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Journal Articles

Effect of discharge pulse frequency on the microstructure and field-emission performance of CNX films deposited by pulse cathode arc evaporation

Haowei Du, Bing Zhou, D. G. Piliptsou, Hui Sun, Yong Ma, Hongjun Hei, Shengwang Yu, Zhubo Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063410 (2024)
https://doi.org/10.1116/6.0003974
Published: November 2024
View article titled, Effect of discharge pulse frequency on the microstructure and field-emission performance of CN<sub>X</sub> films deposited by pulse cathode arc evaporation
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Journal Articles

Spin-related negative magnetoresistance in germanium films

Zhaoguo Li, Yuechuan Luo, Jia Li, Jicheng Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023422 (2024)
https://doi.org/10.1116/6.0003337
Published: February 2024
View article titled, Spin-related negative magnetoresistance in germanium films
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Journal Articles

Ternary Ga–Sn–O and quaternary In–Ga–Sn–O channel based thin film transistors fabricated by plasma-enhanced atomic layer deposition

Editor’s Pick
Jong Hyeon Won, Hyeonhui Jo, Pil Ju Youn, Bo Keun Park, Taek-Mo Chung, Jeong Hwan Han
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062406 (2023)
https://doi.org/10.1116/6.0003004
Published: October 2023
View article titled, Ternary Ga–Sn–O and quaternary In–Ga–Sn–O channel based thin film transistors fabricated by plasma-enhanced atomic layer deposition
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Includes: Supplementary data
Journal Articles

Plasma-enhanced atomic layer deposition of crystalline GaN thin films on quartz substrates with sharp interfaces

Editor’s Pick
Sanjie Liu, Yangfeng Li, Qing Liu, Jiayou Tao, Xinhe Zheng
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052405 (2023)
https://doi.org/10.1116/6.0002639
Published: August 2023
View article titled, Plasma-enhanced atomic layer deposition of crystalline GaN thin films on quartz substrates with sharp interfaces
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Journal Articles

Room temperature magnetron sputtering and laser annealing of ultrathin amorphous sulfur-rich MoSx films

Spencer Gellerup, Corey L. Arnold, Christopher Muratore, Nicholas R. Glavin, Nigel D. Shepherd, Andrey A. Voevodin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053405 (2023)
https://doi.org/10.1116/6.0002544
Published: July 2023
View article titled, Room temperature magnetron sputtering and laser annealing of ultrathin amorphous sulfur-rich MoS<sub>x</sub> films
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Includes: Supplementary data
Journal Articles

Optical, surface, and structural studies of InN thin films grown on sapphire by molecular beam epitaxy

Zhe Chuan Feng, Deng Xie, Manika Tun Nafisa, Hao-Hsiung Lin, Weijie Lu, Jin-Ming Chen, Jeffrey Yiin, Kuei-Hsien Chen, Li-Chyong Chen, Benjamin Klein, Ian T. Ferguson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053401 (2023)
https://doi.org/10.1116/6.0002665
Published: July 2023
View article titled, Optical, surface, and structural studies of InN thin films grown on sapphire by molecular beam epitaxy
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Journal Articles

Ge-ion implantation and activation in (100) β-Ga2O3 for ohmic contact improvement using pulsed rapid thermal annealing

Kornelius Tetzner, Andreas Thies, Palvan Seyidov, Ta-Shun Chou, Jana Rehm, Ina Ostermay, Zbigniew Galazka, Andreas Fiedler, Andreas Popp, Joachim Würfl, Oliver Hilt
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043102 (2023)
https://doi.org/10.1116/6.0002642
Published: May 2023
View article titled, Ge-ion implantation and activation in (100) β-Ga<sub>2</sub>O<sub>3</sub> for ohmic contact improvement using pulsed rapid thermal annealing
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Journal Articles

Effect of annealing on the magnetic anisotropy of GaMnAsP layers with graded P concentration

Seul-Ki Bac, Sanghoon Lee, Xinyu Liu, Margaret Dobrowolska, Jacek K. Furdyna
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 022704 (2023)
https://doi.org/10.1116/6.0002316
Published: February 2023
View article titled, Effect of annealing on the magnetic anisotropy of GaMnAsP layers with graded P concentration
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Journal Articles

Growth of ultrathin Bi2Se3 films by molecular beam epitaxy

Saadia Nasir, Walter J. Smith, Thomas E. Beechem, Stephanie Law
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 012202 (2023)
https://doi.org/10.1116/6.0002299
Published: December 2022
View article titled, Growth of ultrathin Bi<sub>2</sub>Se<sub>3</sub> films by molecular beam epitaxy
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Includes: Supplementary data
Journal Articles

Metalorganic chemical vapor deposition of (100) β-Ga2O3 on on-axis Ga2O3 substrates

