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Journal Articles

Sputter-deposited zirconium doped nickel-aluminide coatings for high-temperature oxidation-resistant applications

Sunil Kumar Tiwari, Akula Umamaheswara Rao, Archana Singh Kharb, Piyush Chandra Verma, Paritosh Dubey, Vipin Chawla, Neha Sardana, Sanjeev Kumar, Devesh Kumar Avasthi, Amit Kumar Chawla
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053408 (2024)
https://doi.org/10.1116/6.0003848
Published: August 2024
View article titled, Sputter-deposited zirconium doped nickel-aluminide coatings for high-temperature oxidation-resistant applications
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Journal Articles

Nitrogen-incorporated tetrahedral amorphous carbon optically transparent thin film electrode

Nina Baule, Lars Haubold, Thomas Schuelke
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053103 (2024)
https://doi.org/10.1116/6.0003786
Published: July 2024
View article titled, Nitrogen-incorporated tetrahedral amorphous carbon optically transparent thin film electrode
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Journal Articles

Controlling electron and hole concentration in MoS2 through scalable plasma processes

Christopher M. Smyth, Taisuke Ohta, Stanley S. Chou, Tzu-Ming Lu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 042204 (2024)
https://doi.org/10.1116/6.0003486
Published: June 2024
View article titled, Controlling electron and hole concentration in MoS<sub>2</sub> through scalable plasma processes
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Journal Articles

Microstructural evolution and strengthening behavior induced by N addition in TiVCrAl medium entropy alloy films

Z. Y. Zhang, L. Wang, Y. J. Ma, Y. W. Zhang, X. C. Shen, X. Hua, G. J. Li, Z. H. Cao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043410 (2024)
https://doi.org/10.1116/6.0003625
Published: June 2024
View article titled, Microstructural evolution and strengthening behavior induced by N addition in TiVCrAl medium entropy alloy films
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Journal Articles

Stability investigation of Eu3+ doped CaF2 thin film with ZnO coating under electron beam irradiation

R. A. A. Abdallah, R. E. Kroon, E. Coetsee, E. H. H. Hasabeldaim, H. C. Swart
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033203 (2024)
https://doi.org/10.1116/6.0003363
Published: March 2024
View article titled, Stability investigation of Eu<sup>3+</sup> doped CaF<sub>2</sub> thin film with ZnO coating under electron beam irradiation
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Journal Articles

Electrical conductivity, luminescence, and deep acceptor levels in β-Ga2O3-In2O3 polycrystalline solid solution doped with Zr4+ or Ca2+ ions

A. Luchechko, V. Vasyltsiv, M. Kushlyk, L. Kostyk, D. Slobodzyan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033202 (2024)
https://doi.org/10.1116/6.0003466
Published: March 2024
View article titled, Electrical conductivity, luminescence, and deep acceptor levels in <em>β</em>-Ga<sub>2</sub>O<sub>3</sub>-In<sub>2</sub>O<sub>3</sub> polycrystalline solid solution doped with Zr<sup>4+</sup> or Ca<sup>2+</sup> ions
Open the PDF for Electrical conductivity, luminescence, and deep acceptor levels in <em>β</em>-Ga<sub>2</sub>O<sub>3</sub>-In<sub>2</sub>O<sub>3</sub> polycrystalline solid solution doped with Zr<sup>4+</sup> or Ca<sup>2+</sup> ions in another window
Journal Articles

Radiation damage effects on electronic and optical properties of β-Ga2O3 from first-principles

Xiaoning Zhang, Xi Liang, Xing Li, Yuan Li, Jia-Yue Yang, Linhua Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033201 (2024)
https://doi.org/10.1116/6.0003430
Published: March 2024
View article titled, Radiation damage effects on electronic and optical properties of <em>β</em>-Ga<sub>2</sub>O<sub>3</sub> from first-principles
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Includes: Supplementary data
Journal Articles

High crystalline quality homoepitaxial Si-doped β-Ga2O3(010) layers with reduced structural anisotropy grown by hot-wall MOCVD

D. Gogova, D. Q. Tran, V. Stanishev, V. Jokubavicius, L. Vines, M. Schubert, R. Yakimova, P. P. Paskov, V. Darakchieva
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 022708 (2024)
https://doi.org/10.1116/6.0003424
Published: February 2024
View article titled, High crystalline quality homoepitaxial Si-doped <em>β</em>-Ga<sub>2</sub>O<sub>3</sub>(010) layers with reduced structural anisotropy grown by hot-wall MOCVD
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Journal Articles

Spinel LiGa5O8 prospects as ultra-wideband-gap semiconductor: Band structure, optical properties, and doping

Walter R. L. Lambrecht
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 022705 (2024)
https://doi.org/10.1116/6.0003117
Published: February 2024
View article titled, Spinel LiGa<sub>5</sub>O<sub>8</sub> prospects as ultra-wideband-gap semiconductor: Band structure, optical properties, and doping
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Journal Articles

Growth of p-doped 2D- Mo S 2 on A l 2 O 3 from spatial atomic layer deposition

André Maas, Kissan Mistry, Stephan Sleziona, Abdullah H. Alshehri, Hatameh Asgarimoghaddam, Kevin P. Musselman, Marika Schleberger
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 022202 (2024)
https://doi.org/10.1116/6.0003248
Published: February 2024
View article titled, Growth of p-doped 2D- Mo S 2 on A l 2 O 3 from spatial atomic layer deposition
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Includes: Supplementary data
Journal Articles

