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Journal Articles

Thermodynamic stability of hexagonal and rhombohedral boron nitride under chemical vapor deposition conditions from van der Waals corrected first principles calculations

Henrik Pedersen, Björn Alling, Hans Högberg, Annop Ektarawong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 040603 (2019)
https://doi.org/10.1116/1.5107455
Published: June 2019
View article titled, Thermodynamic stability of hexagonal and rhombohedral boron nitride under chemical vapor deposition conditions from van der Waals corrected first principles calculations
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Includes: Supplementary data
Journal Articles

Growth-temperature dependence of conductivity at the LaCrO3/SrTiO3 (001) interface

Athby Al-Tawhid, Jordan R. Frick, Daniel B. Dougherty, Divine P. Kumah
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021102 (2019)
https://doi.org/10.1116/1.5085334
Published: February 2019
View article titled, Growth-temperature dependence of conductivity at the LaCrO<sub>3</sub>/SrTiO<sub>3</sub> (001) interface
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Journal Articles

Characterization of VO2/ferroelectric thin film heterostructures deposited on various complex oxide single crystal substrates

Adrian Petraru, Ravi Droopad, Hermann Kohlstedt
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021514 (2019)
https://doi.org/10.1116/1.5082288
Published: February 2019
View article titled, Characterization of VO<sub>2</sub>/ferroelectric thin film heterostructures deposited on various complex oxide single crystal substrates
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Journal Articles

Structural and optical properties of high magnesium content wurtzite-Zn1−xMgxO nanowires

Abdiel Rivera, Anas Mazady, John W. Zeller, Ashok K. Sood, Tariq Manzur, Mehdi Anwar
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 020604 (2019)
https://doi.org/10.1116/1.5085837
Published: February 2019
View article titled, Structural and optical properties of high magnesium content wurtzite-Zn<sub>1−x</sub>Mg<sub>x</sub>O nanowires
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Journal Articles

Structural properties of strained epitaxial La1+δCrO3 thin films

Dong Han, Mohamed Bouras, Claude Botella, Aziz Benamrouche, Bruno Canut, Geneviève Grenet, Guillaume Saint-Girons, Romain Bachelet
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021512 (2019)
https://doi.org/10.1116/1.5082185
Published: February 2019
View article titled, Structural properties of strained epitaxial La<sub>1+δ</sub>CrO<sub>3</sub> thin films
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Includes: Supplementary data
Journal Articles

CMOS compatible metal stacks for suppression of secondary grains in Sc0.125Al0.875N

Giovanni Esteves, Morgann Berg, Kyle D. Wrasman, Michael David Henry, Benjamin A. Griffin, Erica A. Douglas
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021511 (2019)
https://doi.org/10.1116/1.5065517
Published: February 2019
View article titled, CMOS compatible metal stacks for suppression of secondary grains in Sc<sub>0.125</sub>Al<sub>0.875</sub>N
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Includes: Supplementary data
Journal Articles

Control of potassium tantalate niobate thin film crystal phase and orientation by atomic layer deposition

Justin R. Bickford, Henrik Hovde Sønsteby, Nicholas A. Strnad, Peter Y. Zavalij, Robert C. Hoffman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 020904 (2019)
https://doi.org/10.1116/1.5063925
Published: January 2019
View article titled, Control of potassium tantalate niobate thin film crystal phase and orientation by atomic layer deposition
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Journal Articles

Control of growth orientation in as-deposited epitaxial iron-rich nickel ferrite spinel

Jon E. Bratvold, Henrik H. Sønsteby, Ola Nilsen, Helmer Fjellvåg
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021502 (2019)
https://doi.org/10.1116/1.5082012
Published: January 2019
View article titled, Control of growth orientation in as-deposited epitaxial iron-rich nickel ferrite spinel
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Includes: Supplementary data
Journal Articles

Epitaxial growth and dielectric characterization of atomically smooth 0.5Ba(Zr0.2Ti0.8)O3–0.5(Ba0.7Ca0.3)TiO3 thin films

Yang Liu, Zheng Wang, Arashdeep Singh Thind, Thomas Orvis, Debarghya Sarkar, Rehan Kapadia, Albina Y. Borisevich, Rohan Mishra, Asif Islam Khan, Jayakanth Ravichandran
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 011502 (2019)
https://doi.org/10.1116/1.5054130
Published: December 2018
View article titled, Epitaxial growth and dielectric characterization of atomically smooth 0.5Ba(Zr<sub>0.2</sub>Ti<sub>0.8</sub>)O<sub>3</sub>–0.5(Ba<sub>0.7</sub>Ca<sub>0.3</sub>)TiO<sub>3</sub> thin films
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Journal Articles

Effect of microstructural changes in the biological behavior of magnetron sputtered ZnO thin films

Diogo Costa, Joel Borges, Maria F. Mota, Marco S. Rodrigues, Patrícia Pereira-Silva, Armando Ferreira, Cátia S. Pereira, Paula Sampaio, Filipe Vaz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 011501 (2019)
https://doi.org/10.1116/1.5048785
Published: December 2018
View article titled, Effect of microstructural changes in the biological behavior of magnetron sputtered ZnO thin films
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Journal Articles

