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Journal Articles

Optimized thermoelectric performance of flexible Bi_0.5Sb_1.5Te₃ thin film through PbTe incorporation

Rensheng Zhang, Xujiang Tian, Shaojun Liang, Hanming Zhu, Song Yue

J. Vac. Sci. Technol. A 42, 053409 (2024)

https://doi.org/10.1116/6.0003812

Published: August 2024

View article titled, Optimized thermoelectric performance of flexible Bi0.5Sb1.5Te3 thin film through PbTe incorporation

Includes: Supplementary data

Journal Articles

Nitrogen-incorporated tetrahedral amorphous carbon optically transparent thin film electrode

Nina Baule, Lars Haubold, Thomas Schuelke

J. Vac. Sci. Technol. A 42, 053103 (2024)

https://doi.org/10.1116/6.0003786

Published: July 2024

View article titled, Nitrogen-incorporated tetrahedral amorphous carbon optically transparent thin film electrode

Journal Articles

Tuning the emission wavelength by varying the Sb composition in InGaAs/GaAsSb “W” quantum wells grown on GaAs (001) substrates

Zon, Tzu-Wei Lo, Zhen-Lun Li, Samatcha Vorathamrong, Chao-Chia Cheng, Chun-Nien Liu, Chun-Te Chiang, Li-Wei Hung, Ming-Sen Hsu, Wei-Sheng Liu, Jen-Inn Chyi, Charles W. Tu

J. Vac. Sci. Technol. A 42, 032709 (2024)

https://doi.org/10.1116/6.0003501

Published: April 2024

View article titled, Tuning the emission wavelength by varying the Sb composition in InGaAs/GaAsSb “W” quantum wells grown on GaAs (001) substrates

Journal Articles

Observation of an abrupt 3D-2D morphological transition in thin Al layers grown by MBE on InGaAs surface

A. Elbaroudy, B. Khromets, F. Sfigakis, E. Bergeron, Y. Shi, M. C. A. Tam, G. Nichols, T. Blaikie, J. Baugh, Z. R. Wasilewski

J. Vac. Sci. Technol. A 42, 032706 (2024)

https://doi.org/10.1116/6.0003459

Published: April 2024

View article titled, Observation of an abrupt 3D-2D morphological transition in thin Al layers grown by MBE on InGaAs surface

Journal Articles

Fine tuning of Nb-incorporated TiO₂ thin films by atomic layer deposition and application as efficient electron transport layer in perovskite solar cells

Thomas Vincent, Damien Coutancier, Pia Dally, Mirella Al Katrib, Mathieu Frégnaux, Stefania Cacovich, Frédérique Donsanti, Armelle Yaïche, Karim Medjoubi, Thomas Guillemot, Marion Provost, Jean Rousset, Muriel Bouttemy, Nathanaelle Schneider

J. Vac. Sci. Technol. A 42, 032802 (2024)

https://doi.org/10.1116/6.0003351

Published: March 2024

View article titled, Fine tuning of Nb-incorporated TiO2 thin films by atomic layer deposition and application as efficient electron transport layer in perovskite solar cells

Includes: Supplementary data

Journal Articles

Electrical conductivity, luminescence, and deep acceptor levels in β-Ga₂O₃-In₂O₃ polycrystalline solid solution doped with Zr⁴⁺ or Ca²⁺ ions

A. Luchechko, V. Vasyltsiv, M. Kushlyk, L. Kostyk, D. Slobodzyan

J. Vac. Sci. Technol. A 42, 033202 (2024)

https://doi.org/10.1116/6.0003466

Published: March 2024

View article titled, Electrical conductivity, luminescence, and deep acceptor levels in β-Ga2O3-In2O3 polycrystalline solid solution doped with Zr4+ or Ca2+ ions

Journal Articles

High-performance a-Ga₂O₃ solar-blind photodetectors by pulsed magnetron sputtering deposition

Difei Xue, Peiwen Lv, Kai Peng, Qiang Hu, Chenlong Chen

J. Vac. Sci. Technol. A 42, 033403 (2024)

https://doi.org/10.1116/6.0003442

Published: March 2024

View article titled, High-performance a-Ga2O3 solar-blind photodetectors by pulsed magnetron sputtering deposition

