Page 1 | Search Results | Journal of Vacuum Science & Technology A

1-20 of 179

Sort by

Sort Order Select

Journal Articles

Adsorption mechanism of dimeric Ga precursors in metalorganic chemical vapor deposition of gallium nitride

Hankyu Kim, Miso Kim, Bumsang Kim, Bonggeun Shong

J. Vac. Sci. Technol. A 41, 063409 (2023)

https://doi.org/10.1116/6.0002966

Published: October 2023

View article titled, Adsorption mechanism of dimeric Ga precursors in metalorganic chemical vapor deposition of gallium nitride

Includes: Supplementary data

Journal Articles

Density functional theory calculations of mechanical and electronic properties of W_1−xTa_xN₆, W_1−xMo_xN₆, and Mo_1−xTa_xN₆ (0 ≤ x ≤ 1) alloys in a hexagonal structure

S. R. Kandel, D. Gall, S. V. Khare

J. Vac. Sci. Technol. A 41, 063112 (2023)

https://doi.org/10.1116/6.0002923

Published: October 2023

View article titled, Density functional theory calculations of mechanical and electronic properties of W1−xTaxN6, W1−xMoxN6, and Mo1−xTaxN6 (0 ≤ x ≤ 1) alloys in a hexagonal structure

Includes: Supplementary data

Journal Articles

Mechanistic analysis on low temperature thermal atomic layer deposition of nitrides utilizing H₂S

Jinwoo Lee, Soo Hyun Lee, Bonggeun Shong

J. Vac. Sci. Technol. A 41, 062405 (2023)

https://doi.org/10.1116/6.0003041

Published: October 2023

View article titled, Mechanistic analysis on low temperature thermal atomic layer deposition of nitrides utilizing H2S

Journal Articles

Stannane in extreme ultraviolet lithography and vacuum technology: Synthesis and characterization

Raquel Garza, Nathan Bartlett, Jameson Crouse, Andrew Herschberg, R. Mohan Sankaran, Md. Amzad Hossain, David N. Ruzic

J. Vac. Sci. Technol. A 41, 063209 (2023)

https://doi.org/10.1116/6.0002980

Published: October 2023

View article titled, Stannane in extreme ultraviolet lithography and vacuum technology: Synthesis and characterization

Journal Articles

Band-engineered LaFeO₃–LaNiO₃ thin film interfaces for electrocatalysis of water

Rajendra Paudel, Andricus R. Burton, Marcelo A. Kuroda, Byron H. Farnum, Ryan B. Comes

J. Vac. Sci. Technol. A 41, 063207 (2023)

https://doi.org/10.1116/6.0002987

Published: October 2023

View article titled, Band-engineered LaFeO3–LaNiO3 thin film interfaces for electrocatalysis of water

Includes: Supplementary data

Journal Articles

Multielectronic and multiatomic effects in the U O_4,5 x-ray absorption spectroscopy of uranium dioxide

J. G. Tobin, H. Ramanantoanina, C. Daul, S.-W. Yu

J. Vac. Sci. Technol. A 41, 063208 (2023)

https://doi.org/10.1116/6.0002969

Published: October 2023

View article titled, Multielectronic and multiatomic effects in the U O4,5 x-ray absorption spectroscopy of uranium dioxide

Journal Articles

Solid-source metal-organic MBE for elemental Ir and Ru films

Sreejith Nair, Kyle Noordhoek, Dooyong Lee, Christopher J. Bartel, Bharat Jalan

J. Vac. Sci. Technol. A 41, 062701 (2023)

https://doi.org/10.1116/6.0002955

Published: September 2023

View article titled, Solid-source metal-organic MBE for elemental Ir and Ru films

Includes: Supplementary data

Journal Articles

Enhancing the reactivity of clean, defect-free epitaxial graphene by the substrate—Experiment and theory

T. Stach, A. Seif, A. Ambrosetti, P. L. Silvestrelli, U. Burghaus

J. Vac. Sci. Technol. A 41, 062201 (2023)

https://doi.org/10.1116/6.0002948

Published: September 2023

View article titled, Enhancing the reactivity of clean, defect-free epitaxial graphene by the substrate—Experiment and theory

Includes: Supplementary data

Journal Articles

Orientation-dependent etching of silicon by fluorine molecules: A quantum chemistry computational study

