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Journal Articles

Low-temperature etching of silicon oxide and silicon nitride with hydrogen fluoride

Thorsten Lill, Mingmei Wang, Dongjun Wu, Youn-Jin Oh, Tae Won Kim, Mark Wilcoxson, Harmeet Singh, Vahid Ghodsi, Steven M. George, Yuri Barsukov, Igor Kaganovich

J. Vac. Sci. Technol. A 42, 063006 (2024)

https://doi.org/10.1116/6.0004019

Published: November 2024

View article titled, Low-temperature etching of silicon oxide and silicon nitride with hydrogen fluoride

Journal Articles

Removing defects from sputter damage on InGaP surfaces using thermal atomic layer etching

Ross Edel, Ezra Alexander, Taewook Nam, Andrew S. Cavanagh, Troy Van Voorhis, Steven M. George

J. Vac. Sci. Technol. A 42, 062602 (2024)

https://doi.org/10.1116/6.0003899

Published: October 2024

View article titled, Removing defects from sputter damage on InGaP surfaces using thermal atomic layer etching

Journal Articles

Elusive supported surface M₂O_x dimer active site (M = Re, W, Mo, Cr, V, Nb, and Ta)

Israel E. Wachs

J. Vac. Sci. Technol. A 42, 063202 (2024)

https://doi.org/10.1116/6.0003928

Published: September 2024

View article titled, Elusive supported surface M2Ox dimer active site (M = Re, W, Mo, Cr, V, Nb, and Ta)

Journal Articles

First-principles calculations on adsorption-diffusion behavior of transition layer Ti atoms on the Fe surface

Haiwei Han, Chunyan Chen, Shunuo Bian, Lihua Yu, Junhua Xu, Xinmeng Wu, Yaohong Jiang, Lijun Zhao

J. Vac. Sci. Technol. A 42, 053406 (2024)

https://doi.org/10.1116/6.0003808

Published: August 2024

View article titled, First-principles calculations on adsorption-diffusion behavior of transition layer Ti atoms on the Fe surface

Journal Articles

First principles reaction processes of Co(CO)₃NO as an atomic layer deposition precursor on SiO₂ and Co surfaces

Nickolas M. Ashburn, Xiuyao Lang, Youhwan Jo, Yeonghun Lee, Xiaolong Yao, Kyeongjae Cho

J. Vac. Sci. Technol. A 42, 052401 (2024)

https://doi.org/10.1116/6.0003769

Published: July 2024

View article titled, First principles reaction processes of Co(CO)3NO as an atomic layer deposition precursor on SiO2 and Co surfaces

Journal Articles

Self-assembled oligomeric structures of an asymmetric molecular linker; 4-isocyanophenyl disulfide on Au(111)

Robert Bavisotto, Dustin Olson, Wilfred T. Tysoe

J. Vac. Sci. Technol. A 42, 043205 (2024)

https://doi.org/10.1116/6.0003603

Published: July 2024

View article titled, Self-assembled oligomeric structures of an asymmetric molecular linker; 4-isocyanophenyl disulfide on Au(111)

Journal Articles

Mechanism study of H₂-plasma assisted Si₃N₄ layered etch

Ying Rui, Sumeet Pandey, Chenmeng Hsie, Lan Li

J. Vac. Sci. Technol. A 42, 042603 (2024)

https://doi.org/10.1116/6.0003653

Published: June 2024

View article titled, Mechanism study of H2-plasma assisted Si3N4 layered etch

Journal Articles

Density functional theory and molecular dynamics study on the growth of graphene by chemical vapor deposition on copper substrate

Qihang Li, Jinping Luo, Zaoyang Li, Mark H. Rummeli, Lijun Liu

J. Vac. Sci. Technol. A 42, 042202 (2024)

https://doi.org/10.1116/6.0003667

Published: June 2024

View article titled, Density functional theory and molecular dynamics study on the growth of graphene by chemical vapor deposition on copper substrate

Journal Articles

Computational study and ion diffusion analyses of native defects and indium alloying in β-Ga₂O₃ structures

Nathan Rabelo Martins, Luiz Augusto Ferreira de Campos Viana, Alan Antônio das Graças Santos, Daiane Damasceno Borges, Eric Welch, Pablo Damasceno Borges, Luisa Scolfaro

