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Journal Articles

Impact of high-power impulse magnetron sputtering pulse width on the nucleation, crystallization, microstructure, and ferroelectric properties of hafnium oxide thin films

Samantha T. Jaszewski, Shelby S. Fields, Ching-Chang Chung, Jacob L. Jones, Keithen G. Orson, Petra Reinke, Jon F. Ihlefeld
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023414 (2024)
https://doi.org/10.1116/6.0003307
Published: February 2024
View article titled, Impact of high-power impulse magnetron sputtering pulse width on the nucleation, crystallization, microstructure, and ferroelectric properties of hafnium oxide thin films
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Includes: Supplementary data
Journal Articles

Effect of structure on semiconducting properties of a small molecule n-type organic semiconductor: Phenyl-C61-butyric acid methyl ester

Zhaojing Gao, Dieudonné Niyonkuru, Arthur Yelon, Clara Santato
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043405 (2023)
https://doi.org/10.1116/6.0002410
Published: June 2023
View article titled, Effect of structure on semiconducting properties of a small molecule n-type organic semiconductor: Phenyl-C61-butyric acid methyl ester
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Includes: Supplementary data
Journal Articles

Formation of MoS2 from elemental Mo and S using reactive molecular dynamics simulations

Rimei Chen, Arben Jusufi, Alan Schilowitz, Ashlie Martini
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 022201 (2020)
https://doi.org/10.1116/1.5128377
Published: February 2020
View article titled, Formation of MoS<sub>2</sub> from elemental Mo and S using reactive molecular dynamics simulations
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Includes: Supplementary data
Journal Articles

Thermal recrystallization of short-range ordered WS2 films

Markus H. Heyne, Jean-François de Marneffe, Iuliana Radu, Erik C. Neyts, Stefan De Gendt
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 05G501 (2018)
https://doi.org/10.1116/1.5036654
Published: July 2018
View article titled, Thermal recrystallization of short-range ordered WS<sub>2</sub> films
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Journal Articles

Copper-induced recrystallization and interdiffusion of CdTe/ZnTe thin films

Yegor Samoilenko, Ali Abbas, J. Michael Walls, Colin A. Wolden
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031201 (2018)
https://doi.org/10.1116/1.5023501
Published: May 2018
View article titled, Copper-induced recrystallization and interdiffusion of CdTe/ZnTe thin films
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Includes: Supplementary data
Journal Articles

Thickness-dependent growth orientation of F-doped ZnO films formed by atomic layer deposition

Kyung-Mun Kang, Yong-June Choi, Geun Young Yeom, Hyung-Ho Park
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 01A144 (2016)
https://doi.org/10.1116/1.4938180
Published: December 2015
View article titled, Thickness-dependent growth orientation of F-doped ZnO films formed by atomic layer deposition
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Includes: Supplementary data
Journal Articles

Growth, structure, and high temperature stability of zirconium diboride thin films

David M. Stewart, David J. Frankel, Robert J. Lad
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 031505 (2015)
https://doi.org/10.1116/1.4916565
Published: March 2015
View article titled, Growth, structure, and high temperature stability of zirconium diboride thin films
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Journal Articles

Thermodynamics and kinetic behaviors of thickness-dependent crystallization in high-k thin films deposited by atomic layer deposition

Xianglong Nie, Fei Ma, Dayan Ma, Kewei Xu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 01A140 (2015)
https://doi.org/10.1116/1.4903946
Published: December 2014
View article titled, Thermodynamics and kinetic behaviors of thickness-dependent crystallization in high-k thin films deposited by atomic layer deposition
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Journal Articles

Compositional study of vacuum annealed Al doped ZnO thin films obtained by RF magnetron sputtering

B. P. Shantheyanda, V. O. Todi, K. B. Sundaram, A. Vijayakumar, I. Oladeji
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 29, 051514 (2011)
https://doi.org/10.1116/1.3624787
Published: August 2011
View article titled, Compositional study of vacuum annealed Al doped ZnO thin films obtained by RF magnetron sputtering
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Journal Articles

Crystallization, metastable phases, and demixing in a hafnia-titania nanolaminate annealed at high temperature

Massiel Cristina Cisneros-Morales, Carolyn Rubin Aita
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 1161–1168 (2010)
https://doi.org/10.1116/1.3474973
Published: September 2010
View article titled, Crystallization, metastable phases, and demixing in a hafnia-titania nanolaminate annealed at high temperature
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Journal Articles

