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Journal Articles

Recombination mechanism of heavily Be-doped GaAsN by time-resolved photoluminescence

Takashi Tsukasaki, Hisashi Sumikura, Takuma Fujimoto, Miki Fujita, Toshiki Makimoto

J. Vac. Sci. Technol. A 41, 052702 (2023)

https://doi.org/10.1116/6.0002522

Published: July 2023

View article titled, Recombination mechanism of heavily Be-doped GaAsN by time-resolved photoluminescence

Journal Articles

Performance and stability of Al-doped HfGaO thin-film transistors deposited by vapor cooling condensation system

Hsin-Ying Lee, Guo-Long Zhu, Ching-Ting Lee

J. Vac. Sci. Technol. A 41, 053406 (2023)

https://doi.org/10.1116/6.0002826

Published: July 2023

View article titled, Performance and stability of Al-doped HfGaO thin-film transistors deposited by vapor cooling condensation system

Journal Articles

N₂O grown high Al composition nitrogen doped β-(AlGa)₂O₃/β-Ga₂O₃ using MOCVD

Fikadu Alema, Takeki Itoh, William Brand, Marko Tadjer, Andrei Osinsky, James S. Speck

J. Vac. Sci. Technol. A 41, 042709 (2023)

https://doi.org/10.1116/6.0002594

Published: June 2023

View article titled, N2O grown high Al composition nitrogen doped β-(AlGa)2O3/β-Ga2O3 using MOCVD

Journal Articles

Effect of drift layer doping and NiO parameters in achieving 8.9 kV breakdown in 100 μm diameter and 4 kV/4 A in 1 mm diameter NiO/β-Ga₂O₃ rectifiers

Jian-Sian Li, Chao-Ching Chiang, Xinyi Xia, Hsiao-Hsuan Wan, Fan Ren, S. J. Pearton

J. Vac. Sci. Technol. A 41, 043404 (2023)

https://doi.org/10.1116/6.0002722

Published: June 2023

View article titled, Effect of drift layer doping and NiO parameters in achieving 8.9 kV breakdown in 100 μm diameter and 4 kV/4 A in 1 mm diameter NiO/β-Ga2O3 rectifiers

Journal Articles

Influence of boron contents on mechanical properties and high-temperature tribological behavior in (AlCrNbTiB)N coatings

Tzu-Ling Chen, Sheng-Yu Hsu, Yuan-Tai Lai, Shou-Yi Chang, Hsueh-Hsing Hung, Su-Yueh Tsai, Jenq-Gong Duh

J. Vac. Sci. Technol. A 41, 043101 (2023)

https://doi.org/10.1116/6.0002538

Published: May 2023

View article titled, Influence of boron contents on mechanical properties and high-temperature tribological behavior in (AlCrNbTiB)N coatings

Includes: Supplementary data

Journal Articles

Transient photocapacitance spectroscopy of deep-levels in (001) β-Ga₂O₃

Fenfen Fenda Florena, Aboulaye Traoré, Takeaki Sakurai

J. Vac. Sci. Technol. A 41, 033205 (2023)

https://doi.org/10.1116/6.0002378

Published: March 2023

View article titled, Transient photocapacitance spectroscopy of deep-levels in (001) β-Ga2O3

Journal Articles

Effect of vacuum heat treatment on tribological properties of metal-doped CuS/MoS₂ coating

Ming Cao, Lan Zhao

J. Vac. Sci. Technol. A 41, 033102 (2023)

https://doi.org/10.1116/6.0002360

Published: March 2023

View article titled, Effect of vacuum heat treatment on tribological properties of metal-doped CuS/MoS2 coating

Journal Articles

Synthesis of short-wave infrared Ge_1−ySn_y semiconductors directly on Si(100) via ultralow temperature molecular routes for monolithic integration applications

Chi Xu, Ting Hu, Aixin Zhang, Dhruve A. Ringwala, José Menéndez, John Kouvetakis

J. Vac. Sci. Technol. A 40, 063405 (2022)

https://doi.org/10.1116/6.0002052

Published: November 2022

View article titled, Synthesis of short-wave infrared Ge1−ySny semiconductors directly on Si(100) via ultralow temperature molecular routes for monolithic integration applications

Journal Articles

Effect of N content on the microstructure and tribological properties of TiSiCN composite coatings

Bing Zhou, Wantao Jin, Zhubo Liu, Yong Ma, Jie Gao, Yongsheng Wang, Shengwang Yu

J. Vac. Sci. Technol. A 40, 043407 (2022)

https://doi.org/10.1116/6.0001854

Published: June 2022

View article titled, Effect of N content on the microstructure and tribological properties of TiSiCN composite coatings

