Skip Nav Destination
Update search
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
NARROW
Format
Collections
Topics
Subjects
Journal
Article Type
Issue Section
Date
Availability
Journal Articles
J. Vac. Sci. Technol. A 43, 023409 (2025)
Published: February 2025
Journal Articles
J. Vac. Sci. Technol. A 43, 022202 (2025)
Published: February 2025
Journal Articles
J. Vac. Sci. Technol. A 43, 022701 (2025)
Published: January 2025
Journal Articles
Harshil Kashyap, Ping-Che Lee, Kisung Chae, Matthias Passlack, Ajay K. Yadav, Keith Wong, Srini Nemani, Ellie Yieh, Jeffrey Spiegelman, Kyeongjae Cho, Asif Islam Khan, Andrew C. Kummel
J. Vac. Sci. Technol. A 43, 022401 (2025)
Published: January 2025
Journal Articles
J. Vac. Sci. Technol. A 42, 063408 (2024)
Published: November 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 023208 (2024)
Published: February 2024
Journal Articles
J. Vac. Sci. Technol. A 41, 032702 (2023)
Published: March 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 022704 (2023)
Published: February 2023
Journal Articles
Heshan Yu, Tieren Gao, A. T. N’Diaye, E. Arenholz, Suchismita Sarker, Apurva Mehta, Xiaohang Zhang, Ichiro Takeuchi
J. Vac. Sci. Technol. A 41, 023403 (2023)
Published: February 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 023402 (2023)
Published: January 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 013403 (2023)
Published: December 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 043206 (2022)
Published: June 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 033206 (2022)
Published: April 2022
Journal Articles
Hideo Sato, Neha Pachauri, Sahar Keshavarz, Chhatra R. Joshi, Hwachol Lee, Gary J. Mankey, Patrick LeClair
J. Vac. Sci. Technol. A 40, 023406 (2022)
Published: February 2022
Journal Articles
Jeyanthinath Mayandi, Matthias Schrade, Ponniah Vajeeston, Marit Stange, Anna M. Lind, Martin F. Sunding, Jonas Deuermeier, Elvira Fortunato, Ole M. Løvvik, Alexander G. Ulyashin, Spyros Diplas, Patricia A. Carvalho, Terje G. Finstad
J. Vac. Sci. Technol. A 40, 023402 (2022)
Published: January 2022
Includes: Supplementary data
Journal Articles
Cheng-Tai Kuo, Giuseppina Conti, Julien E. Rault, Claus M. Schneider, Slavomír Nemšák, Alexander X. Gray
J. Vac. Sci. Technol. A 40, 020801 (2022)
Published: January 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 010807 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. A 40, 010802 (2022)
Published: December 2021
Journal Articles
Alessandro R. Mazza, Xingyao Gao, Daniel J. Rossi, Brianna L. Musico, Tyler W. Valentine, Zachary Kennedy, Jie Zhang, Jason Lapano, Veerle Keppens, Robert G. Moore, Matthew Brahlek, Christina M. Rost, Thomas Z. Ward
J. Vac. Sci. Technol. A 40, 013404 (2022)
Published: November 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 063209 (2021)
Published: September 2021
Includes: Supplementary data
1