Omesh Dhar Dwivedi, Yuri Barsukov, Sierra Jubin, Joseph R. Vella, Igor Kaganovich

J. Vac. Sci. Technol. A 41, 052602 (2023)

https://doi.org/10.1116/6.0002841

Published: August 2023

View article titled, Orientation-dependent etching of silicon by fluorine molecules: A quantum chemistry computational study

Journal Articles

Density functional theory study on reaction mechanisms of Co(^tbu2DAD)₂ for area selective-atomic layer deposition of Co films on metal surfaces

Nickolas Ashburn, Xiuyao Lang, Sumeet Pandey, Steven Wolf, Steve Kramer, John Smythe, Gurtej Sandhu, Charles Winter, Andrew C. Kummel, Kyeongjae Cho

J. Vac. Sci. Technol. A 41, 052403 (2023)

https://doi.org/10.1116/6.0002840

Published: August 2023

View article titled, Density functional theory study on reaction mechanisms of Co(tbu2DAD)2 for area selective-atomic layer deposition of Co films on metal surfaces

Includes: Supplementary data

Journal Articles

Study of the structure, structural transition, interface model, and magnetic moments of CrN grown on MgO(001) by molecular beam epitaxy

Khan Alam, Rodrigo Ponce-Pérez, Kai Sun, Andrew Foley, Noboru Takeuchi, Arthur R. Smith

J. Vac. Sci. Technol. A 41, 053411 (2023)

https://doi.org/10.1116/6.0002546

Published: August 2023

View article titled, Study of the structure, structural transition, interface model, and magnetic moments of CrN grown on MgO(001) by molecular beam epitaxy

Includes: Supplementary data

Journal Articles

Nucleation and quantum confinement of nano-platelet Bi₂–Bi₂Se₃

Margaret M. Brown, Ricardo Ruvalcaba, Katherine M. Burzynski, Derek Winner, Krishnamurthy Mahalingam, Venkata S. Puli, Ryan P. Laing, Tobin C. Muratore, Jeff L. Brown, Kurt G. Eyink, Said Elhamri, Aldo H. Romero, Jonathan Guerrero-Sanchez, Joseph P. Corbett, Amber Reed

J. Vac. Sci. Technol. A 41, 043406 (2023)

https://doi.org/10.1116/6.0002655

Published: June 2023

View article titled, Nucleation and quantum confinement of nano-platelet Bi2–Bi2Se3

Includes: Supplementary data

Journal Articles

Theoretical analysis of thermal spikes during ion bombardment of amorphous silicon nitride surfaces

Erik S. Cheng, Peter L. G. Ventzek, Gyeong S. Hwang

J. Vac. Sci. Technol. A 41, 043207 (2023)

https://doi.org/10.1116/6.0002656

Published: June 2023

View article titled, Theoretical analysis of thermal spikes during ion bombardment of amorphous silicon nitride surfaces

Includes: Supplementary data

Journal Articles

Gas-phase etching mechanism of silicon oxide by a mixture of hydrogen fluoride and ammonium fluoride: A density functional theory study

Romel Hidayat, Khabib Khumaini, Hye-Lee Kim, Tanzia Chowdhury, Tirta Rona Mayangsari, Seongjae Cho, Byungchul Cho, Sangjoon Park, Jongwan Jung, Won-Jun Lee

J. Vac. Sci. Technol. A 41, 032604 (2023)

https://doi.org/10.1116/6.0002433

Published: April 2023

View article titled, Gas-phase etching mechanism of silicon oxide by a mixture of hydrogen fluoride and ammonium fluoride: A density functional theory study

Includes: Supplementary data

Journal Articles

Influence of local chemical environment and external perturbations of porphyrins on surfaces

José J. Ortiz-Garcia, Rebecca C. Quardokus

J. Vac. Sci. Technol. A 41, 030801 (2023)

https://doi.org/10.1116/6.0002401

Published: March 2023

View article titled, Influence of local chemical environment and external perturbations of porphyrins on surfaces

Journal Articles

Structure evolution and mechanical properties of Al-alloyed tantalum diboride films prepared by magnetron sputtering co-deposition

Viktor Šroba, Tomáš Fiantok, Martin Truchlý, Tomáš Roch, Branislav Grančič, Katarína Viskupová, Leonid Satrapinskyy, Peter Švec, Jr., Štefan Nagy, Vitalii Izai, Peter Kúš, Marián Mikula

