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Journal Articles

Revisitation of reactive direct current magnetron sputtering discharge: Investigation of Mg–CF₄, Mg–O₂, and Ti–O₂ discharges by probe measurements

Eiji Kusano

J. Vac. Sci. Technol. A 42, 023104 (2024)

https://doi.org/10.1116/6.0003244

Published: February 2024

View article titled, Revisitation of reactive direct current magnetron sputtering discharge: Investigation of Mg–CF4, Mg–O2, and Ti–O2 discharges by probe measurements

Journal Articles

Erratum: “Dark current–voltage characteristics of vacuum deposited multilayer amorphous selenium-alloy detectors and the effect of x-ray irradiation” [J. Vac. Sci. Technol. A 37, 061501 (2019)]

Joel B. Frey, Kalaivani Sadasivam, George Belev, Habib Mani, Luc Laperriere, Safa Kasap

J. Vac. Sci. Technol. A 39, 047001 (2021)

https://doi.org/10.1116/6.0001116

Published: May 2021

View article titled, Erratum: “Dark current–voltage characteristics of vacuum deposited multilayer amorphous selenium-alloy detectors and the effect of x-ray irradiation” [J. Vac. Sci. Technol. A 37, 061501 (2019)]

Journal Articles

On the response of gamma irradiation on atomic layer deposition-grown β-Ga₂O₃ films and Au-β-Ga₂O₃-Au deep ultraviolet solar-blind photodetectors

Chun-Ying Huang, Guan-Yu Lin, Yen-Yang Liu, Fu-Yuan Chang, Pei-Te Lin, Feng-Hsuan Hsu, Yu-Hsiang Peng, Zi-Ling Huang, Tai-Yuan Lin, Jyh-Rong Gong

J. Vac. Sci. Technol. A 38, 062409 (2020)

https://doi.org/10.1116/6.0000512

Published: November 2020

View article titled, On the response of gamma irradiation on atomic layer deposition-grown β-Ga2O3 films and Au-β-Ga2O3-Au deep ultraviolet solar-blind photodetectors

Journal Articles

High responsivity tin gallium oxide Schottky ultraviolet photodetectors

Partha Mukhopadhyay, Winston V. Schoenfeld

J. Vac. Sci. Technol. A 38, 013403 (2020)

https://doi.org/10.1116/1.5128911

Published: December 2019

View article titled, High responsivity tin gallium oxide Schottky ultraviolet photodetectors

Journal Articles

Dark current–voltage characteristics of vacuum deposited multilayer amorphous selenium-alloy detectors and the effect of x-ray irradiation

Joel B. Frey, Kalaivani Sadasivam, George Belev, Habib Mani, Luc Laperriere, Safa Kasap

J. Vac. Sci. Technol. A 37, 061501 (2019)

https://doi.org/10.1116/1.5121197

Published: September 2019

View article titled, Dark current–voltage characteristics of vacuum deposited multilayer amorphous selenium-alloy detectors and the effect of x-ray irradiation

Journal Articles

Evaluation of grating realized via pulse current electroplating combined with atomic layer deposition as an x-ray grating interferometer

Tae-Eun Song, Seho Lee, Hee Han, Soonyoung Jung, Soo-Hyun Kim, Min Jun Kim, Seung Wook Lee, Chi Won Ahn

J. Vac. Sci. Technol. A 37, 030903 (2019)

https://doi.org/10.1116/1.5080954

Published: April 2019

View article titled, Evaluation of grating realized via pulse current electroplating combined with atomic layer deposition as an x-ray grating interferometer

Journal Articles

Role of the reactive sputtering deposition power in the phase control of cobalt oxide films

Nilton Francelosi Azevedo Neto, Douglas M. G. Leite, Paulo N. Lisboa-Filho, José H. D. da Silva

J. Vac. Sci. Technol. A 36, 061512 (2018)

https://doi.org/10.1116/1.5046952

Published: November 2018

View article titled, Role of the reactive sputtering deposition power in the phase control of cobalt oxide films

Journal Articles

Electrodeposition of metallic Cu from CuCl gas source transported into ionic liquid in a vacuum

