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Journal Articles

Thermodynamic stability of hexagonal and rhombohedral boron nitride under chemical vapor deposition conditions from van der Waals corrected first principles calculations

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Henrik Pedersen, Björn Alling, Hans Högberg, Annop Ektarawong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 040603 (2019)
https://doi.org/10.1116/1.5107455
Published: June 2019
View articletitled, Thermodynamic stability of hexagonal and rhombohedral boron nitride under chemical vapor deposition conditions from van der Waals corrected first principles calculations
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Includes: Supplementary data
Journal Articles

Growth-temperature dependence of conductivity at the LaCrO3/SrTiO3 (001) interface

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Athby Al-Tawhid, Jordan R. Frick, Daniel B. Dougherty, Divine P. Kumah
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021102 (2019)
https://doi.org/10.1116/1.5085334
Published: February 2019
View articletitled, Growth-temperature dependence of conductivity at the LaCrO3/SrTiO3 (001) interface
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Journal Articles

Structural and optical properties of high magnesium content wurtzite-Zn1−xMgxO nanowires

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Abdiel Rivera, Anas Mazady, John W. Zeller, Ashok K. Sood, Tariq Manzur, Mehdi Anwar
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 020604 (2019)
https://doi.org/10.1116/1.5085837
Published: February 2019
View articletitled, Structural and optical properties of high magnesium content wurtzite-Zn1−xMgxO nanowires
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Journal Articles

Characterization of VO2/ferroelectric thin film heterostructures deposited on various complex oxide single crystal substrates

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Adrian Petraru, Ravi Droopad, Hermann Kohlstedt
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021514 (2019)
https://doi.org/10.1116/1.5082288
Published: February 2019
View articletitled, Characterization of VO2/ferroelectric thin film heterostructures deposited on various complex oxide single crystal substrates
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Journal Articles

Structural properties of strained epitaxial La1+δCrO3 thin films

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Dong Han, Mohamed Bouras, Claude Botella, Aziz Benamrouche, Bruno Canut, Geneviève Grenet, Guillaume Saint-Girons, Romain Bachelet
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021512 (2019)
https://doi.org/10.1116/1.5082185
Published: February 2019
View articletitled, Structural properties of strained epitaxial La1+δCrO3 thin films
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Includes: Supplementary data
Journal Articles

CMOS compatible metal stacks for suppression of secondary grains in Sc0.125Al0.875N

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Giovanni Esteves, Morgann Berg, Kyle D. Wrasman, Michael David Henry, Benjamin A. Griffin, Erica A. Douglas
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021511 (2019)
https://doi.org/10.1116/1.5065517
Published: February 2019
View articletitled, CMOS compatible metal stacks for suppression of secondary grains in Sc0.125Al0.875N
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Includes: Supplementary data
Journal Articles

Control of potassium tantalate niobate thin film crystal phase and orientation by atomic layer deposition

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Justin R. Bickford, Henrik Hovde Sønsteby, Nicholas A. Strnad, Peter Y. Zavalij, Robert C. Hoffman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 020904 (2019)
https://doi.org/10.1116/1.5063925
Published: January 2019
View articletitled, Control of potassium tantalate niobate thin film crystal phase and orientation by atomic layer deposition
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Journal Articles

Control of growth orientation in as-deposited epitaxial iron-rich nickel ferrite spinel

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Jon E. Bratvold, Henrik H. Sønsteby, Ola Nilsen, Helmer Fjellvåg
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021502 (2019)
https://doi.org/10.1116/1.5082012
Published: January 2019
View articletitled, Control of growth orientation in as-deposited epitaxial iron-rich nickel ferrite spinel
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Includes: Supplementary data
Journal Articles

Epitaxial growth and dielectric characterization of atomically smooth 0.5Ba(Zr0.2Ti0.8)O3–0.5(Ba0.7Ca0.3)TiO3 thin films

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Yang Liu, Zheng Wang, Arashdeep Singh Thind, Thomas Orvis, Debarghya Sarkar, Rehan Kapadia, Albina Y. Borisevich, Rohan Mishra, Asif Islam Khan, Jayakanth Ravichandran
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 011502 (2019)
https://doi.org/10.1116/1.5054130
Published: December 2018
View articletitled, Epitaxial growth and dielectric characterization of atomically smooth 0.5Ba(Zr0.2Ti0.8)O3–0.5(Ba0.7Ca0.3)TiO3 thin films
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Journal Articles

Effect of microstructural changes in the biological behavior of magnetron sputtered ZnO thin films

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Diogo Costa, Joel Borges, Maria F. Mota, Marco S. Rodrigues, Patrícia Pereira-Silva, Armando Ferreira, Cátia S. Pereira, Paula Sampaio, Filipe Vaz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 011501 (2019)
https://doi.org/10.1116/1.5048785
Published: December 2018
View articletitled, Effect of microstructural changes in the biological behavior of magnetron sputtered ZnO thin films
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Journal Articles