J. Vac. Sci. Technol. A 42, 032801 (2024)

https://doi.org/10.1116/6.0003435

Published: March 2024

View article titled, Computational study and ion diffusion analyses of native defects and indium alloying in β-Ga2O3 structures

Includes: Supplementary data

Journal Articles

Interlayer registry effects on the electronic and piezoelectric properties of transition metal dichalcogenide bilayers

S. R. J. Likith, Geoff L. Brennecka, Cristian V. Ciobanu

J. Vac. Sci. Technol. A 42, 032201 (2024)

https://doi.org/10.1116/6.0003264

Published: March 2024

View article titled, Interlayer registry effects on the electronic and piezoelectric properties of transition metal dichalcogenide bilayers

Journal Articles

Spinel LiGa₅O₈ prospects as ultra-wideband-gap semiconductor: Band structure, optical properties, and doping

Walter R. L. Lambrecht

J. Vac. Sci. Technol. A 42, 022705 (2024)

https://doi.org/10.1116/6.0003117

Published: February 2024

View article titled, Spinel LiGa5O8 prospects as ultra-wideband-gap semiconductor: Band structure, optical properties, and doping

Journal Articles

Composition dependence of intrinsic surface states and Fermi-level pinning at ternary Al_xGa_1−xN m-plane surfaces

Lars Freter, Liverios Lymperakis, Michael Schnedler, Holger Eisele, Lei Jin, Jianxun Liu, Qian Sun, Rafal E. Dunin-Borkowski, Philipp Ebert

J. Vac. Sci. Technol. A 42, 023202 (2024)

https://doi.org/10.1116/6.0003225

Published: January 2024

View article titled, Composition dependence of intrinsic surface states and Fermi-level pinning at ternary AlxGa1−xN m-plane surfaces

Journal Articles

Diffusion and magnetization of metal adatoms on single-layer molybdenum disulfide at elevated temperatures

Mohammad Zarshenas, Davide G. Sangiovanni, Kostas Sarakinos

J. Vac. Sci. Technol. A 42, 023409 (2024)

https://doi.org/10.1116/6.0003207

Published: January 2024

View article titled, Diffusion and magnetization of metal adatoms on single-layer molybdenum disulfide at elevated temperatures

Journal Articles

Active learning with moment tensor potentials to predict material properties: Ti_0.5Al_0.5N at elevated temperature

F. Bock, F. Tasnádi, I. A. Abrikosov

J. Vac. Sci. Technol. A 42, 013412 (2024)

https://doi.org/10.1116/6.0003260

Published: January 2024

View article titled, Active learning with moment tensor potentials to predict material properties: Ti0.5Al0.5N at elevated temperature

Journal Articles

Melt-grown semi-insulating Mn:β-Ga₂O₃ single crystals exhibiting unique visible absorptions and luminescence

Benjamin L. Dutton, Joel B. Varley, Cassandra Remple, Jani Jesenovec, Brooke K. Downing, Jimmy-Xuan Shen, Soroush Ghandiparsi, Adam T. Neal, Yunjo Kim, Andrew J. Green, Lars F. Voss, Matthew D. McCluskey, John S. McCloy

J. Vac. Sci. Technol. A 42, 012801 (2024)

https://doi.org/10.1116/6.0003212

Published: December 2023

View article titled, Melt-grown semi-insulating Mn:β-Ga2O3 single crystals exhibiting unique visible absorptions and luminescence

Includes: Supplementary data

Journal Articles

Adsorption mechanism of dimeric Ga precursors in metalorganic chemical vapor deposition of gallium nitride

Hankyu Kim, Miso Kim, Bumsang Kim, Bonggeun Shong

J. Vac. Sci. Technol. A 41, 063409 (2023)

https://doi.org/10.1116/6.0002966

Published: October 2023

View article titled, Adsorption mechanism of dimeric Ga precursors in metalorganic chemical vapor deposition of gallium nitride

Includes: Supplementary data

Journal Articles

Density functional theory calculations of mechanical and electronic properties of W_1−xTa_xN₆, W_1−xMo_xN₆, and Mo_1−xTa_xN₆ (0 ≤ x ≤ 1) alloys in a hexagonal structure

