Skip Nav Destination
Update search
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
NARROW
Format
Collections
Topics
Subjects
Journal
Article Type
Issue Section
Date
Availability
Journal Articles
J. Vac. Sci. Technol. A 37, 040603 (2019)
Published: June 2019
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 37, 021102 (2019)
Published: February 2019
Journal Articles
J. Vac. Sci. Technol. A 37, 021514 (2019)
Published: February 2019
Journal Articles
J. Vac. Sci. Technol. A 37, 020604 (2019)
Published: February 2019
Journal Articles
Dong Han, Mohamed Bouras, Claude Botella, Aziz Benamrouche, Bruno Canut, Geneviève Grenet, Guillaume Saint-Girons, Romain Bachelet
J. Vac. Sci. Technol. A 37, 021512 (2019)
Published: February 2019
Includes: Supplementary data
Journal Articles
Giovanni Esteves, Morgann Berg, Kyle D. Wrasman, Michael David Henry, Benjamin A. Griffin, Erica A. Douglas
J. Vac. Sci. Technol. A 37, 021511 (2019)
Published: February 2019
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 37, 020904 (2019)
Published: January 2019
Journal Articles
J. Vac. Sci. Technol. A 37, 021502 (2019)
Published: January 2019
Includes: Supplementary data
Journal Articles
Yang Liu, Zheng Wang, Arashdeep Singh Thind, Thomas Orvis, Debarghya Sarkar, Rehan Kapadia, Albina Y. Borisevich, Rohan Mishra, Asif Islam Khan, Jayakanth Ravichandran
J. Vac. Sci. Technol. A 37, 011502 (2019)
Published: December 2018
Journal Articles
Diogo Costa, Joel Borges, Maria F. Mota, Marco S. Rodrigues, Patrícia Pereira-Silva, Armando Ferreira, Cátia S. Pereira, Paula Sampaio, Filipe Vaz
J. Vac. Sci. Technol. A 37, 011501 (2019)
Published: December 2018
Journal Articles
Mark J. Sowa, Ling Ju, Alexander C. Kozen, Nicholas C. Strandwitz, Guosong Zeng, Tomas F. Babuska, Zakaria Hsain, Brandon A. Krick
J. Vac. Sci. Technol. A 36, 06A103 (2018)
Published: October 2018
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 36, 05G509 (2018)
Published: September 2018
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 36, 051512 (2018)
Published: August 2018
Journal Articles
Hyunwoo Park, Joohyun Park, Seokyoon Shin, Giyul Ham, Hyeongsu Choi, Seungjin Lee, Namgue Lee, Sejin Kwon, Minwook Bang, Juhyun Lee, Bumsik Kim, Hyeongtag Jeon
J. Vac. Sci. Technol. A 36, 051509 (2018)
Published: August 2018
Includes: Supplementary data
Journal Articles
Heewoo Lim, Haewon Cho, Hyunjung Kim, Namgue Lee, Seokyoon Shin, Chanwon Jung, Hyunjun Kim, Kyungpil Lim, Hyeongtag Jeon
J. Vac. Sci. Technol. A 36, 051501 (2018)
Published: July 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 041506 (2018)
Published: July 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 04F405 (2018)
Published: June 2018
Journal Articles
Hadley A. Smith, Said Elhamri, Kurt G. Eyink, Lawrence Grazulis, Madelyn J. Hill, Tyson C. Back, Augustine M. Urbas, Brandon M. Howe, Amber N. Reed
J. Vac. Sci. Technol. A 36, 03E107 (2018)
Published: May 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 031511 (2018)
Published: April 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 031510 (2018)
Published: April 2018
1