Skip Nav Destination
Update search
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
NARROW
Format
Collections
Topics
Subjects
Journal
Article Type
Issue Section
Date
Availability
Journal Articles
J. Vac. Sci. Technol. A 41, 063103 (2023)
Published: September 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 053411 (2023)
Published: August 2023
Includes: Supplementary data
Journal Articles
Spencer Gellerup, Corey L. Arnold, Christopher Muratore, Nicholas R. Glavin, Nigel D. Shepherd, Andrey A. Voevodin
J. Vac. Sci. Technol. A 41, 053405 (2023)
Published: July 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 043405 (2023)
Published: June 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 043403 (2023)
Published: May 2023
Journal Articles
Adnan Mohammad, Krishna D. Joshi, Dhan Rana, Saidjafarzoda Ilhom, Barrett Wells, Brian Willis, Boris Sinkovic, A. K. Okyay, Necmi Biyikli
J. Vac. Sci. Technol. A 41, 032405 (2023)
Published: March 2023
Includes: Supplementary data
Journal Articles
Yuanfeng Ding, Bingxin Li, Jinshan Yao, Huanhuan Song, Lian Wei, Yang Lu, Junwei Huang, Hongtao Yuan, Hong Lu, Yan-Feng Chen
J. Vac. Sci. Technol. A 41, 023406 (2023)
Published: February 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 022203 (2023)
Published: February 2023
Includes: Supplementary data
Journal Articles
Heshan Yu, Tieren Gao, A. T. N’Diaye, E. Arenholz, Suchismita Sarker, Apurva Mehta, Xiaohang Zhang, Ichiro Takeuchi
J. Vac. Sci. Technol. A 41, 023403 (2023)
Published: February 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 023101 (2023)
Published: January 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 023402 (2023)
Published: January 2023
Journal Articles
William Nunn, Abinash Kumar, Rui Zu, Bailey Nebgen, Shukai Yu, Anusha Kamath Manjeshwar, Venkatraman Gopalan, James M. LeBeau, Richard D. James, Bharat Jalan
J. Vac. Sci. Technol. A 41, 022701 (2023)
Published: January 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 013404 (2023)
Published: December 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 063404 (2022)
Published: October 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 043406 (2022)
Published: June 2022
Journal Articles
Michael Snure, Michael J. Motala, Timothy A. Prusnick, Evan M. Smith, David Moore, Christopher Muratore, Shivashankar R. Vangala, Nicholas R. Glavin
J. Vac. Sci. Technol. A 40, 042202 (2022)
Published: June 2022
Journal Articles
Chengyang Zhang, Ravindra Singh Bisht, Amin Nozariasbmarz, Arnob Saha, Chan Su Han, Qi Wang, Yifan Yuan, Abhronil Sengupta, Shashank Priya, Shriram Ramanathan
J. Vac. Sci. Technol. A 40, 043405 (2022)
Published: June 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 033202 (2022)
Published: March 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 033201 (2022)
Published: March 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 033401 (2022)
Published: March 2022
Includes: Supplementary data
1