Skip to Main Content
Skip Nav Destination

Protection schemes for critical surface in vacuum environments

J. Vac. Sci. Technol. A 23, 1319–1324 (2005)
This article has been cited by the following articles in journals that are participating in CrossRef Cited-by Linking.
  • Dongchi Yu
  • Yuan Ma
IEEE Transactions on Semiconductor Manufacturing 35, 556 (2022)
  • Prudhvi Ravikumar Kollati
  • Soumya Sanjeeb Mohapatra
Environmental Science and Pollution Research 28, 67343 (2021)
  • Yan Ye
  • David Y. H. Pui
IEEE Sensors Letters 3, 1 (2019)
  • Kazue TAKAHASHI
Journal of the Vacuum Society of Japan 58, 292 (2015)
  • Se-Jin Yook
  • Heinz Fissan
  • Thomas Engelke
  • Christof Asbach
  • Till van der Zwaag
  • Jung Hyeun Kim
  • Florence Eschbach
  • Jing Wang
  • David Y. H. Pui
IEEE Transactions on Semiconductor Manufacturing 21, 238 (2008)
  • Jung Hyeun Kim
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 26, L1 (2008)
  • Christof Asbach
  • Heinz Fissan
  • Jung Hyeun Kim
  • Se-Jin Yook
  • David Y. H. Pui
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 25, 47 (2007)
  • Se-Jin Yook
  • Heinz Fissan
  • Christof Asbach
  • Jung Hyeun Kim
  • Dabrina D. Dutcher
  • Pei-Yang Yan
  • David Y. H. Pui
IEEE Transactions on Semiconductor Manufacturing 20, 578 (2007)
  • Se-Jin Yook
  • Heinz Fissan
  • Christof Asbach
  • Jung Hyeun Kim
  • Jing Wang
  • Pei-Yang Yan
  • David Y.H. Pui
Journal of Aerosol Science 38, 211 (2007)
  • Se-Jin Yook
  • Heinz Fissan
  • Christof Asbach
  • Jung Hyeun Kim
  • Till van der Zwaag
  • Thomas Engelke
  • Pei-Yang Yan
  • David Y. H. Pui
IEEE Transactions on Semiconductor Manufacturing 20, 176 (2007)
  • Hugo Nguyen
  • Johan Bejhed
  • Johan Köhler
  • Greger Thornell
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 25, 686 (2007)
  • Jung Hyeun Kim
  • Heinz Fissan
  • Christof Asbach
  • Se-Jin Yook
  • David Y. H. Pui
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 24, 229 (2006)
  • Jung Hyeun Kim
  • Heinz Fissan
  • Christof Asbach
  • Se-Jin Yook
  • Jing Wang
  • David Y. H. Pui
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 24, 1844 (2006)
  • Christof Asbach
  • Heinz Fissan
  • Jung Hyeun Kim
  • Se-Jin Yook
  • David Y. H. Pui
Journal of Nanoparticle Research 8, 705 (2006)
  • Christof Asbach
  • David Y. H. Pui
  • Jung Hyeun Kim
  • Se-Jin Yook
  • Heinz Fissan
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 23, 2419 (2005)
Close Modal

or Create an Account

Close Modal
Close Modal