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Journal Articles

Mechanism study of H2-plasma assisted Si3N4 layered etch

Editor’s Pick
Ying Rui, Sumeet Pandey, Chenmeng Hsie, Lan Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 042603 (2024)
https://doi.org/10.1116/6.0003653
Published: June 2024
View article titled, Mechanism study of H<sub>2</sub>-plasma assisted Si<sub>3</sub>N<sub>4</sub> layered etch
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Journal Articles

Diffusion and magnetization of metal adatoms on single-layer molybdenum disulfide at elevated temperatures

Mohammad Zarshenas, Davide G. Sangiovanni, Kostas Sarakinos
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023409 (2024)
https://doi.org/10.1116/6.0003207
Published: January 2024
View article titled, Diffusion and magnetization of metal adatoms on single-layer molybdenum disulfide at elevated temperatures
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Journal Articles

Active learning with moment tensor potentials to predict material properties: Ti0.5Al0.5N at elevated temperature

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F. Bock, F. Tasnádi, I. A. Abrikosov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 013412 (2024)
https://doi.org/10.1116/6.0003260
Published: January 2024
View article titled, Active learning with moment tensor potentials to predict material properties: Ti<sub>0.5</sub>Al<sub>0.5</sub>N at elevated temperature
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Journal Articles

Relationship between local coordinates and thermal conductivity in amorphous carbon

Emi Minamitani, Takuma Shiga, Makoto Kashiwagi, Ippei Obayashi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033408 (2022)
https://doi.org/10.1116/6.0001744
Published: April 2022
View article titled, Relationship between local coordinates and thermal conductivity in amorphous carbon
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Journal Articles

Sulfur-enhanced dynamics of coinage metal(111) surfaces: Step edges versus terraces as locations for metal-sulfur complex formation

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Da-Jiang Liu, James W. Evans
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 023205 (2022)
https://doi.org/10.1116/6.0001408
Published: February 2022
View article titled, Sulfur-enhanced dynamics of coinage metal(111) surfaces: Step edges versus terraces as locations for metal-sulfur complex formation
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Journal Articles

Wide range temperature dependence of reflection high-energy electron diffraction rocking curve from a Si (111)7×7 surface

Y. Fukaya, K. Nakamura, Y. Shigeta
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 968–971 (2000)
https://doi.org/10.1116/1.582285
Published: May 2000
View article titled, Wide range temperature dependence of reflection high-energy electron diffraction rocking curve from a Si (111)7×7 surface
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Journal Articles

Temperature dependence of reflection high-energy electron diffraction intensity from Si (111)-7×7 superlattice

K. Yamaguchi, H. Mitsui, Y. Shigeta
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 15, 2569–2573 (1997)
https://doi.org/10.1116/1.580773
Published: September 1997
View article titled, Temperature dependence of reflection high-energy electron diffraction intensity from Si (111)-7×7 superlattice
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