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Journal Articles

Influence of nitriding time on the microstructural evolution, mechanical properties, and tribological performance of Ti–N nitrided layers via microwave plasma nitriding

Junhui Zhang, Zhigang Xu, Peng Gao, Jian Peng, Chuanbin Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033107 (2025)
https://doi.org/10.1116/6.0004530
Published: April 2025
View articletitled, Influence of nitriding time on the microstructural evolution, mechanical properties, and tribological performance of Ti–N nitrided layers via microwave plasma nitriding
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Journal Articles

Epitaxy of high-quality antiferromagnetic metal chromium nitride films with 90° and 40° off-axis magnetron sputtering

Zhiliang Xu, Rongjing Zhai, Jiachang Bi, Ruyi Zhang, Chuyi Ning, Zhangyuan Guo, Yanwei Cao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032707 (2025)
https://doi.org/10.1116/6.0004445
Published: April 2025
View articletitled, Epitaxy of high-quality antiferromagnetic metal chromium nitride films with 90° and 40° off-axis magnetron sputtering
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Journal Articles

Perspective on comparative radiation hardness of Ga2O3 polymorphs

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S. J. Pearton, Fan Ren, Alexander Y. Polyakov, Eugene B. Yakimov, Leonid Chernyak, Aman Haque
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 038501 (2025)
https://doi.org/10.1116/6.0004444
Published: March 2025
View articletitled, Perspective on comparative radiation hardness of Ga2O3 polymorphs
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Journal Articles

Effect of phase transition on structural, dielectric, and electrical properties of pulsed laser deposited Y doped high-k HfO2 thin films

Mangla Nand, P. S. Padhi, Shilpa Tripathi, Yogesh Kumar, Pabitra Sahu, Manvendra Kumar, Anit Dawar, Sunil Ojha, Pankaj Misra, Himanshu Srivastava, S. K. Rai
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 023411 (2025)
https://doi.org/10.1116/6.0004269
Published: March 2025
View articletitled, Effect of phase transition on structural, dielectric, and electrical properties of pulsed laser deposited Y doped high-k HfO2 thin films
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Journal Articles

Kinetics and mechanism of surface plutonium oxycarbide formation

Paul Roussel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 023202 (2025)
https://doi.org/10.1116/6.0004235
Published: January 2025
View articletitled, Kinetics and mechanism of surface plutonium oxycarbide formation
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Journal Articles

Investigating the effects of etching systems and low-temperature thermal processing on hafnium zirconium oxide thin film properties

Wen-Hsi Lee, Edward Kuo, Chia-Nung Hung, Tai-Chen Kuo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 012602 (2025)
https://doi.org/10.1116/6.0004040
Published: December 2024
View articletitled, Investigating the effects of etching systems and low-temperature thermal processing on hafnium zirconium oxide thin film properties
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Journal Articles

Low temperature growth of single-phase and preferentially oriented ɛ-Ga2O3 films on sapphire substrates via atomic layer deposition

Xiangtai Liu, Jiayang Wang, Lu Jin, Jiao Fu, Qin Lu, Shaoqing Wang, Yifan Jia, Zhan Wang, Yunhe Guan, Haifeng Chen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 012402 (2025)
https://doi.org/10.1116/6.0004048
Published: December 2024
View articletitled, Low temperature growth of single-phase and preferentially oriented ɛ-Ga2O3 films on sapphire substrates via atomic layer deposition
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Journal Articles

Effect of Mg content on corrosion resistance of Zn-11Al-XMg coatings

Wenbin Jiang, Yuting Wan, Liang Qi, Zhen Ge, Jinbing Hu, Zhou Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 013104 (2025)
https://doi.org/10.1116/6.0004068
Published: December 2024
View articletitled, Effect of Mg content on corrosion resistance of Zn-11Al-XMg coatings
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Journal Articles

Study on the fabrication of high-quality hafnium oxide thin films using spatial rotated atomic layer deposition and supercritical fluids treatment

Wen-Hsi Lee, Chien-Ching Feng, Guan-Fu Chen, Tai-Chen Kuo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 062409 (2024)
https://doi.org/10.1116/6.0004041
Published: November 2024
View articletitled, Study on the fabrication of high-quality hafnium oxide thin films using spatial rotated atomic layer deposition and supercritical fluids treatment
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Journal Articles

Adhesion layers between piezoelectric and magnetostrictive layers in a MEMS magneto-sensor stack: Influence on the phase transformation of deposited Co/Fe multilayers to magnetostrictive CoxFe1−x phase

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H. Honig, H. Töpfer, P. Schaaf
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063405 (2024)
https://doi.org/10.1116/6.0004071
Published: October 2024
View articletitled, Adhesion layers between piezoelectric and magnetostrictive layers in a MEMS magneto-sensor stack: Influence on the phase transformation of deposited Co/Fe multilayers to magnetostrictive CoxFe1−x phase
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Journal Articles

Regulation of precipitation and its influence on the performances of multicomponent β-Ti-based shape memory alloy through annealing treatment