Thermal stability and thermo-mechanical properties of magnetron sputtered Cr-Al-Y-N coatings

Florian Rovere, Paul H. Mayrhofer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 29–35 (2008)
https://doi.org/10.1116/1.2806943
Published: December 2007
View article titled, Thermal stability and thermo-mechanical properties of magnetron sputtered Cr-Al-Y-N coatings
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Journal Articles

Study of nonisothermal crystallization in amorphous Se 90 In 9.3 Cu 0.7 alloy

M. S. Abo-Ghazala, El-Sayed M. Farag, A. H. Ammar
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1928–1932 (2006)
https://doi.org/10.1116/1.2336228
Published: August 2006
View article titled, Study of nonisothermal crystallization in amorphous Se 90 In 9.3 Cu 0.7 alloy
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Journal Articles

Annealing temperature effects on the structure of ferromagnetic Mn-implanted Si

M. Bolduc, C. Awo-Affouda, F. Ramos, V. P. LaBella
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1648–1651 (2006)
https://doi.org/10.1116/1.2194921
Published: June 2006
View article titled, Annealing temperature effects on the structure of ferromagnetic Mn-implanted Si
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Journal Articles

Characterizations of the surfaces of shocked-Bi–Pb–Sr–Ca–Cu–O particles for a magnetic sensor

H. Kezuka, K. Yamagata, M. Itoh, T. Suzuki, M. Kikuchi, T. Atou, M. Kawasaki, K. Fukuoka
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 1010–1012 (2005)
https://doi.org/10.1116/1.1897699
Published: June 2005
View article titled, Characterizations of the surfaces of shocked-Bi–Pb–Sr–Ca–Cu–O particles for a magnetic sensor
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Journal Articles

Structure and mechanical properties of Ti–Si–N films deposited by combined DC/RF reactive unbalanced magnetron sputtering

X. Z. Ding, X. T. Zeng, Y. C. Liu, Q. Yang, L. R. Zhao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 2351–2355 (2004)
https://doi.org/10.1116/1.1798771
Published: October 2004
View article titled, Structure and mechanical properties of Ti–Si–N films deposited by combined DC/RF reactive unbalanced magnetron sputtering
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Journal Articles

Effect of thickness on ferroelectric properties of Bi 3.25 La 0.75 Ti 3 O 12 thin films on Pt/Ti/SiO 2 / Si substrates

Kyoung-Tae Kim, Sang-Hun Song, Chang-Il Kim
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 1315–1318 (2004)
https://doi.org/10.1116/1.1759350
Published: July 2004
View article titled, Effect of thickness on ferroelectric properties of Bi 3.25 La 0.75 Ti 3 O 12 thin films on Pt/Ti/SiO 2 / Si substrates
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Journal Articles

Epitaxial Si/Si(001) thin films obtained by solid phase crystallization

H. J. Kim, S. H. Jeon, T. Y. Jeon, D. Y. Noh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 1188–1190 (2004)
https://doi.org/10.1116/1.1763909
Published: June 2004
View article titled, Epitaxial Si/Si(001) thin films obtained by solid phase crystallization
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Journal Articles

Density changes upon crystallization of Ge 2 Sb 2.04 Te 4.74 films

Walter K. Njoroge, Han-Willem Wöltgens, Matthias Wuttig
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 230–233 (2002)
https://doi.org/10.1116/1.1430249
Published: January 2002
View article titled, Density changes upon crystallization of Ge 2 Sb 2.04 Te 4.74 films
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Journal Articles

Alternative procedure for the fabrication of close-spaced sublimated CdTe solar cells

H. R. Moutinho, R. G. Dhere, C. Ballif, M. M. Al-Jassim, L. L. Kazmerski
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 1599–1603 (2000)
https://doi.org/10.1116/1.582392
Published: July 2000
View article titled, Alternative procedure for the fabrication of close-spaced sublimated CdTe solar cells
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Journal Articles

Influence of second phases on the ferroelectric properties of SrBi 2 TaNbO 9 thin films fabricated by radio-frequency magnetron sputtering

Yoon-Baek Park, Se-Myeong Jang, Jeon-Kook Lee, Jong-Wan Park
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 17–22 (2000)
https://doi.org/10.1116/1.582152
Published: January 2000
View article titled, Influence of second phases on the ferroelectric properties of SrBi 2 TaNbO 9 thin films fabricated by radio-frequency magnetron sputtering
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