Plasma-enhanced atomic layer deposition of titanium vanadium nitride

Mark J. Sowa, Ling Ju, Alexander C. Kozen, Nicholas C. Strandwitz, Guosong Zeng, Tomas F. Babuska, Zakaria Hsain, Brandon A. Krick
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 06A103 (2018)
https://doi.org/10.1116/1.5037463
Published: October 2018
View article titled, Plasma-enhanced atomic layer deposition of titanium vanadium nitride
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Includes: Supplementary data
Journal Articles

Controlling the morphology of ultrathin MoS2/MoO2 nanosheets grown by chemical vapor deposition

Zongliang Guo, Zhiming Xiao, Aixiang Wei, Yu Zhao, Jun Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 05G509 (2018)
https://doi.org/10.1116/1.5035346
Published: September 2018
View article titled, Controlling the morphology of ultrathin MoS<sub>2</sub>/MoO<sub>2</sub> nanosheets grown by chemical vapor deposition
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Includes: Supplementary data
Journal Articles

Growth and mechanical properties of 111-oriented V0.5Mo0.5Nx/Al2O3(0001) thin films

Hanna Kindlund, Jun Lu, Esteban Broitman, Ivan Petrov, J. E. Greene, Jens Birch, Lars Hultman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 051512 (2018)
https://doi.org/10.1116/1.5045048
Published: August 2018
View article titled, Growth and mechanical properties of 111-oriented V<sub>0.5</sub>Mo<sub>0.5</sub>N<sub>x</sub>/Al<sub>2</sub>O<sub>3</sub>(0001) thin films
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Journal Articles

Effect of ozone concentration on atomic layer deposited tin oxide

Hyunwoo Park, Joohyun Park, Seokyoon Shin, Giyul Ham, Hyeongsu Choi, Seungjin Lee, Namgue Lee, Sejin Kwon, Minwook Bang, Juhyun Lee, Bumsik Kim, Hyeongtag Jeon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 051509 (2018)
https://doi.org/10.1116/1.5027550
Published: August 2018
View article titled, Effect of ozone concentration on atomic layer deposited tin oxide
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Includes: Supplementary data
Journal Articles

Postdeposition annealing on VO2 films for resistive random-access memory selection devices

Heewoo Lim, Haewon Cho, Hyunjung Kim, Namgue Lee, Seokyoon Shin, Chanwon Jung, Hyunjun Kim, Kyungpil Lim, Hyeongtag Jeon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 051501 (2018)
https://doi.org/10.1116/1.5021082
Published: July 2018
View article titled, Postdeposition annealing on VO<sub>2</sub> films for resistive random-access memory selection devices
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Journal Articles

Revisitation of the structure zone model based on the investigation of the structure and properties of Ti, Zr, and Hf thin films deposited at 70–600 °C using DC magnetron sputtering

Eiji Kusano
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 041506 (2018)
https://doi.org/10.1116/1.5036555
Published: July 2018
View article titled, Revisitation of the structure zone model based on the investigation of the structure and properties of Ti, Zr, and Hf thin films deposited at 70–600 °C using DC magnetron sputtering
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Journal Articles

Maghemite thin films prepared using atmospheric-pressure plasma annealing

Hong-Ying Chen, Shun-Hsiang Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 04F405 (2018)
https://doi.org/10.1116/1.5023144
Published: June 2018
View article titled, Maghemite thin films prepared using atmospheric-pressure plasma annealing
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Journal Articles

Epitaxial titanium nitride on sapphire: Effects of substrate temperature on microstructure and optical properties

Hadley A. Smith, Said Elhamri, Kurt G. Eyink, Lawrence Grazulis, Madelyn J. Hill, Tyson C. Back, Augustine M. Urbas, Brandon M. Howe, Amber N. Reed
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 03E107 (2018)
https://doi.org/10.1116/1.5022068
Published: May 2018
View article titled, Epitaxial titanium nitride on sapphire: Effects of substrate temperature on microstructure and optical properties
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Journal Articles

Microstructure, mechanical, and tribological properties of niobium vanadium carbon nitride films

Hongbo Ju, Dian Yu, Junhua Xu, Lihua Yu, Yaoxiang Geng, Ting Gao, Guo Yi, Shunuo Bian
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031511 (2018)
https://doi.org/10.1116/1.5020954
Published: April 2018
View article titled, Microstructure, mechanical, and tribological properties of niobium vanadium carbon nitride films
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Journal Articles

Effect of synchronized bias in the deposition of TiB2 thin films using high power impulse magnetron sputtering

Nils Nedfors, Oleksiy Vozniy, Johanna Rosen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031510 (2018)
https://doi.org/10.1116/1.5003194
Published: April 2018
View article titled, Effect of synchronized bias in the deposition of TiB<sub>2</sub> thin films using high power impulse magnetron sputtering
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