Journal Articles

Conductive n-type gallium nitride thin films prepared by sputter deposition

Patrick Loretz, Thomas Tschirky, Fabio Isa, Jörg Patscheider, Matthias Trottmann, Adrian Wichser, Jacopo Pedrini, Emiliano Bonera, Fabio Pezzoli, Dominik Jaeger

J. Vac. Sci. Technol. A 40, 042703 (2022)

https://doi.org/10.1116/6.0001623

Published: June 2022

View article titled, Conductive n-type gallium nitride thin films prepared by sputter deposition

Journal Articles

Study of SnO/ɛ-Ga₂O₃ p–n diodes in planar geometry

A. Parisini, P. Mazzolini, O. Bierwagen, C. Borelli, K. Egbo, A. Sacchi, M. Bosi, L. Seravalli, A. Tahraoui, R. Fornari

J. Vac. Sci. Technol. A 40, 042701 (2022)

https://doi.org/10.1116/6.0001857

Published: June 2022

View article titled, Study of SnO/ɛ-Ga2O3 p–n diodes in planar geometry

Includes: Supplementary data

Journal Articles

In situ monitoring atomic layer doping processes for Al-doped ZnO layers: Competitive nature of surface reactions between metal precursors

Adnan Mohammad, Saidjafarzoda Ilhom, Deepa Shukla, Necmi Biyikli

J. Vac. Sci. Technol. A 40, 042401 (2022)

https://doi.org/10.1116/6.0001772

Published: May 2022

View article titled, In situ monitoring atomic layer doping processes for Al-doped ZnO layers: Competitive nature of surface reactions between metal precursors

Includes: Supplementary data

Journal Articles

Energy storage performance in lead-free antiferroelectric 0.92(Bi_0.54Na_0.46)TiO₃-0.08BaTiO₃ ultrathin films by pulsed laser deposition

José de Jesús Serralta-Macías, Rodolfo Antonio Rodriguez-Davila, Manuel Quevedo-Lopez, Daniel Olguín, Santos Jesús Castillo, Chadwin D. Young, José Martin Yáñez-Limón

J. Vac. Sci. Technol. A 40, 033417 (2022)

https://doi.org/10.1116/6.0001755

Published: May 2022

View article titled, Energy storage performance in lead-free antiferroelectric 0.92(Bi0.54Na0.46)TiO3-0.08BaTiO3 ultrathin films by pulsed laser deposition

Journal Articles

Use of in situ electrical conductance measurements to understand the chemical mechanisms and chamber wall effects during vapor phase infiltration doping of poly(aniline) with TiCl₄ + H₂O

Kristina L. Malinowski, Shawn A. Gregory, Jamie P. Wooding, Oliver B. Hvidsten, Alexandra Jungreis, Mark D. Losego

J. Vac. Sci. Technol. A 40, 013418 (2022)

https://doi.org/10.1116/6.0001544

Published: January 2022

View article titled, Use of in situ electrical conductance measurements to understand the chemical mechanisms and chamber wall effects during vapor phase infiltration doping of poly(aniline) with TiCl4 + H2O

Journal Articles

Crystal-phase-specific near-infrared photoluminescence from Er³⁺-doped Bi₂O₃ thin films

Housei Akazawa

J. Vac. Sci. Technol. A 40, 013417 (2022)

https://doi.org/10.1116/6.0001597

Published: December 2021

View article titled, Crystal-phase-specific near-infrared photoluminescence from Er3+-doped Bi2O3 thin films

Journal Articles

Engineering ordered arrangements of oxygen vacancies at the surface of superconducting La₂CuO₄ thin films

Y. Eren Suyolcu, Georg Christiani, Patrick T. Gemperline, Sydney R. Provence, Annette Bussmann-Holder, Ryan B. Comes, Peter A. van Aken, Gennady Logvenov

J. Vac. Sci. Technol. A 40, 013214 (2022)

https://doi.org/10.1116/6.0001473

Published: December 2021

View article titled, Engineering ordered arrangements of oxygen vacancies at the surface of superconducting La2CuO4 thin films

Includes: Supplementary data

Journal Articles

Effect of heat treatment on the optical, structural, and morphological properties of Eu³⁺-doped CaTa₄O₁₁ thin films