Yaping Wang, Guohao Zhang, Yanqing Wu, Wei Liu, Yunfei Wang, Xinjian Cao, Xiao Liu, Lun Jiang, Haizhen Wang, Xiaoyang Yi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 062703 (2024)
https://doi.org/10.1116/6.0003904
Published: October 2024
View articletitled, Regulation of precipitation and its influence on the performances of multicomponent β-Ti-based shape memory alloy through annealing treatment
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Journal Articles

In-cycle evolution of thickness and roughness parameters during oxygen plasma enhanced ZnO atomic layer deposition using in situ spectroscopic ellipsometry

Editor’s Pick
Yousra Traouli, Ufuk Kilic, Sema G. Kilic, Matthew Hilfiker, Daniel Schmidt, Stefan Schoeche, Eva Schubert, Mathias Schubert
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 052403 (2024)
https://doi.org/10.1116/6.0003830
Published: September 2024
View articletitled, In-cycle evolution of thickness and roughness parameters during oxygen plasma enhanced ZnO atomic layer deposition using in situ spectroscopic ellipsometry
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Journal Articles

Review of actinide core-level photoemission

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Alaina Thompson, William Limestall, Art Nelson, Daniel T. Olive, Jeff Terry
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 050802 (2024)
https://doi.org/10.1116/6.0003534
Published: July 2024
View articletitled, Review of actinide core-level photoemission
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Journal Articles

Microstructural features, martensitic transformation, and functional properties of multicomponent Ti–Ni based shape memory alloys

Haizhen Wang, Xinnuo Liu, Bowen Jiang, Xinjian Cao, Zhiyong Gao, Xiaoyang Yi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 042704 (2024)
https://doi.org/10.1116/6.0003622
Published: May 2024
View articletitled, Microstructural features, martensitic transformation, and functional properties of multicomponent Ti–Ni based shape memory alloys
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Journal Articles

Effect of high temperature thermohydrogen treatment on the microstructure, martensitic transformation, and mechanical and corrosion behaviors of Ti-V-Al lightweight shape memory alloy

Xiaoyang Yi, Wei Liu, Gaofeng Liu, Yunfei Wang, Weijian Li, Guohao Zhang, Yanqing Wu, Shangzhou Zhang, Haizhen Wang, Bin Sun, Weihong Gao, Xianglong Meng, Zhiyong Gao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033105 (2024)
https://doi.org/10.1116/6.0003550
Published: April 2024
View articletitled, Effect of high temperature thermohydrogen treatment on the microstructure, martensitic transformation, and mechanical and corrosion behaviors of Ti-V-Al lightweight shape memory alloy
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Journal Articles

Molecular beam epitaxy synthesis of In2Se3 films

Cooper A. Voigt, Matthew Reingold, Alex Dube, Lawrence S. Early, Brent K. Wagner, Eric M. Vogel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 032707 (2024)
https://doi.org/10.1116/6.0003508
Published: April 2024
View articletitled, Molecular beam epitaxy synthesis of In2Se3 films
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Includes: Supplementary data
Journal Articles

Intrinsic and extrinsic contributions in the ferroelectric response of chemically synthesized BiFeO3-xPbTiO3 thin films

Layiq Zia, Eesha Tur Razia, G. Hassnain Jaffari, S. Ismat Shah
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023114 (2024)
https://doi.org/10.1116/6.0003371
Published: February 2024
View articletitled, Intrinsic and extrinsic contributions in the ferroelectric response of chemically synthesized BiFeO3-xPbTiO3 thin films
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Journal Articles

Tailoring the performances of Ti-V-Al base shape memory alloys by defects engineering

Yunfei Wang, Wei Liu, Yanqing Wu, Guohao Zhang, Bin Sun, Weihong Gao, Xinxin Feng, Haizhen Wang, Xiaoyang Yi, Xianglong Meng, Zhiyong Gao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 022704 (2024)
https://doi.org/10.1116/6.0003257
Published: February 2024
View articletitled, Tailoring the performances of Ti-V-Al base shape memory alloys by defects engineering
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Journal Articles

Impact of high-power impulse magnetron sputtering pulse width on the nucleation, crystallization, microstructure, and ferroelectric properties of hafnium oxide thin films

Samantha T. Jaszewski, Shelby S. Fields, Ching-Chang Chung, Jacob L. Jones, Keithen G. Orson, Petra Reinke, Jon F. Ihlefeld
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023414 (2024)
https://doi.org/10.1116/6.0003307
Published: February 2024
View articletitled, Impact of high-power impulse magnetron sputtering pulse width on the nucleation, crystallization, microstructure, and ferroelectric properties of hafnium oxide thin films
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Includes: Supplementary data
Journal Articles

Hollow-cathode plasma deposited vanadium oxide films: Metal precursor influence on growth and material properties

Adnan Mohammad, Krishna D. Joshi, Dhan Rana, Saidjafarzoda Ilhom, Barrett Wells, Boris Sinkovic, Ali K. Okyay, Necmi Biyikli
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 012406 (2024)
https://doi.org/10.1116/6.0002988
Published: January 2024
View articletitled, Hollow-cathode plasma deposited vanadium oxide films: Metal precursor influence on growth and material properties
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Includes: Supplementary data