Journal Articles

Spin-related negative magnetoresistance in germanium films

Zhaoguo Li, Yuechuan Luo, Jia Li, Jicheng Zhang

J. Vac. Sci. Technol. A 42, 023422 (2024)

https://doi.org/10.1116/6.0003337

Published: February 2024

View article titled, Spin-related negative magnetoresistance in germanium films

Journal Articles

High crystalline quality homoepitaxial Si-doped β-Ga₂O₃(010) layers with reduced structural anisotropy grown by hot-wall MOCVD

D. Gogova, D. Q. Tran, V. Stanishev, V. Jokubavicius, L. Vines, M. Schubert, R. Yakimova, P. P. Paskov, V. Darakchieva

J. Vac. Sci. Technol. A 42, 022708 (2024)

https://doi.org/10.1116/6.0003424

Published: February 2024

View article titled, High crystalline quality homoepitaxial Si-doped β-Ga2O3(010) layers with reduced structural anisotropy grown by hot-wall MOCVD

Journal Articles

Revisitation of reactive direct current magnetron sputtering discharge: Investigation of Mg–CF₄, Mg–O₂, and Ti–O₂ discharges by probe measurements

Eiji Kusano

J. Vac. Sci. Technol. A 42, 023104 (2024)

https://doi.org/10.1116/6.0003244

Published: February 2024

View article titled, Revisitation of reactive direct current magnetron sputtering discharge: Investigation of Mg–CF4, Mg–O2, and Ti–O2 discharges by probe measurements

Journal Articles

Germanium surface cleaning and ALD of a protective boron nitride overlayer

Olatomide B. Omolere, Qasim Adesope, Samar Alhowity, Tochi L. Agbara, Jeffry A. Kelber

J. Vac. Sci. Technol. A 41, 062411 (2023)

https://doi.org/10.1116/6.0002928

Published: November 2023

View article titled, Germanium surface cleaning and ALD of a protective boron nitride overlayer

Includes: Supplementary data

Journal Articles

Ternary Ga–Sn–O and quaternary In–Ga–Sn–O channel based thin film transistors fabricated by plasma-enhanced atomic layer deposition

Jong Hyeon Won, Hyeonhui Jo, Pil Ju Youn, Bo Keun Park, Taek-Mo Chung, Jeong Hwan Han

J. Vac. Sci. Technol. A 41, 062406 (2023)

https://doi.org/10.1116/6.0003004

Published: October 2023

View article titled, Ternary Ga–Sn–O and quaternary In–Ga–Sn–O channel based thin film transistors fabricated by plasma-enhanced atomic layer deposition

Includes: Supplementary data

Journal Articles

Plasma deposited carbon containing zirconia films as thermal barriers

Vitali Bedarev, Philipp A. Maaß, Anna Thewes, Marc Böke, Achim von Keudell

J. Vac. Sci. Technol. A 41, 053001 (2023)

https://doi.org/10.1116/6.0002745

Published: July 2023

View article titled, Plasma deposited carbon containing zirconia films as thermal barriers

Journal Articles

Effect of structure on semiconducting properties of a small molecule n-type organic semiconductor: Phenyl-C61-butyric acid methyl ester

Zhaojing Gao, Dieudonné Niyonkuru, Arthur Yelon, Clara Santato

J. Vac. Sci. Technol. A 41, 043405 (2023)

https://doi.org/10.1116/6.0002410

Published: June 2023

View article titled, Effect of structure on semiconducting properties of a small molecule n-type organic semiconductor: Phenyl-C61-butyric acid methyl ester

Includes: Supplementary data

Journal Articles

Effect of drift layer doping and NiO parameters in achieving 8.9 kV breakdown in 100 μm diameter and 4 kV/4 A in 1 mm diameter NiO/β-Ga₂O₃ rectifiers

Jian-Sian Li, Chao-Ching Chiang, Xinyi Xia, Hsiao-Hsuan Wan, Fan Ren, S. J. Pearton

J. Vac. Sci. Technol. A 41, 043404 (2023)

https://doi.org/10.1116/6.0002722

Published: June 2023

View article titled, Effect of drift layer doping and NiO parameters in achieving 8.9 kV breakdown in 100 μm diameter and 4 kV/4 A in 1 mm diameter NiO/β-Ga2O3 rectifiers

Journal Articles

Selective generation of reactive oxygen species in plasma-activated water using CO₂ plasma

Vikas Rathore, Sudhir Kumar Nema

J. Vac. Sci. Technol. A 41, 043001 (2023)

https://doi.org/10.1116/6.0002460

Published: May 2023

View article titled, Selective generation of reactive oxygen species in plasma-activated water using CO2 plasma