Shinho Cho

J. Vac. Sci. Technol. A 40, 013406 (2022)

https://doi.org/10.1116/6.0001440

Published: December 2021

View article titled, Effect of heat treatment on the optical, structural, and morphological properties of Eu3+-doped CaTa4O11 thin films

Journal Articles

Searching for superconductivity in high entropy oxide Ruddlesden–Popper cuprate films

Alessandro R. Mazza, Xingyao Gao, Daniel J. Rossi, Brianna L. Musico, Tyler W. Valentine, Zachary Kennedy, Jie Zhang, Jason Lapano, Veerle Keppens, Robert G. Moore, Matthew Brahlek, Christina M. Rost, Thomas Z. Ward

J. Vac. Sci. Technol. A 40, 013404 (2022)

https://doi.org/10.1116/6.0001441

Published: November 2021

View article titled, Searching for superconductivity in high entropy oxide Ruddlesden–Popper cuprate films

Includes: Supplementary data

Journal Articles

Evaluation of the accuracy of stopping and range of ions in matter simulations through secondary ion mass spectrometry and Rutherford backscattering spectrometry for low energy heavy ion implantation

Michael Titze, Jose L. Pacheco, Todd Byers, Stuart B. Van Deusen, Daniel L. Perry, Duncan Weathers, Edward S. Bielejec

J. Vac. Sci. Technol. A 39, 063222 (2021)

https://doi.org/10.1116/6.0001406

Published: November 2021

View article titled, Evaluation of the accuracy of stopping and range of ions in matter simulations through secondary ion mass spectrometry and Rutherford backscattering spectrometry for low energy heavy ion implantation

Journal Articles

Homoepitaxial GaN micropillar array by plasma-free photo-enhanced metal-assisted chemical etching

Clarence Y. Chan, Shunya Namiki, Jennifer K. Hite, Michael A. Mastro, Syed B. Qadri, Xiuling Li

J. Vac. Sci. Technol. A 39, 053212 (2021)

https://doi.org/10.1116/6.0001231

Published: August 2021

View article titled, Homoepitaxial GaN micropillar array by plasma-free photo-enhanced metal-assisted chemical etching

Includes: Supplementary data

NARROW

Topics

Recombination mechanism of heavily Be-doped GaAsN by time-resolved photoluminescence

Performance and stability of Al-doped HfGaO thin-film transistors deposited by vapor cooling condensation system

N₂O grown high Al composition nitrogen doped β-(AlGa)₂O₃/β-Ga₂O₃ using MOCVD

Effect of drift layer doping and NiO parameters in achieving 8.9 kV breakdown in 100 μm diameter and 4 kV/4 A in 1 mm diameter NiO/β-Ga₂O₃ rectifiers

Influence of boron contents on mechanical properties and high-temperature tribological behavior in (AlCrNbTiB)N coatings

Transient photocapacitance spectroscopy of deep-levels in (001) β-Ga₂O₃

Effect of vacuum heat treatment on tribological properties of metal-doped CuS/MoS₂ coating

Synthesis of short-wave infrared Ge_1−ySn_y semiconductors directly on Si(100) via ultralow temperature molecular routes for monolithic integration applications

Effect of N content on the microstructure and tribological properties of TiSiCN composite coatings

Conductive n-type gallium nitride thin films prepared by sputter deposition

Study of SnO/ɛ-Ga₂O₃ p–n diodes in planar geometry

In situ monitoring atomic layer doping processes for Al-doped ZnO layers: Competitive nature of surface reactions between metal precursors

Energy storage performance in lead-free antiferroelectric 0.92(Bi_0.54Na_0.46)TiO₃-0.08BaTiO₃ ultrathin films by pulsed laser deposition

Use of in situ electrical conductance measurements to understand the chemical mechanisms and chamber wall effects during vapor phase infiltration doping of poly(aniline) with TiCl₄ + H₂O

Crystal-phase-specific near-infrared photoluminescence from Er³⁺-doped Bi₂O₃ thin films

Engineering ordered arrangements of oxygen vacancies at the surface of superconducting La₂CuO₄ thin films

Effect of heat treatment on the optical, structural, and morphological properties of Eu³⁺-doped CaTa₄O₁₁ thin films

Searching for superconductivity in high entropy oxide Ruddlesden–Popper cuprate films

Evaluation of the accuracy of stopping and range of ions in matter simulations through secondary ion mass spectrometry and Rutherford backscattering spectrometry for low energy heavy ion implantation

Homoepitaxial GaN micropillar array by plasma-free photo-enhanced metal-assisted chemical etching

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