Graphite macroparticle filtering efficiency of three different magnetic filter designs used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon films | Citedby Results | Journal of Vacuum Science & Technology A | AIP Publishing

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Graphite macroparticle filtering efficiency of three different magnetic filter designs used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon films

J. Vac. Sci. Technol. A 17, 3077–3080 (1999)

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