J. Vac. Sci. Technol. A 41, 023410 (2023)

https://doi.org/10.1116/6.0002390

Published: March 2023

View article titled, Structure evolution and mechanical properties of Al-alloyed tantalum diboride films prepared by magnetron sputtering co-deposition

Journal Articles

On the limitations of thermal atomic layer deposition of InN using ammonia

Karl Rönnby, Henrik Pedersen, Lars Ojamäe

J. Vac. Sci. Technol. A 41, 020401 (2023)

https://doi.org/10.1116/6.0002355

Published: February 2023

View article titled, On the limitations of thermal atomic layer deposition of InN using ammonia

Includes: Supplementary data

Journal Articles

Hydrogen molecule adsorption and sensing on lanthanide (La) doped/decorated carbon nanotube and graphene structures

Numan Yuksel, Ahmet Kose, Derya Düzenli, M. Ferdi Fellah

J. Vac. Sci. Technol. A 41, 023202 (2023)

https://doi.org/10.1116/6.0002229

Published: February 2023

View article titled, Hydrogen molecule adsorption and sensing on lanthanide (La) doped/decorated carbon nanotube and graphene structures

Includes: Supplementary data

Journal Articles

Feasibility study of dative bond formation for bilayer silicon growth under excessive strain

Kumar Vishal, Zhonghang Ji, Yan Zhuang

J. Vac. Sci. Technol. A 41, 022201 (2023)

https://doi.org/10.1116/6.0002222

Published: February 2023

View article titled, Feasibility study of dative bond formation for bilayer silicon growth under excessive strain

Journal Articles

On the possible nature of deep centers in Ga₂O₃

A. Y. Polyakov, A. I. Kochkova, Amanda Langørgen, Lasse Vines, A. Vasilev, I. V. Shchemerov, A. A. Romanov, S. J. Pearton

J. Vac. Sci. Technol. A 41, 023401 (2023)

https://doi.org/10.1116/6.0002307

Published: January 2023

View article titled, On the possible nature of deep centers in Ga2O3

Includes: Supplementary data

NARROW

Topics

Adsorption mechanism of dimeric Ga precursors in metalorganic chemical vapor deposition of gallium nitride

Density functional theory calculations of mechanical and electronic properties of W_1−xTa_xN₆, W_1−xMo_xN₆, and Mo_1−xTa_xN₆ (0 ≤ x ≤ 1) alloys in a hexagonal structure

Mechanistic analysis on low temperature thermal atomic layer deposition of nitrides utilizing H₂S

Stannane in extreme ultraviolet lithography and vacuum technology: Synthesis and characterization

Band-engineered LaFeO₃–LaNiO₃ thin film interfaces for electrocatalysis of water

Multielectronic and multiatomic effects in the U O_4,5 x-ray absorption spectroscopy of uranium dioxide

Solid-source metal-organic MBE for elemental Ir and Ru films

Enhancing the reactivity of clean, defect-free epitaxial graphene by the substrate—Experiment and theory

Orientation-dependent etching of silicon by fluorine molecules: A quantum chemistry computational study

Density functional theory study on reaction mechanisms of Co(^tbu2DAD)₂ for area selective-atomic layer deposition of Co films on metal surfaces

Study of the structure, structural transition, interface model, and magnetic moments of CrN grown on MgO(001) by molecular beam epitaxy

Nucleation and quantum confinement of nano-platelet Bi₂–Bi₂Se₃

Theoretical analysis of thermal spikes during ion bombardment of amorphous silicon nitride surfaces

Gas-phase etching mechanism of silicon oxide by a mixture of hydrogen fluoride and ammonium fluoride: A density functional theory study

Influence of local chemical environment and external perturbations of porphyrins on surfaces

Structure evolution and mechanical properties of Al-alloyed tantalum diboride films prepared by magnetron sputtering co-deposition

On the limitations of thermal atomic layer deposition of InN using ammonia

Hydrogen molecule adsorption and sensing on lanthanide (La) doped/decorated carbon nanotube and graphene structures

Feasibility study of dative bond formation for bilayer silicon growth under excessive strain

On the possible nature of deep centers in Ga₂O₃

Resources

Explore

pubs.aip.org

Connect with AIP Publishing

Resources

Explore

pubs.aip.org

Connect with AIP Publishing

This Feature Is Available To Subscribers Only