki N. Talwar

J. Vac. Sci. Technol. A 40, 042704 (2022)

https://doi.org/10.1116/6.0001864

Published: July 2022

View article titled, Impact of interfacial thickness on Raman intensity profiles and phonon anisotropy in short-period (AlSb)n/(GaSb)m superlattices

Journal Articles

Effect of impurities on the Raman spectra of spray-coated β-Ga₂O₃ thin films

Constance Schmidt, Dietrich R. T. Zahn

J. Vac. Sci. Technol. A 40, 043404 (2022)

https://doi.org/10.1116/6.0001822

Published: June 2022

View article titled, Effect of impurities on the Raman spectra of spray-coated β-Ga2O3 thin films

Journal Articles

Characterizations of two-dimensional materials with cryogenic ultrahigh vacuum near-field optical microscopy in the visible range

Jeremy F. Schultz, Nan Jiang

J. Vac. Sci. Technol. A 40, 040801 (2022)

https://doi.org/10.1116/6.0001853

Published: May 2022

View article titled, Characterizations of two-dimensional materials with cryogenic ultrahigh vacuum near-field optical microscopy in the visible range

Journal Articles

Relationship between local coordinates and thermal conductivity in amorphous carbon

Emi Minamitani, Takuma Shiga, Makoto Kashiwagi, Ippei Obayashi

J. Vac. Sci. Technol. A 40, 033408 (2022)

https://doi.org/10.1116/6.0001744

Published: April 2022

View article titled, Relationship between local coordinates and thermal conductivity in amorphous carbon

Journal Articles

Assessing thermodynamical properties of Al_1−xGa_xSb alloys and optical modes for Al_1−xGa_xSb/GaAs epifilms and (AlSb)_m/(GaSb)_n superlattices

Devki N. Talwar, Hao-Hsiung Lin

J. Vac. Sci. Technol. A 40, 032801 (2022)

https://doi.org/10.1116/6.0001611

Published: March 2022

View article titled, Assessing thermodynamical properties of Al1−xGaxSb alloys and optical modes for Al1−xGaxSb/GaAs epifilms and (AlSb)m/(GaSb)n superlattices

Journal Articles

Optical constants of single-crystalline Ni(100) from 77 to 770 K from ellipsometry measurements

Farzin Abadizaman, Jaden Love, Stefan Zollner

J. Vac. Sci. Technol. A 40, 033202 (2022)

https://doi.org/10.1116/6.0001763

Published: March 2022

View article titled, Optical constants of single-crystalline Ni(100) from 77 to 770 K from ellipsometry measurements

Journal Articles

Oxygen incorporation in AlN films grown by plasma-enhanced atomic layer deposition

Nese Gungor, Mustafa Alevli

J. Vac. Sci. Technol. A 40, 022404 (2022)

https://doi.org/10.1116/6.0001498

Published: January 2022

View article titled, Oxygen incorporation in AlN films grown by plasma-enhanced atomic layer deposition

Includes: Supplementary data

Journal Articles

Electronic surface reconstruction of TiO₂ nanocrystals revealed by resonant inelastic x-ray scattering

Cheng-Hao Chuang, Chieh-Ming Chen, Yu-Cheng Shao, Ping-Hung Yeh, Chih-Ming Chang, Way-Faung Pong, Mukes Kapilashrami, Per-Anders Glans, Sheraz Gul, Gongming Wang, Yat Li, Jin Zhang, Jun Miyawaki, Hideharu Niwa, Yoshihisa Harada, Jin-Ming Chen, Jinghua Guo

J. Vac. Sci. Technol. A 39, 063204 (2021)

https://doi.org/10.1116/6.0001247

Published: September 2021

View article titled, Electronic surface reconstruction of TiO2 nanocrystals revealed by resonant inelastic x-ray scattering

Journal Articles

High resolution synchrotron extended x-ray absorption fine structure and infrared spectroscopy analysis of MBE grown CdTe/InSb epifilms