Lingyu Meng, A F M Anhar Uddin Bhuiyan, Zixuan Feng, Hsien-Lien Huang, Jinwoo Hwang, Hongping Zhao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 062706 (2022)
https://doi.org/10.1116/6.0002179
Published: November 2022
View article titled, Metalorganic chemical vapor deposition of (100) β-Ga<sub>2</sub>O<sub>3</sub> on on-axis Ga<sub>2</sub>O<sub>3</sub> substrates
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Journal Articles

Deposition-last lithographically defined epitaxial complex oxide devices on Si(100)

Featured
M. Chrysler, J. C. Jiang, G. Lorkowski, E. I. Meletis, J. H. Ngai
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 052701 (2022)
https://doi.org/10.1116/6.0001939
Published: July 2022
View article titled, Deposition-last lithographically defined epitaxial complex oxide devices on Si(100)
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Journal Articles

Impacts of growth conditions on InAlBiAs electrical properties and morphology

Editor’s Pick
James Bork, Wilder Acuna, Joshua Zide
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 042702 (2022)
https://doi.org/10.1116/6.0001894
Published: June 2022
View article titled, Impacts of growth conditions on InAlBiAs electrical properties and morphology
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Includes: Supplementary data
Journal Articles

Electrical properties of p-type Zn:Ga2O3 thin films

Ekaterine Chikoidze, Corinne Sartel, Hayate Yamano, Zeyu Chi, Guillaume Bouchez, François Jomard, Vincent Sallet, Gérard Guillot, Kamel Boukheddaden, Amador Pérez-Tomás, Tamar Tchelidze, Yves Dumont
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043401 (2022)
https://doi.org/10.1116/6.0001766
Published: May 2022
View article titled, Electrical properties of <em>p</em>-type Zn:Ga<sub>2</sub>O<sub>3</sub> thin films
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Journal Articles

Modification of β-gallium oxide electronic properties by irradiation with high-energy electrons

T.-Huong Dang, M. Konczykowski, H. Jaffrès, V. I. Safarov, H.-J. Drouhin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033416 (2022)
https://doi.org/10.1116/6.0001821
Published: May 2022
View article titled, Modification of β-gallium oxide electronic properties by irradiation with high-energy electrons
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Journal Articles

Optoelectronic properties of transparent oxide semiconductor ASnO3 (A = Ba, Sr, and Ca) epitaxial films and thin film transistors

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Anup V. Sanchela, Mian Wei, Hai Jun Cho, Hiromichi Ohta
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 020803 (2022)
https://doi.org/10.1116/6.0001474
Published: February 2022
View article titled, Optoelectronic properties of transparent oxide semiconductor <em>A</em>SnO<sub>3</sub> (<em>A</em> = Ba, Sr, and Ca) epitaxial films and thin film transistors
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Journal Articles

High entropy alloy CrFeNiCoCu sputter deposited films: Structure, electrical properties, and oxidation

Jeyanthinath Mayandi, Matthias Schrade, Ponniah Vajeeston, Marit Stange, Anna M. Lind, Martin F. Sunding, Jonas Deuermeier, Elvira Fortunato, Ole M. Løvvik, Alexander G. Ulyashin, Spyros Diplas, Patricia A. Carvalho, Terje G. Finstad
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 023402 (2022)
https://doi.org/10.1116/6.0001394
Published: January 2022
View article titled, High entropy alloy CrFeNiCoCu sputter deposited films: Structure, electrical properties, and oxidation
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Includes: Supplementary data
Journal Articles

Anisotropic magnetoresistance and planar Hall effect in correlated and topological materials

Tianlin Li, Le Zhang, Xia Hong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 010807 (2022)
https://doi.org/10.1116/6.0001443
Published: December 2021
View article titled, Anisotropic magnetoresistance and planar Hall effect in correlated and topological materials
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Journal Articles

Study of synthesis strategies to improve the electrical properties of magnetron sputtered copper oxide thin films

Arnaud Krumpmann, Rony Snyders
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 013412 (2022)
https://doi.org/10.1116/6.0001423
Published: December 2021
View article titled, Study of synthesis strategies to improve the electrical properties of magnetron sputtered copper oxide thin films
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Journal Articles

Experimental study of transport properties of Weyl semimetal LaAlGe thin films grown by molecular beam epitaxy

Editor’s Pick
Niraj Bhattarai, Andrew W. Forbes, Christopher Gassen, Raghad S. H. Saqat, Ian L. Pegg, John Philip
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063407 (2021)
https://doi.org/10.1116/6.0001306
Published: September 2021
View article titled, Experimental study of transport properties of Weyl semimetal LaAlGe thin films grown by molecular beam epitaxy
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Journal Articles

Silicon-ion implantation induced doping and nanoporosity in molecular beam epitaxy grown GaSb epitaxial films

Rakesh Kumar Pandey, Puspashree Mishra, Akhilesh Pandey, Shankar Dutta, Aman Arora, Shyama Rath
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 043413 (2021)
https://doi.org/10.1116/6.0000895
Published: June 2021
View article titled, Silicon-ion implantation induced doping and nanoporosity in molecular beam epitaxy grown GaSb epitaxial films
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