Yosuke Sato, Shingo Maruyama, Yuji Matsumoto

J. Vac. Sci. Technol. A 36, 031516 (2018)

https://doi.org/10.1116/1.5019959

Published: May 2018

View article titled, Electrodeposition of metallic Cu from CuCl gas source transported into ionic liquid in a vacuum

Journal Articles

High-rate sputter deposition of electrochromic nickel oxide thin films using substrate cooling and water vapor injection

Yoshio Abe, Shun Yamauchi, Midori Kawamura, Kyung Ho Kim, Takayuki Kiba

J. Vac. Sci. Technol. A 36, 02C102 (2018)

https://doi.org/10.1116/1.4998209

Published: December 2017

View article titled, High-rate sputter deposition of electrochromic nickel oxide thin films using substrate cooling and water vapor injection

Journal Articles

Hydrogen passivation of silicon/silicon oxide interface by atomic layer deposited hafnium oxide and impact of silicon oxide underlayer

Evan Oudot, Mickael Gros-Jean, Kristell Courouble, Francois Bertin, Romain Duru, Névine Rochat, Christophe Vallée

J. Vac. Sci. Technol. A 36, 01A116 (2018)

https://doi.org/10.1116/1.4999561

Published: December 2017

View article titled, Hydrogen passivation of silicon/silicon oxide interface by atomic layer deposited hafnium oxide and impact of silicon oxide underlayer

Journal Articles

Time-resolved ion flux and impedance measurements for process characterization in reactive high-power impulse magnetron sputtering

Daniel Lundin, Martin Čada, Zdenĕk Hubička

J. Vac. Sci. Technol. A 34, 041305 (2016)

https://doi.org/10.1116/1.4953033

Published: June 2016

View article titled, Time-resolved ion flux and impedance measurements for process characterization in reactive high-power impulse magnetron sputtering

Journal Articles

Ultraviolet photodetector based on Mg_xZn_1-xO films using plasma-enhanced atomic layer deposition

Yu-Chang Lin, Hsin-Ying Lee, Ching-Ting Lee

J. Vac. Sci. Technol. A 34, 01A141 (2016)

https://doi.org/10.1116/1.4938074

Published: December 2015

View article titled, Ultraviolet photodetector based on MgxZn1-xO films using plasma-enhanced atomic layer deposition

Journal Articles

Effect of hydrogen peroxide pretreatment on ZnO-based metal–semiconductor–metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition

Yu-Chang Lin, Hsin-Ying Lee, Tsung-Hsin Lee

J. Vac. Sci. Technol. A 34, 01A110 (2016)

https://doi.org/10.1116/1.4933169

Published: October 2015

View article titled, Effect of hydrogen peroxide pretreatment on ZnO-based metal–semiconductor–metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition

Journal Articles

Performance enhancement of GaN metal–semiconductor–metal ultraviolet photodetectors by insertion of ultrathin interfacial HfO₂ layer

Manoj Kumar, Burak Tekcan, Ali Kemal Okyay

J. Vac. Sci. Technol. A 33, 021204 (2015)

https://doi.org/10.1116/1.4905735

Published: January 2015

View article titled, Performance enhancement of GaN metal–semiconductor–metal ultraviolet photodetectors by insertion of ultrathin interfacial HfO2 layer

Journal Articles

Preparation of scanning tunneling microscopy tips using pulsed alternating current etching

Victor A. Valencia, Avesh A. Thaker, Jonathan Derouin, Damian N. Valencia, Rachael G. Farber, Dana A. Gebel, Daniel R. Killelea

J. Vac. Sci. Technol. A 33, 023001 (2015)

https://doi.org/10.1116/1.4904347

Published: December 2014

View article titled, Preparation of scanning tunneling microscopy tips using pulsed alternating current etching

Journal Articles

Electronic and optical device applications of hollow cathode plasma assisted atomic layer deposition based GaN thin films

Sami Bolat, Burak Tekcan, Cagla Ozgit-Akgun, Necmi Biyikli, Ali Kemal Okyay

J. Vac. Sci. Technol. A 33, 01A143 (2015)

https://doi.org/10.1116/1.4903365

Published: December 2014

View article titled, Electronic and optical device applications of hollow cathode plasma assisted atomic layer deposition based GaN thin films

Journal Articles

Power coupling and utilization efficiencies of silicon-depositing plasmas in mixtures of H₂, SiH₄, Si₂H₆, and Si₃H₈