Devki N. Talwar, Na Lu, Ian T. Ferguson, Zhe Chuan Feng

J. Vac. Sci. Technol. A 39, 063401 (2021)

https://doi.org/10.1116/6.0001145

Published: September 2021

View article titled, High resolution synchrotron extended x-ray absorption fine structure and infrared spectroscopy analysis of MBE grown CdTe/InSb epifilms

Journal Articles

Numerical ellipsometry: A method for selecting a near-minimal infrared measurement set for β-gallium oxide

Frank K. Urban, III, David Barton, Mathias Schubert

J. Vac. Sci. Technol. A 39, 052801 (2021)

https://doi.org/10.1116/6.0001002

Published: July 2021

View article titled, Numerical ellipsometry: A method for selecting a near-minimal infrared measurement set for β-gallium oxide

Journal Articles

Influence of quantum-confined device fabrication on semiconductor-laser theory

Weng W. Chow, Frank Jahnke

J. Vac. Sci. Technol. A 39, 032408 (2021)

https://doi.org/10.1116/6.0000767

Published: March 2021

View article titled, Influence of quantum-confined device fabrication on semiconductor-laser theory

Journal Articles

Mechanism for growth initiation on aminosilane-functionalized SiO₂ during area-selective atomic layer deposition of ZrO₂

Wanxing Xu, Paul C. Lemaire, Kashish Sharma, Ryan J. Gasvoda, Dennis M. Hausmann, Sumit Agarwal

J. Vac. Sci. Technol. A 39, 032402 (2021)

https://doi.org/10.1116/6.0000699

Published: March 2021

View article titled, Mechanism for growth initiation on aminosilane-functionalized SiO2 during area-selective atomic layer deposition of ZrO2

NARROW

Topics

Density functional theory calculations of mechanical and electronic properties of W_1−xTa_xN₆, W_1−xMo_xN₆, and Mo_1−xTa_xN₆ (0 ≤ x ≤ 1) alloys in a hexagonal structure

Atomic layer deposition of Al₂O₃ interlayer for improving AlN growth on silicon substrates

Plasma deposited carbon containing zirconia films as thermal barriers

Need for complementary techniques for reliable characterization of MoS₂-like layers

Physical properties of Zn-Sn-N films governed by the Zn/(Zn + Sn) ratio

Transient photocapacitance spectroscopy of deep-levels in (001) β-Ga₂O₃

Photoresponse of O₂ plasma treated WS₂ monolayers synthesized by chemical vapor deposition

Numerical ellipsometry: A method for selecting a single β-gallium oxide monoclinic crystal orientation able to determine the complete permittivity tensor

Impact of interfacial thickness on Raman intensity profiles and phonon anisotropy in short-period (AlSb)_n/(GaSb)_m superlattices

Effect of impurities on the Raman spectra of spray-coated β-Ga₂O₃ thin films

Characterizations of two-dimensional materials with cryogenic ultrahigh vacuum near-field optical microscopy in the visible range

Relationship between local coordinates and thermal conductivity in amorphous carbon

Assessing thermodynamical properties of Al_1−xGa_xSb alloys and optical modes for Al_1−xGa_xSb/GaAs epifilms and (AlSb)_m/(GaSb)_n superlattices

Optical constants of single-crystalline Ni(100) from 77 to 770 K from ellipsometry measurements

Oxygen incorporation in AlN films grown by plasma-enhanced atomic layer deposition

Electronic surface reconstruction of TiO₂ nanocrystals revealed by resonant inelastic x-ray scattering

High resolution synchrotron extended x-ray absorption fine structure and infrared spectroscopy analysis of MBE grown CdTe/InSb epifilms

Numerical ellipsometry: A method for selecting a near-minimal infrared measurement set for β-gallium oxide

Influence of quantum-confined device fabrication on semiconductor-laser theory

Mechanism for growth initiation on aminosilane-functionalized SiO₂ during area-selective atomic layer deposition of ZrO₂

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