Composition dependence of intrinsic surface states and Fermi-level pinning at ternary AlxGa1−xN m-plane surfaces

Editor’s Pick
Lars Freter, Liverios Lymperakis, Michael Schnedler, Holger Eisele, Lei Jin, Jianxun Liu, Qian Sun, Rafal E. Dunin-Borkowski, Philipp Ebert
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023202 (2024)
https://doi.org/10.1116/6.0003225
Published: January 2024
View article titled, Composition dependence of intrinsic surface states and Fermi-level pinning at ternary Al<sub><em>x</em></sub>Ga<sub>1−<em>x</em></sub>N <em>m</em>-plane surfaces
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Journal Articles

Polarized photoluminescence from Sn, Fe, and unintentionally doped β-Ga2O3

Jacqueline Cooke, Minhan Lou, Michael A. Scarpulla, Berardi Sensale-Rodriguez
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 022801 (2024)
https://doi.org/10.1116/6.0003216
Published: January 2024
View article titled, Polarized photoluminescence from Sn, Fe, and unintentionally doped β-Ga<sub>2</sub>O<sub>3</sub>
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Includes: Supplementary data
Journal Articles

Formation of ZnWO4/WO3 composite film by RF magnetron sputtering and calcination

Sho Kakuta, Takeru Okada
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 013411 (2024)
https://doi.org/10.1116/6.0003180
Published: January 2024
View article titled, Formation of ZnWO<sub>4</sub>/WO<sub>3</sub> composite film by RF magnetron sputtering and calcination
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Journal Articles

Recombination mechanism of heavily Be-doped GaAsN by time-resolved photoluminescence

Takashi Tsukasaki, Hisashi Sumikura, Takuma Fujimoto, Miki Fujita, Toshiki Makimoto
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052702 (2023)
https://doi.org/10.1116/6.0002522
Published: July 2023
View article titled, Recombination mechanism of heavily Be-doped GaAsN by time-resolved photoluminescence
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Journal Articles

Performance and stability of Al-doped HfGaO thin-film transistors deposited by vapor cooling condensation system

Hsin-Ying Lee, Guo-Long Zhu, Ching-Ting Lee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053406 (2023)
https://doi.org/10.1116/6.0002826
Published: July 2023
View article titled, Performance and stability of Al-doped HfGaO thin-film transistors deposited by vapor cooling condensation system
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Journal Articles

N2O grown high Al composition nitrogen doped β-(AlGa)2O3/β-Ga2O3 using MOCVD

Fikadu Alema, Takeki Itoh, William Brand, Marko Tadjer, Andrei Osinsky, James S. Speck
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 042709 (2023)
https://doi.org/10.1116/6.0002594
Published: June 2023
View article titled, N<sub>2</sub>O grown high Al composition nitrogen doped β-(AlGa)<sub>2</sub>O<sub>3</sub>/β-Ga<sub>2</sub>O<sub>3</sub> using MOCVD
Open the PDF for N<sub>2</sub>O grown high Al composition nitrogen doped β-(AlGa)<sub>2</sub>O<sub>3</sub>/β-Ga<sub>2</sub>O<sub>3</sub> using MOCVD in another window
Journal Articles

Effect of drift layer doping and NiO parameters in achieving 8.9 kV breakdown in 100 μm diameter and 4 kV/4 A in 1 mm diameter NiO/β-Ga2O3 rectifiers

Jian-Sian Li, Chao-Ching Chiang, Xinyi Xia, Hsiao-Hsuan Wan, Fan Ren, S. J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043404 (2023)
https://doi.org/10.1116/6.0002722
Published: June 2023
View article titled, Effect of drift layer doping and NiO parameters in achieving 8.9 kV breakdown in 100 <em>μ</em>m diameter and 4 kV/4 A in 1 mm diameter NiO/β-Ga<sub>2</sub>O<sub>3</sub> rectifiers
Open the PDF for Effect of drift layer doping and NiO parameters in achieving 8.9 kV breakdown in 100 <em>μ</em>m diameter and 4 kV/4 A in 1 mm diameter NiO/β-Ga<sub>2</sub>O<sub>3</sub> rectifiers in another window
Journal Articles

Influence of boron contents on mechanical properties and high-temperature tribological behavior in (AlCrNbTiB)N coatings

Tzu-Ling Chen, Sheng-Yu Hsu, Yuan-Tai Lai, Shou-Yi Chang, Hsueh-Hsing Hung, Su-Yueh Tsai, Jenq-Gong Duh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043101 (2023)
https://doi.org/10.1116/6.0002538
Published: May 2023
View article titled, Influence of boron contents on mechanical properties and high-temperature tribological behavior in (AlCrNbTiB)N coatings
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Includes: Supplementary data
Journal Articles

Transient photocapacitance spectroscopy of deep-levels in (001) β-Ga2O3

Editor’s Pick
Fenfen Fenda Florena, Aboulaye Traoré, Takeaki Sakurai
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033205 (2023)
https://doi.org/10.1116/6.0002378
Published: March 2023
View article titled, Transient photocapacitance spectroscopy of deep-levels in (001) <em>β</em>-Ga<sub>2</sub>O<sub>3</sub>
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Journal Articles

Effect of vacuum heat treatment on tribological properties of metal-doped CuS/MoS2 coating

Ming Cao, Lan Zhao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033102 (2023)
https://doi.org/10.1116/6.0002360
Published: March 2023
View article titled, Effect of vacuum heat treatment on tribological properties of metal-doped CuS/MoS<sub>2</sub> coating
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