Mark A. Sobolewski, Robert G. Ridgeway, Mark D. Bitner, Dino Sinatore, Patrick T. Hurley

J. Vac. Sci. Technol. A 32, 041307 (2014)

https://doi.org/10.1116/1.4885368

Published: June 2014

View article titled, Power coupling and utilization efficiencies of silicon-depositing plasmas in mixtures of H2, SiH4, Si2H6, and Si3H8

Journal Articles

Use of non evaporable getter pumps to ensure long term performances of high quantum efficiency photocathodes

Daniele Sertore, Paolo Michelato, Laura Monaco, Paolo Manini, Fabrizio Siviero

J. Vac. Sci. Technol. A 32, 031602 (2014)

https://doi.org/10.1116/1.4867488

Published: March 2014

View article titled, Use of non evaporable getter pumps to ensure long term performances of high quantum efficiency photocathodes

Journal Articles

On the possibility to grow zinc oxide-based transparent conducting oxide films by hot-wire chemical vapor deposition

Adulfas Abrutis, Laimis Silimavicus, Virgaudas Kubilius, Tomas Murauskas, Zita Saltyte, Sabina Kuprenaite, Valentina Plausinaitiene

J. Vac. Sci. Technol. A 32, 020602 (2014)

https://doi.org/10.1116/1.4842695

Published: December 2013

View article titled, On the possibility to grow zinc oxide-based transparent conducting oxide films by hot-wire chemical vapor deposition

Journal Articles

Modeling of the effects of charge transport on voltage-dependent photocurrent in ultrathin CdTe solar cells

Salman M. Arnab, M. Z. Kabir

J. Vac. Sci. Technol. A 31, 061201 (2013)

https://doi.org/10.1116/1.4813323

Published: July 2013

View article titled, Modeling of the effects of charge transport on voltage-dependent photocurrent in ultrathin CdTe solar cells

NARROW

Topics

Revisitation of reactive direct current magnetron sputtering discharge: Investigation of Mg–CF₄, Mg–O₂, and Ti–O₂ discharges by probe measurements

Erratum: “Dark current–voltage characteristics of vacuum deposited multilayer amorphous selenium-alloy detectors and the effect of x-ray irradiation” [J. Vac. Sci. Technol. A 37, 061501 (2019)]

On the response of gamma irradiation on atomic layer deposition-grown β-Ga₂O₃ films and Au-β-Ga₂O₃-Au deep ultraviolet solar-blind photodetectors

High responsivity tin gallium oxide Schottky ultraviolet photodetectors

Dark current–voltage characteristics of vacuum deposited multilayer amorphous selenium-alloy detectors and the effect of x-ray irradiation

Evaluation of grating realized via pulse current electroplating combined with atomic layer deposition as an x-ray grating interferometer

Role of the reactive sputtering deposition power in the phase control of cobalt oxide films

Electrodeposition of metallic Cu from CuCl gas source transported into ionic liquid in a vacuum

High-rate sputter deposition of electrochromic nickel oxide thin films using substrate cooling and water vapor injection

Hydrogen passivation of silicon/silicon oxide interface by atomic layer deposited hafnium oxide and impact of silicon oxide underlayer

Time-resolved ion flux and impedance measurements for process characterization in reactive high-power impulse magnetron sputtering

Ultraviolet photodetector based on Mg_xZn_1-xO films using plasma-enhanced atomic layer deposition

Effect of hydrogen peroxide pretreatment on ZnO-based metal–semiconductor–metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition

Performance enhancement of GaN metal–semiconductor–metal ultraviolet photodetectors by insertion of ultrathin interfacial HfO₂ layer

Preparation of scanning tunneling microscopy tips using pulsed alternating current etching

Electronic and optical device applications of hollow cathode plasma assisted atomic layer deposition based GaN thin films

Power coupling and utilization efficiencies of silicon-depositing plasmas in mixtures of H₂, SiH₄, Si₂H₆, and Si₃H₈

Use of non evaporable getter pumps to ensure long term performances of high quantum efficiency photocathodes

On the possibility to grow zinc oxide-based transparent conducting oxide films by hot-wire chemical vapor deposition

Modeling of the effects of charge transport on voltage-dependent photocurrent in ultrathin CdTe solar cells

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