S. R. Kandel, D. Gall, S. V. Khare

J. Vac. Sci. Technol. A 41, 063112 (2023)

https://doi.org/10.1116/6.0002923

Published: October 2023

View article titled, Density functional theory calculations of mechanical and electronic properties of W1−xTaxN6, W1−xMoxN6, and Mo1−xTaxN6 (0 ≤ x ≤ 1) alloys in a hexagonal structure

Includes: Supplementary data

Journal Articles

Mechanistic analysis on low temperature thermal atomic layer deposition of nitrides utilizing H₂S

Jinwoo Lee, Soo Hyun Lee, Bonggeun Shong

J. Vac. Sci. Technol. A 41, 062405 (2023)

https://doi.org/10.1116/6.0003041

Published: October 2023

View article titled, Mechanistic analysis on low temperature thermal atomic layer deposition of nitrides utilizing H2S

Journal Articles

Stannane in extreme ultraviolet lithography and vacuum technology: Synthesis and characterization

Raquel Garza, Nathan Bartlett, Jameson Crouse, Andrew Herschberg, R. Mohan Sankaran, Md. Amzad Hossain, David N. Ruzic

J. Vac. Sci. Technol. A 41, 063209 (2023)

https://doi.org/10.1116/6.0002980

Published: October 2023

View article titled, Stannane in extreme ultraviolet lithography and vacuum technology: Synthesis and characterization

Journal Articles

Band-engineered LaFeO₃–LaNiO₃ thin film interfaces for electrocatalysis of water

Rajendra Paudel, Andricus R. Burton, Marcelo A. Kuroda, Byron H. Farnum, Ryan B. Comes

J. Vac. Sci. Technol. A 41, 063207 (2023)

https://doi.org/10.1116/6.0002987

Published: October 2023

View article titled, Band-engineered LaFeO3–LaNiO3 thin film interfaces for electrocatalysis of water

Includes: Supplementary data

NARROW

Topics

Low-temperature etching of silicon oxide and silicon nitride with hydrogen fluoride

Removing defects from sputter damage on InGaP surfaces using thermal atomic layer etching

Elusive supported surface M₂O_x dimer active site (M = Re, W, Mo, Cr, V, Nb, and Ta)

First-principles calculations on adsorption-diffusion behavior of transition layer Ti atoms on the Fe surface

First principles reaction processes of Co(CO)₃NO as an atomic layer deposition precursor on SiO₂ and Co surfaces

Self-assembled oligomeric structures of an asymmetric molecular linker; 4-isocyanophenyl disulfide on Au(111)

Mechanism study of H₂-plasma assisted Si₃N₄ layered etch

Density functional theory and molecular dynamics study on the growth of graphene by chemical vapor deposition on copper substrate

Computational study and ion diffusion analyses of native defects and indium alloying in β-Ga₂O₃ structures

Interlayer registry effects on the electronic and piezoelectric properties of transition metal dichalcogenide bilayers

Spinel LiGa₅O₈ prospects as ultra-wideband-gap semiconductor: Band structure, optical properties, and doping

Composition dependence of intrinsic surface states and Fermi-level pinning at ternary Al_xGa_1−xN m-plane surfaces

Diffusion and magnetization of metal adatoms on single-layer molybdenum disulfide at elevated temperatures

Active learning with moment tensor potentials to predict material properties: Ti_0.5Al_0.5N at elevated temperature

Melt-grown semi-insulating Mn:β-Ga₂O₃ single crystals exhibiting unique visible absorptions and luminescence

Adsorption mechanism of dimeric Ga precursors in metalorganic chemical vapor deposition of gallium nitride

Density functional theory calculations of mechanical and electronic properties of W_1−xTa_xN₆, W_1−xMo_xN₆, and Mo_1−xTa_xN₆ (0 ≤ x ≤ 1) alloys in a hexagonal structure

Mechanistic analysis on low temperature thermal atomic layer deposition of nitrides utilizing H₂S

Stannane in extreme ultraviolet lithography and vacuum technology: Synthesis and characterization

Band-engineered LaFeO₃–LaNiO₃ thin film interfaces for electrocatalysis of water

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