Plasma-enhanced atomic layer deposition of titanium vanadium nitride

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Mark J. Sowa, Ling Ju, Alexander C. Kozen, Nicholas C. Strandwitz, Guosong Zeng, Tomas F. Babuska, Zakaria Hsain, Brandon A. Krick
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 06A103 (2018)
https://doi.org/10.1116/1.5037463
Published: October 2018
View articletitled, Plasma-enhanced atomic layer deposition of titanium vanadium nitride
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Includes: Supplementary data
Journal Articles

Controlling the morphology of ultrathin MoS2/MoO2 nanosheets grown by chemical vapor deposition

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Zongliang Guo, Zhiming Xiao, Aixiang Wei, Yu Zhao, Jun Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 05G509 (2018)
https://doi.org/10.1116/1.5035346
Published: September 2018
View articletitled, Controlling the morphology of ultrathin MoS2/MoO2 nanosheets grown by chemical vapor deposition
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Includes: Supplementary data
Journal Articles

Growth and mechanical properties of 111-oriented V0.5Mo0.5Nx/Al2O3(0001) thin films

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Hanna Kindlund, Jun Lu, Esteban Broitman, Ivan Petrov, J. E. Greene, Jens Birch, Lars Hultman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 051512 (2018)
https://doi.org/10.1116/1.5045048
Published: August 2018
View articletitled, Growth and mechanical properties of 111-oriented V0.5Mo0.5Nx/Al2O3(0001) thin films
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Journal Articles

Effect of ozone concentration on atomic layer deposited tin oxide

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Hyunwoo Park, Joohyun Park, Seokyoon Shin, Giyul Ham, Hyeongsu Choi, Seungjin Lee, Namgue Lee, Sejin Kwon, Minwook Bang, Juhyun Lee, Bumsik Kim, Hyeongtag Jeon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 051509 (2018)
https://doi.org/10.1116/1.5027550
Published: August 2018
View articletitled, Effect of ozone concentration on atomic layer deposited tin oxide
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Includes: Supplementary data
Journal Articles

Postdeposition annealing on VO2 films for resistive random-access memory selection devices

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Heewoo Lim, Haewon Cho, Hyunjung Kim, Namgue Lee, Seokyoon Shin, Chanwon Jung, Hyunjun Kim, Kyungpil Lim, Hyeongtag Jeon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 051501 (2018)
https://doi.org/10.1116/1.5021082
Published: July 2018
View articletitled, Postdeposition annealing on VO2 films for resistive random-access memory selection devices
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Journal Articles

Revisitation of the structure zone model based on the investigation of the structure and properties of Ti, Zr, and Hf thin films deposited at 70–600 °C using DC magnetron sputtering

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Eiji Kusano
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 041506 (2018)
https://doi.org/10.1116/1.5036555
Published: July 2018
View articletitled, Revisitation of the structure zone model based on the investigation of the structure and properties of Ti, Zr, and Hf thin films deposited at 70–600 °C using DC magnetron sputtering
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Journal Articles

Maghemite thin films prepared using atmospheric-pressure plasma annealing

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Hong-Ying Chen, Shun-Hsiang Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 04F405 (2018)
https://doi.org/10.1116/1.5023144
Published: June 2018
View articletitled, Maghemite thin films prepared using atmospheric-pressure plasma annealing
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Journal Articles

Epitaxial titanium nitride on sapphire: Effects of substrate temperature on microstructure and optical properties

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Hadley A. Smith, Said Elhamri, Kurt G. Eyink, Lawrence Grazulis, Madelyn J. Hill, Tyson C. Back, Augustine M. Urbas, Brandon M. Howe, Amber N. Reed
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 03E107 (2018)
https://doi.org/10.1116/1.5022068
Published: May 2018
View articletitled, Epitaxial titanium nitride on sapphire: Effects of substrate temperature on microstructure and optical properties
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Journal Articles

Microstructure, mechanical, and tribological properties of niobium vanadium carbon nitride films

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Hongbo Ju, Dian Yu, Junhua Xu, Lihua Yu, Yaoxiang Geng, Ting Gao, Guo Yi, Shunuo Bian
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031511 (2018)
https://doi.org/10.1116/1.5020954
Published: April 2018
View articletitled, Microstructure, mechanical, and tribological properties of niobium vanadium carbon nitride films
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Journal Articles

Effect of synchronized bias in the deposition of TiB2 thin films using high power impulse magnetron sputtering

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Nils Nedfors, Oleksiy Vozniy, Johanna Rosen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031510 (2018)
https://doi.org/10.1116/1.5003194
Published: April 2018
View articletitled, Effect of synchronized bias in the deposition of TiB2 thin films using high power impulse magnetron sputtering
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