Journal Articles

Metalorganic chemical vapor deposition of (100) β-Ga₂O₃ on on-axis Ga₂O₃ substrates

Lingyu Meng, A F M Anhar Uddin Bhuiyan, Zixuan Feng, Hsien-Lien Huang, Jinwoo Hwang, Hongping Zhao

J. Vac. Sci. Technol. A 40, 062706 (2022)

https://doi.org/10.1116/6.0002179

Published: November 2022

View article titled, Metalorganic chemical vapor deposition of (100) β-Ga2O3 on on-axis Ga2O3 substrates

Journal Articles

Variability of band alignment between WS₂ and SiO₂: Intrinsic versus extrinsic contributions

Gilles Delie, Peter M. Litwin, Gaby C. Abad, Stephen J. McDonnell, Daniele Chiappe, Valeri V. Afanasiev

J. Vac. Sci. Technol. A 40, 062201 (2022)

https://doi.org/10.1116/6.0001987

Published: September 2022

View article titled, Variability of band alignment between WS2 and SiO2: Intrinsic versus extrinsic contributions

Journal Articles

Simple thermal vapor deposition process for and characterization of n-type indium oxysulfide thin films

Ashwin Jayaraman, Sang Bok Kim, Luke M. Davis, Xiabing Lou, Xizhu Zhao, Roy G. Gordon

J. Vac. Sci. Technol. A 40, 062402 (2022)

https://doi.org/10.1116/6.0001997

Published: September 2022

View article titled, Simple thermal vapor deposition process for and characterization of n-type indium oxysulfide thin films

Includes: Supplementary data

Journal Articles

Conductive n-type gallium nitride thin films prepared by sputter deposition

Patrick Loretz, Thomas Tschirky, Fabio Isa, Jörg Patscheider, Matthias Trottmann, Adrian Wichser, Jacopo Pedrini, Emiliano Bonera, Fabio Pezzoli, Dominik Jaeger

J. Vac. Sci. Technol. A 40, 042703 (2022)

https://doi.org/10.1116/6.0001623

Published: June 2022

View article titled, Conductive n-type gallium nitride thin films prepared by sputter deposition

NARROW

Topics

Optimized thermoelectric performance of flexible Bi_0.5Sb_1.5Te₃ thin film through PbTe incorporation

Nitrogen-incorporated tetrahedral amorphous carbon optically transparent thin film electrode

Tuning the emission wavelength by varying the Sb composition in InGaAs/GaAsSb “W” quantum wells grown on GaAs (001) substrates

Observation of an abrupt 3D-2D morphological transition in thin Al layers grown by MBE on InGaAs surface

Fine tuning of Nb-incorporated TiO₂ thin films by atomic layer deposition and application as efficient electron transport layer in perovskite solar cells

Electrical conductivity, luminescence, and deep acceptor levels in β-Ga₂O₃-In₂O₃ polycrystalline solid solution doped with Zr⁴⁺ or Ca²⁺ ions

High-performance a-Ga₂O₃ solar-blind photodetectors by pulsed magnetron sputtering deposition

Spin-related negative magnetoresistance in germanium films

High crystalline quality homoepitaxial Si-doped β-Ga₂O₃(010) layers with reduced structural anisotropy grown by hot-wall MOCVD

Revisitation of reactive direct current magnetron sputtering discharge: Investigation of Mg–CF₄, Mg–O₂, and Ti–O₂ discharges by probe measurements

Germanium surface cleaning and ALD of a protective boron nitride overlayer

Ternary Ga–Sn–O and quaternary In–Ga–Sn–O channel based thin film transistors fabricated by plasma-enhanced atomic layer deposition

Plasma deposited carbon containing zirconia films as thermal barriers

Effect of structure on semiconducting properties of a small molecule n-type organic semiconductor: Phenyl-C61-butyric acid methyl ester

Effect of drift layer doping and NiO parameters in achieving 8.9 kV breakdown in 100 μm diameter and 4 kV/4 A in 1 mm diameter NiO/β-Ga₂O₃ rectifiers

Selective generation of reactive oxygen species in plasma-activated water using CO₂ plasma

Metalorganic chemical vapor deposition of (100) β-Ga₂O₃ on on-axis Ga₂O₃ substrates

Variability of band alignment between WS₂ and SiO₂: Intrinsic versus extrinsic contributions

Simple thermal vapor deposition process for and characterization of n-type indium oxysulfide thin films

Conductive n-type gallium nitride thin films prepared by sputter deposition

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